Methods for low-temperature p-CVD and thermal ALD of magnesium diboride
Abstract
ALD and p-CVD methods to generate MgB2 and MgB2-containing films in the growth temperature range of 250-300° C. The thermal ALD and p-CVD methods shown herein ensure that the high-temperature-induced roughening, which causes high surface resistances in MgB2 coatings grown by the mentioned conventional techniques, is avoided. The MgB2 and MgB2-containing films exhibit superconductive properties at above 20° K.
- Inventors:
- Issue Date:
- Research Org.:
- Argonne National Laboratory (ANL), Argonne, IL (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 2293665
- Patent Number(s):
- 11773488
- Application Number:
- 16/426,994
- Assignee:
- UChicago Argonne, LLC (Chicago, IL)
- DOE Contract Number:
- AC02-06CH11357
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 05/30/2019
- Country of Publication:
- United States
- Language:
- English
Citation Formats
Mandia, David Joseph, Yanguas-Gil, Angel, Choudhury, Devika, Nassiri, Aliraeza, Mane, Anil U., and Elam, Jeffrey W. Methods for low-temperature p-CVD and thermal ALD of magnesium diboride. United States: N. p., 2023.
Web.
Mandia, David Joseph, Yanguas-Gil, Angel, Choudhury, Devika, Nassiri, Aliraeza, Mane, Anil U., & Elam, Jeffrey W. Methods for low-temperature p-CVD and thermal ALD of magnesium diboride. United States.
Mandia, David Joseph, Yanguas-Gil, Angel, Choudhury, Devika, Nassiri, Aliraeza, Mane, Anil U., and Elam, Jeffrey W. Tue .
"Methods for low-temperature p-CVD and thermal ALD of magnesium diboride". United States. https://www.osti.gov/servlets/purl/2293665.
@article{osti_2293665,
title = {Methods for low-temperature p-CVD and thermal ALD of magnesium diboride},
author = {Mandia, David Joseph and Yanguas-Gil, Angel and Choudhury, Devika and Nassiri, Aliraeza and Mane, Anil U. and Elam, Jeffrey W.},
abstractNote = {ALD and p-CVD methods to generate MgB2 and MgB2-containing films in the growth temperature range of 250-300° C. The thermal ALD and p-CVD methods shown herein ensure that the high-temperature-induced roughening, which causes high surface resistances in MgB2 coatings grown by the mentioned conventional techniques, is avoided. The MgB2 and MgB2-containing films exhibit superconductive properties at above 20° K.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2023},
month = {10}
}
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Works referenced in this record:
Atomic layer deposition of B-doped ZnO using triisopropyl borate as the boron precursor and comparison with Al-doped ZnO
journal, January 2015
- Garcia-Alonso, Diana; Potts, Stephen E.; van Helvoirt, Cristian A. A.
- Journal of Materials Chemistry C, Vol. 3, Issue 13
XPS investigation of monatomic and cluster argon ion sputtering of tantalum pentoxide
journal, May 2017
- Simpson, Robin; White, Richard G.; Watts, John F.
- Applied Surface Science, Vol. 405
Synthesis of MgB2 at Low Temperature and Autogenous Pressure
journal, May 2014
- Mackinnon, Ian; Winnett, Abigail; Alarco, Jose
- Materials, Vol. 7, Issue 5
Nano-fabricated superconducting radio-frequency composites, method for producing nano-fabricated superconducting rf composites
patent, June 2013
- Norem, James H.; Pellin, Michael J.
- US Patent Document 8,463,342
Highly Volatile Magnesium Complexes with the Aminodiboranate Anion, a New Chelating Borohydride. Synthesis and Characterization of Mg(H 3 BNMe 2 BH 3 ) 2 and Related Compounds
journal, June 2010
- Kim, Do Young; Girolami, Gregory S.
- Inorganic Chemistry, Vol. 49, Issue 11
Microwave measurements of MgB 2 : implications for applications and order-parameter symmetry
journal, February 2010
- Oates, D. E.; Agassi, Y. D.; Moeckly, B. H.
- Superconductor Science and Technology, Vol. 23, Issue 3
Metal complex compositions and methods for making metal-containing films
patent, January 2013
- Girolami, Gregory S.; Kim, Do-Young; Abelson, John R.
- US Patent Document 8,362,220
Superconductivity at 39 K in magnesium diboride
journal, March 2001
- Nagamatsu, Jun; Nakagawa, Norimasa; Muranaka, Takahiro
- Nature, Vol. 410, Issue 6824
Atomic layer deposition of B2O3/SiO2 thin films and their application in an efficient diffusion doping process
journal, January 2014
- Kim, Woo-Hee; Oh, Il-Kwon; Kim, Min-Kyu
- Journal of Materials Chemistry C, Vol. 2, Issue 29
Viscous flow reactor with quartz crystal microbalance for thin film growth by atomic layer deposition
journal, August 2002
- Elam, J. W.; Groner, M. D.; George, S. M.
- Review of Scientific Instruments, Vol. 73, Issue 8, p. 2981-2987
Hybrid Physical Chemical Vapor Deposition of Magnesium Diboride Inside 3.9 GHz Mock Cavities
journal, June 2017
- Lee, Namhoon; Withanage, Wenura K.; Tan, Teng
- IEEE Transactions on Applied Superconductivity, Vol. 27, Issue 4
Oleophilic Foams for Oil Spill Mitigation
patent-application, June 2017
- DArling, Seth B.; Elam, Jeffrey W.; Mane, Anil U.
- US Patent Application 14/967021; 20170166456
Superconducting MgB2 film prepared by chemical vapor deposition at atmospheric pressure of N2
journal, June 2015
- Zhang, Song; Deng, Chao-Yong; Wang, Xu
- Thin Solid Films, Vol. 584
Phonon modes of MgB2: super-lattice structures and spectral response
journal, January 2014
- Alarco, Jose A.; Chou, Alison; Talbot, Peter C.
- Phys. Chem. Chem. Phys., Vol. 16, Issue 44
Superior homogeneity of trapped magnetic field in superconducting MgB2bulk magnets
journal, January 2017
- Ishihara, A.; Akasaka, T.; Tomita, M.
- Superconductor Science and Technology, Vol. 30, Issue 3
Review of the superconducting properties of MgB 2
journal, November 2001
- Buzea, Cristina; Yamashita, Tsutomu
- Superconductor Science and Technology, Vol. 14, Issue 11
In-situ growth of superconducting MgB2 thin films by HPCVD method at low temperature
journal, December 2007
- Yang, J.; Wang, S.; Yang, F. S.
- Physica C: Superconductivity and its Applications, Vol. 467, Issue 1-2
Anisotropic optical conductivity and two colors of
journal, March 2006
- Guritanu, V.; Kuzmenko, A. B.; van der Marel, D.
- Physical Review B, Vol. 73, Issue 10
Enhanced growth rate in atomic layer epitaxy deposition of magnesium oxide thin films
journal, January 2000
- Putkonen, Matti; Sajavaara, Timo; Niinistö, Lauri
- Journal of Materials Chemistry, Vol. 10, Issue 8
Highly conformal magnesium oxide thin films by low-temperature chemical vapor deposition from Mg(H3BNMe2BH3)2 and water
journal, March 2013
- Wang, Wenjiao B.; Yang, Yu; Yanguas-Gil, Angel
- Applied Physics Letters, Vol. 102, Issue 10
Atomic Layer Deposition of MgO Using Bis(ethylcyclopentadienyl)magnesium and H2O
journal, January 2009
- Burton, B. B.; Goldstein, D. N.; George, S. M.
- The Journal of Physical Chemistry C, Vol. 113, Issue 5