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Title: Methods for depositing III-alloys on substrates and compositions therefrom

Abstract

A method for depositing III-V alloys on substrates and compositions therefrom. A first layer comprises a Group III element. A second layer comprises a silica. A substrate has a surface. The second layer is deposited onto a first layer. The depositing is performed by a sol-gel method. The second layer is exposed to a precursor that comprises a Group V element. At least one of the precursor or the Group V element diffuse through the silica. The first layer is transformed into a solid layer comprising a III-V alloy, wherein at least a portion of the first layer to a liquid. The silica retains the liquified first layer, enabling at least one of the precursor or the Group V element to diffuse into the liquid, resulting in the forming of the III-V alloy.

Inventors:
; ;
Issue Date:
Research Org.:
National Renewable Energy Laboratory (NREL), Golden, CO (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
2222091
Patent Number(s):
11721550
Application Number:
17/495,913
Assignee:
United States Department of Energy (Washington, DC)
DOE Contract Number:  
AC36-08GO28308
Resource Type:
Patent
Resource Relation:
Patent File Date: 10/07/2021
Country of Publication:
United States
Language:
English

Citation Formats

Warren, Emily Lowell, Zimmerman, Jeramy David, and Schneble, Olivia Dean. Methods for depositing III-alloys on substrates and compositions therefrom. United States: N. p., 2023. Web.
Warren, Emily Lowell, Zimmerman, Jeramy David, & Schneble, Olivia Dean. Methods for depositing III-alloys on substrates and compositions therefrom. United States.
Warren, Emily Lowell, Zimmerman, Jeramy David, and Schneble, Olivia Dean. Tue . "Methods for depositing III-alloys on substrates and compositions therefrom". United States. https://www.osti.gov/servlets/purl/2222091.
@article{osti_2222091,
title = {Methods for depositing III-alloys on substrates and compositions therefrom},
author = {Warren, Emily Lowell and Zimmerman, Jeramy David and Schneble, Olivia Dean},
abstractNote = {A method for depositing III-V alloys on substrates and compositions therefrom. A first layer comprises a Group III element. A second layer comprises a silica. A substrate has a surface. The second layer is deposited onto a first layer. The depositing is performed by a sol-gel method. The second layer is exposed to a precursor that comprises a Group V element. At least one of the precursor or the Group V element diffuse through the silica. The first layer is transformed into a solid layer comprising a III-V alloy, wherein at least a portion of the first layer to a liquid. The silica retains the liquified first layer, enabling at least one of the precursor or the Group V element to diffuse into the liquid, resulting in the forming of the III-V alloy.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2023},
month = {8}
}

Works referenced in this record:

Low Temperature Sol-gel Silicates as Dielectrics or Planarization Layers for Thin Film Transistors
patent-application, January 2008


Gallium Nitride Growth of Silicone
patent-application, September 2017


Filling Openings by Combining Non-flowable and Flowable Processes
patent-application, November 2020