Resonant-based photonic intensity modulators integrated with fully etched thin-film lithium niobate waveguides
Abstract
An apparatus such as an optical modulator includes a buried oxide layer is disposed on a substrate. A microring resonator and an optical waveguide are disposed on the buried oxide layer and within a bonded semiconductor layer. The optical waveguide is optically coupled to the microring resonator and inputs a first optical wave into the microring resonator. An oxide layer is deposited on top of the optical waveguide and the microring resonator. A set of electrodes is disposed adjacent to the microring resonator, and in response to an electrical signal, the set of electrodes modulates the first optical wave into a modulated optical wave of transverse magnetic polarization within the microring resonator and outputs the modulated optical wave to the optical waveguide.
- Issue Date:
- Research Org.:
- Univ. of Illinois at Urbana-Champaign, IL (United States)
- Sponsoring Org.:
- USDOE; National Aeronautics and Space Administration (NASA)
- OSTI Identifier:
- 2221948
- Patent Number(s):
- 11693180
- Application Number:
- 17/377,305
- Assignee:
- The Board of Trustees of the University of Illinois (Urbana, IL)
- DOE Contract Number:
- 80NSSC17K0529
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 07/15/2021
- Country of Publication:
- United States
- Language:
- English
Citation Formats
. Resonant-based photonic intensity modulators integrated with fully etched thin-film lithium niobate waveguides. United States: N. p., 2023.
Web.
. Resonant-based photonic intensity modulators integrated with fully etched thin-film lithium niobate waveguides. United States.
. Tue .
"Resonant-based photonic intensity modulators integrated with fully etched thin-film lithium niobate waveguides". United States. https://www.osti.gov/servlets/purl/2221948.
@article{osti_2221948,
title = {Resonant-based photonic intensity modulators integrated with fully etched thin-film lithium niobate waveguides},
author = {},
abstractNote = {An apparatus such as an optical modulator includes a buried oxide layer is disposed on a substrate. A microring resonator and an optical waveguide are disposed on the buried oxide layer and within a bonded semiconductor layer. The optical waveguide is optically coupled to the microring resonator and inputs a first optical wave into the microring resonator. An oxide layer is deposited on top of the optical waveguide and the microring resonator. A set of electrodes is disposed adjacent to the microring resonator, and in response to an electrical signal, the set of electrodes modulates the first optical wave into a modulated optical wave of transverse magnetic polarization within the microring resonator and outputs the modulated optical wave to the optical waveguide.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2023},
month = {7}
}
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