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Title: Resonant-based photonic intensity modulators integrated with fully etched thin-film lithium niobate waveguides

Abstract

An apparatus such as an optical modulator includes a buried oxide layer is disposed on a substrate. A microring resonator and an optical waveguide are disposed on the buried oxide layer and within a bonded semiconductor layer. The optical waveguide is optically coupled to the microring resonator and inputs a first optical wave into the microring resonator. An oxide layer is deposited on top of the optical waveguide and the microring resonator. A set of electrodes is disposed adjacent to the microring resonator, and in response to an electrical signal, the set of electrodes modulates the first optical wave into a modulated optical wave of transverse magnetic polarization within the microring resonator and outputs the modulated optical wave to the optical waveguide.

Issue Date:
Research Org.:
Univ. of Illinois at Urbana-Champaign, IL (United States)
Sponsoring Org.:
USDOE; National Aeronautics and Space Administration (NASA)
OSTI Identifier:
2221948
Patent Number(s):
11693180
Application Number:
17/377,305
Assignee:
The Board of Trustees of the University of Illinois (Urbana, IL)
DOE Contract Number:  
80NSSC17K0529
Resource Type:
Patent
Resource Relation:
Patent File Date: 07/15/2021
Country of Publication:
United States
Language:
English

Citation Formats

. Resonant-based photonic intensity modulators integrated with fully etched thin-film lithium niobate waveguides. United States: N. p., 2023. Web.
. Resonant-based photonic intensity modulators integrated with fully etched thin-film lithium niobate waveguides. United States.
. Tue . "Resonant-based photonic intensity modulators integrated with fully etched thin-film lithium niobate waveguides". United States. https://www.osti.gov/servlets/purl/2221948.
@article{osti_2221948,
title = {Resonant-based photonic intensity modulators integrated with fully etched thin-film lithium niobate waveguides},
author = {},
abstractNote = {An apparatus such as an optical modulator includes a buried oxide layer is disposed on a substrate. A microring resonator and an optical waveguide are disposed on the buried oxide layer and within a bonded semiconductor layer. The optical waveguide is optically coupled to the microring resonator and inputs a first optical wave into the microring resonator. An oxide layer is deposited on top of the optical waveguide and the microring resonator. A set of electrodes is disposed adjacent to the microring resonator, and in response to an electrical signal, the set of electrodes modulates the first optical wave into a modulated optical wave of transverse magnetic polarization within the microring resonator and outputs the modulated optical wave to the optical waveguide.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2023},
month = {7}
}

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