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Title: Cooled window for X-rays or charged particles

A window is disclosed that provides good structural integrity and a very high capacity for removal of the heat deposited by x-rays, electrons, or ions, with minimum attenuation of the desired beam. The window is cooled by providing microchannels therein through which a coolant is pumped. For example, the window may be made of silicon with etched microchannels therein and covered by a silicon member. A window made of silicon with a total thickness of 520 {micro}m transmits 96% of the x-rays at an energy of 60 keV, and the transmission is higher than 90% for higher energy photons. 1 fig.
Inventors:
Issue Date:
OSTI Identifier:
215233
Assignee:
Univ. of California, Oakland, CA (United States) PTO; SCA: 070201; 661220; PA: INS-96:009836; EDB-96:070895; SN: 96001569516
Patent Number(s):
US 5,509,046/A/
Application Number:
PAN: 8-300,772
Contract Number:
W-7405-ENG-48
Resource Relation:
Other Information: PBD: 16 Apr 1996
Research Org:
University of California
Country of Publication:
United States
Language:
English
Subject:
07 ISOTOPE AND RADIATION SOURCE TECHNOLOGY; 66 PHYSICS; WINDOWS; COOLING; DESIGN; X-RAY SOURCES; ELECTRON SOURCES; ION SOURCES; X RADIATION; ELECTRON BEAMS; ION BEAMS; PHOTON BEAMS; BEAM TRANSPORT

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