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Title: Reactive multilayer synthesis of hard ceramic foils and films

A method is disclosed for synthesizing hard ceramic materials such as carbides, borides and aluminides, particularly in the form of coatings provided on another material so as to improve the wear and abrasion performance of machine tools, for example. The method involves the sputter deposition of alternating layers of reactive metals with layers of carbon, boron, or aluminum and the subsequent reaction of the multilayered structure to produce a dense crystalline ceramic. The material can be coated on a substrate or formed as a foil which can be coiled as a tape for later use.
Inventors:
;
Issue Date:
OSTI Identifier:
201530
Assignee:
Dept. of Energy, Washington, DC (United States) PTO; SCA: 360201; PA: EDB-96:053755; SN: 96001551791
Patent Number(s):
US 5,490,911/A/
Application Number:
PAN: 8-157,497
Contract Number:
W-7405-ENG-48
Resource Relation:
Other Information: PBD: 13 Feb 1996
Research Org:
University of California
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; CERAMICS; SYNTHESIS; PROTECTIVE COATINGS; SPUTTERING; FOILS; THIN FILMS