Reactive multilayer synthesis of hard ceramic foils and films
Abstract
A method is disclosed for synthesizing hard ceramic materials such as carbides, borides and aluminides, particularly in the form of coatings provided on another material so as to improve the wear and abrasion performance of machine tools, for example. The method involves the sputter deposition of alternating layers of reactive metals with layers of carbon, boron, or aluminum and the subsequent reaction of the multilayered structure to produce a dense crystalline ceramic. The material can be coated on a substrate or formed as a foil which can be coiled as a tape for later use.
- Inventors:
- Issue Date:
- Research Org.:
- Univ. of California (United States)
- OSTI Identifier:
- 201530
- Patent Number(s):
- 5490911
- Application Number:
- PAN: 8-157,497
- Assignee:
- Dept. of Energy, Washington, DC (United States)
- DOE Contract Number:
- W-7405-ENG-48
- Resource Type:
- Patent
- Resource Relation:
- Other Information: PBD: 13 Feb 1996
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; CERAMICS; SYNTHESIS; PROTECTIVE COATINGS; SPUTTERING; FOILS; THIN FILMS
Citation Formats
Makowiecki, D M, and Holt, J B. Reactive multilayer synthesis of hard ceramic foils and films. United States: N. p., 1996.
Web.
Makowiecki, D M, & Holt, J B. Reactive multilayer synthesis of hard ceramic foils and films. United States.
Makowiecki, D M, and Holt, J B. Tue .
"Reactive multilayer synthesis of hard ceramic foils and films". United States.
@article{osti_201530,
title = {Reactive multilayer synthesis of hard ceramic foils and films},
author = {Makowiecki, D M and Holt, J B},
abstractNote = {A method is disclosed for synthesizing hard ceramic materials such as carbides, borides and aluminides, particularly in the form of coatings provided on another material so as to improve the wear and abrasion performance of machine tools, for example. The method involves the sputter deposition of alternating layers of reactive metals with layers of carbon, boron, or aluminum and the subsequent reaction of the multilayered structure to produce a dense crystalline ceramic. The material can be coated on a substrate or formed as a foil which can be coiled as a tape for later use.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1996},
month = {2}
}
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