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Title: Reactive multilayer synthesis of hard ceramic foils and films

Abstract

A method is disclosed for synthesizing hard ceramic materials such as carbides, borides and aluminides, particularly in the form of coatings provided on another material so as to improve the wear and abrasion performance of machine tools, for example. The method involves the sputter deposition of alternating layers of reactive metals with layers of carbon, boron, or aluminum and the subsequent reaction of the multilayered structure to produce a dense crystalline ceramic. The material can be coated on a substrate or formed as a foil which can be coiled as a tape for later use.

Inventors:
;
Issue Date:
Research Org.:
University of California
OSTI Identifier:
201530
Patent Number(s):
5,490,911
Application Number:
PAN: 8-157,497
Assignee:
Dept. of Energy, Washington, DC (United States)
DOE Contract Number:  
W-7405-ENG-48
Resource Type:
Patent
Resource Relation:
Other Information: PBD: 13 Feb 1996
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; CERAMICS; SYNTHESIS; PROTECTIVE COATINGS; SPUTTERING; FOILS; THIN FILMS

Citation Formats

Makowiecki, D M, and Holt, J B. Reactive multilayer synthesis of hard ceramic foils and films. United States: N. p., 1996. Web.
Makowiecki, D M, & Holt, J B. Reactive multilayer synthesis of hard ceramic foils and films. United States.
Makowiecki, D M, and Holt, J B. Tue . "Reactive multilayer synthesis of hard ceramic foils and films". United States.
@article{osti_201530,
title = {Reactive multilayer synthesis of hard ceramic foils and films},
author = {Makowiecki, D M and Holt, J B},
abstractNote = {A method is disclosed for synthesizing hard ceramic materials such as carbides, borides and aluminides, particularly in the form of coatings provided on another material so as to improve the wear and abrasion performance of machine tools, for example. The method involves the sputter deposition of alternating layers of reactive metals with layers of carbon, boron, or aluminum and the subsequent reaction of the multilayered structure to produce a dense crystalline ceramic. The material can be coated on a substrate or formed as a foil which can be coiled as a tape for later use.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1996},
month = {2}
}