Heterogeneous integration of an electro-optical platform
Abstract
A hybrid photonic integrated circuit and a method of its manufacture are provided. A SiP functional layer is fabricated on an SOI wafer. A lithium niobate thin film is bonded to the SiP functional layer. The silicon handle layer is removed from the SOI wafer to expose buried oxide, and at least one III-V die is bonded to the exposed buried oxide. In embodiments, at least one waveguiding component is fabricated in the SiP functional layer. In embodiments, the SiP functional layer comprises a top waveguiding layer.
- Inventors:
- Issue Date:
- Research Org.:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Org.:
- USDOE National Nuclear Security Administration (NNSA)
- OSTI Identifier:
- 1998483
- Patent Number(s):
- 11675126
- Application Number:
- 17/221,949
- Assignee:
- National Technology & Engineering Solutions of Sandia, LLC (Albuquerque, NM)
- DOE Contract Number:
- NA0003525
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 04/05/2021
- Country of Publication:
- United States
- Language:
- English
Citation Formats
Kodigala, Ashok, Lentine, Anthony L., Boynton, Nicholas, Trotter, Douglas Chandler, Friedmann, Thomas A., and Weiner, Philip Harrison. Heterogeneous integration of an electro-optical platform. United States: N. p., 2023.
Web.
Kodigala, Ashok, Lentine, Anthony L., Boynton, Nicholas, Trotter, Douglas Chandler, Friedmann, Thomas A., & Weiner, Philip Harrison. Heterogeneous integration of an electro-optical platform. United States.
Kodigala, Ashok, Lentine, Anthony L., Boynton, Nicholas, Trotter, Douglas Chandler, Friedmann, Thomas A., and Weiner, Philip Harrison. Tue .
"Heterogeneous integration of an electro-optical platform". United States. https://www.osti.gov/servlets/purl/1998483.
@article{osti_1998483,
title = {Heterogeneous integration of an electro-optical platform},
author = {Kodigala, Ashok and Lentine, Anthony L. and Boynton, Nicholas and Trotter, Douglas Chandler and Friedmann, Thomas A. and Weiner, Philip Harrison},
abstractNote = {A hybrid photonic integrated circuit and a method of its manufacture are provided. A SiP functional layer is fabricated on an SOI wafer. A lithium niobate thin film is bonded to the SiP functional layer. The silicon handle layer is removed from the SOI wafer to expose buried oxide, and at least one III-V die is bonded to the exposed buried oxide. In embodiments, at least one waveguiding component is fabricated in the SiP functional layer. In embodiments, the SiP functional layer comprises a top waveguiding layer.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2023},
month = {6}
}
Works referenced in this record:
Backside-Processed III-V-on-Silicon Discrete Mode Laser
conference, January 2019
- Thiessen, Torrey; Fonseca, Jérémy Da; Mak, Jason C. C.
- Conference on Lasers and Electro-Optics
Realizing effective magnetic field for photons by controlling the phase of dynamic modulation
journal, October 2012
- Fang, Kejie; Yu, Zongfu; Fan, Shanhui
- Nature Photonics, Vol. 6, Issue 11
Efficient, watt-level frequency doubling and optical parametric amplification on periodically poled lithium niobate ridge waveguide
conference, March 2019
- Hsu, Cheng-Wei; Lai, Ryan; Hsu, Chen-Shao
- Nonlinear Frequency Generation and Conversion: Materials and Devices XVIII
Transmitter-receiver with integrated modulator array and hybrid bonded multi-wavelength laser array
patent, August 2007
- Liu, Aniu; Paniccia, Mario J.; Jones, Richard
- US Patent Document 7,257,283
Silicon photonics broadband modulation-based isolator
journal, February 2014
- Doerr, C. R.; Chen, L.; Vermeulen, D.
- Optics Express, Vol. 22, Issue 4
Ultra compact 45 GHz CMOS compatible Germanium waveguide photodiode with low dark current
journal, January 2011
- DeRose, Christopher T.; Trotter, Douglas C.; Zortman, William A.
- Optics Express, Vol. 19, Issue 25, p. 24897-24904
Method for electrically pumped semiconductor evanescent laser
patent, July 2014
- Bowers, John Joseph; Cohen, Oded; Fang, Alexander W.
- US Patent Document 8,767,792
GaInAsP/silicon-on-insulator hybrid laser with ring-resonator-type reflector fabricated by N2 plasma-activated bonding
journal, July 2016
- Hayashi, Yusuke; Suzuki, Junichi; Inoue, Satoshi
- Japanese Journal of Applied Physics, Vol. 55, Issue 8
SI Photonic Platform and Photonic Interposer
patent-application, April 2021
- Li, Dong; Yi, Ge
- US Patent Application 16/658103; 20210116637
Integration of Direct-Bandgap Optically Active Devices on Indirect-Bandgap-Based Substrates
patent-application, May 2019
- Liu, Alan Young; Norman, Justin; Gossard, Arthur
- US Patent Application 16/306740; 20190129097
Non-reciprocal interband Brillouin modulation
journal, September 2018
- Kittlaus, Eric A.; Otterstrom, Nils T.; Kharel, Prashanta
- Nature Photonics, Vol. 12, Issue 10
Lightwave Circuits in Lithium Niobate through Hybrid Waveguides with Silicon Photonics
journal, March 2016
- Weigel, Peter O.; Savanier, Marc; DeRose, Christopher T.
- Scientific Reports, Vol. 6, Issue 1
Achieving beyond-100-GHz large-signal modulation bandwidth in hybrid silicon photonics Mach Zehnder modulators using thin film lithium niobate
journal, September 2019
- Wang, Xiaoxi; Weigel, Peter O.; Zhao, Jie
- APL Photonics, Vol. 4, Issue 9
High-performance and linear thin-film lithium niobate Mach–Zehnder modulators on silicon up to 50 GHz
journal, January 2016
- Rao, Ashutosh; Patil, Aniket; Rabiei, Payam
- Optics Letters, Vol. 41, Issue 24
Zn-indiffused diced ridge waveguides in MgO:PPLN generating 1 watt 780 nm SHG at 70% efficiency
journal, December 2019
- Berry, Sam A.; Carpenter, Lewis G.; Gray, Alan C.
- OSA Continuum, Vol. 2, Issue 12
Characterization of Insertion Loss and Back Reflection in Passive Hybrid Silicon Tapers
journal, April 2013
- Kurczveil, G.; Pintus, P.; Heck, M. J. R.
- IEEE Photonics Journal, Vol. 5, Issue 2
Note: Electro-optic coefficients of Li-deficient MgO-doped LiNbO3 crystal
journal, September 2016
- Du, Wan-Ying; Zhang, Zi-Bo; Ren, Shuai
- Review of Scientific Instruments, Vol. 87, Issue 9
Method and apparatus for tuning a laser with a Bragg grating in a semiconductor substrate
patent, February 2005
- Liu, Aniu; Paniccia, Mario J.; Nicolaescu, Remus
- US Patent Document 6,853,671
Bonded thin film lithium niobate modulator on a silicon photonics platform exceeding 100 GHz 3-dB electrical modulation bandwidth
journal, January 2018
- Weigel, Peter O.; Zhao, Jie; Fang, Kelvin
- Optics Express, Vol. 26, Issue 18
On-chip light sources for silicon photonics
journal, November 2015
- Zhou, Zhiping; Yin, Bing; Michel, Jurgen
- Light: Science & Applications, Vol. 4, Issue 11
A heterogeneously integrated silicon photonic/lithium niobate travelling wave electro-optic modulator
journal, January 2020
- Boynton, Nicholas; Cai, Hong; Gehl, Michael
- Optics Express, Vol. 28, Issue 2
Photonic Integration on the Hybrid Silicon Evanescent Device Platform
journal, June 2008
- Park, Hyundai; Fang, Alexander W.; Liang, Di
- Advances in Optical Technologies, Vol. 2008
Highly efficient double-taper-type coupler between III–V/silicon-on-insulator hybrid device and silicon waveguide
journal, August 2018
- Suzuki, Junichi; Tachibana, Fumihito; Nagasaka, Kumi
- Japanese Journal of Applied Physics, Vol. 57, Issue 9