Electrically tunable metasurfaces incorporating a phase change material

Kim, Yonghwi; Wu, Pin Chieh; Sokhoyan, Ruzan; Mauser, Kelly W.; Glaudell, Rebecca D.; Kafaie Shirmanesh, Ghazaleh; Atwater, Harry A.

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Title: Electrically tunable metasurfaces incorporating a phase change material

Abstract

Electrically tunable metasurfaces including an array of subwavelength metasurface unit elements are presented. The unit elements include a stacked metal-insulator-metal structure within which an active phase change layer is included. A purely insulator, metal, or coexisting metal-insulator phase of the active layer can be electrically controlled to tune an amplitude and phase response of the metasurfaces. In combination with the subwavelengths dimensions of the unit elements, the phase and amplitude response can be controlled in a range from optical wavelengths to millimeter wavelength of incident light. Electrical control of the unit elements can be provided via resistive heating produced by flow of current though a top metal layer of the unit elements. Alternatively, electrical control of the unit elements can be provided via electrical field effect produced by applying a voltage differential between the top and bottom metal layers of the unit elements.

Inventors:: Kim, Yonghwi; Wu, Pin Chieh; Sokhoyan, Ruzan; Mauser, Kelly W.; Glaudell, Rebecca D.; Kafaie Shirmanesh, Ghazaleh; Atwater, Harry A.

Issue Date:: 2023-05-30

Research Org.:: California Institute of Technology (CalTech), Pasadena, CA (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1998419

Patent Number(s):: 11662504

Application Number:: 16/740,322

Assignee:: California Institute of Technology (Pasadena, CA)

DOE Contract Number:: FG02-07ER46405

Resource Type:: Patent

Resource Relation:: Patent File Date: 01/10/2020

Country of Publication:: United States

Language:: English

Citation Formats


                    Kim, Yonghwi, Wu, Pin Chieh, Sokhoyan, Ruzan, Mauser, Kelly W., Glaudell, Rebecca D., Kafaie Shirmanesh, Ghazaleh, and Atwater, Harry A. Electrically tunable metasurfaces incorporating a phase change material.  United States: N. p., 2023. 
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                    Kim, Yonghwi, Wu, Pin Chieh, Sokhoyan, Ruzan, Mauser, Kelly W., Glaudell, Rebecca D., Kafaie Shirmanesh, Ghazaleh, & Atwater, Harry A. Electrically tunable metasurfaces incorporating a phase change material.  United States.

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                    Kim, Yonghwi, Wu, Pin Chieh, Sokhoyan, Ruzan, Mauser, Kelly W., Glaudell, Rebecca D., Kafaie Shirmanesh, Ghazaleh, and Atwater, Harry A. Tue .  
        "Electrically tunable metasurfaces incorporating a phase change material".  United States.  https://www.osti.gov/servlets/purl/1998419.

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@article{osti_1998419,

  title        = {Electrically tunable metasurfaces incorporating a phase change material},

  author       = {Kim, Yonghwi and Wu, Pin Chieh and Sokhoyan, Ruzan and Mauser, Kelly W. and Glaudell, Rebecca D. and Kafaie Shirmanesh, Ghazaleh and Atwater, Harry A.},

  abstractNote = {Electrically tunable metasurfaces including an array of subwavelength metasurface unit elements are presented. The unit elements include a stacked metal-insulator-metal structure within which an active phase change layer is included. A purely insulator, metal, or coexisting metal-insulator phase of the active layer can be electrically controlled to tune an amplitude and phase response of the metasurfaces. In combination with the subwavelengths dimensions of the unit elements, the phase and amplitude response can be controlled in a range from optical wavelengths to millimeter wavelength of incident light. Electrical control of the unit elements can be provided via resistive heating produced by flow of current though a top metal layer of the unit elements. Alternatively, electrical control of the unit elements can be provided via electrical field effect produced by applying a voltage differential between the top and bottom metal layers of the unit elements.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2023},

  month        = {5}

}

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Applied Physics Letters, Vol. 88, Issue 8
https://doi.org/10.1063/1.2175490

Electronically-Controlled Beam-Steering through Vanadium Dioxide Metasurfaces
journal, October 2016

Hashemi, Mohammed Reza M.; Yang, Shang-Hua; Wang, Tongyu
Scientific Reports, Vol. 6, Issue 1
https://doi.org/10.1038/srep35439

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Similar Records

Title: Electrically tunable metasurfaces incorporating a phase change material

Abstract

Citation Formats

Active Tuning of All-Dielectric Metasurfaces journal, February 2015

Active Tuning of Spontaneous Emission by Mie-Resonant Dielectric Metasurfaces journal, April 2018

Multiple Avalanches across the Metal-Insulator Transition of Vanadium Oxide Nanoscaled Junctions journal, July 2008

Dynamic tuning of an infrared hybrid-metamaterial resonance using vanadium dioxide journal, July 2008

Dual-Gated Active Metasurface at 1550 nm with Wide (>300°) Phase Tunability journal, March 2018

Dynamic Beam Switching by Liquid Crystal Tunable Dielectric Metasurfaces journal, February 2018

Dynamic Reflection Phase and Polarization Control in Metasurfaces journal, December 2016

Gap plasmon-based metasurfaces for total control of reflected light journal, July 2013

Electrical Switching of Infrared Light Using Graphene Integration with Plasmonic Fano Resonant Metasurfaces journal, January 2015

Optical Modulator Including Nanostructure patent-application, January 2017

Influence of deposition process and substrate on the phase transition of vanadium dioxide thin films journal, June 2015

Active metasurfaces for dynamic polarization conversion patent, October 2020

Dielectric metasurfaces for complete control of phase and polarization with subwavelength spatial resolution and high transmission journal, August 2015

Light Propagation with Phase Discontinuities: Generalized Laws of Reflection and Refraction journal, September 2011

Mott Transition in VO2 Revealed by Infrared Spectroscopy and Nano-Imaging journal, December 2007

Terahertz-field-induced insulator-to-metal transition in vanadium dioxide metamaterial journal, July 2012

Electrically Tunable Epsilon-Near-Zero (ENZ) Metafilm Absorbers journal, November 2015

High-Efficiency Broadband Meta-Hologram with Polarization-Controlled Dual Images journal, December 2013

Self-Affine Graphene Metasurfaces for Tunable Broadband Absorption journal, October 2016

Hybrid metamaterials for electrically triggered multifunctional control journal, October 2016

A magneto-electro-optical effect in a plasmonic nanowire material journal, April 2015

Metasurface holograms reaching 80% efficiency journal, February 2015

Deterministic and robust room-temperature exchange coupling in monodomain multiferroic BiFeO3 heterostructures journal, November 2017

High-Efficiency Broadband Anomalous Reflection by Gradient Meta-Surfaces journal, February 2012

Millivolt Modulation of Plasmonic Metasurface Optical Response via Ionic Conductance journal, June 2017

Active Metasurfaces for Dynamic Polarization Conversion patent-application, March 2019

High-Speed, Phase-Dominant Spatial Light Modulation with Silicon-Based Active Resonant Antennas journal, November 2017

An electromechanically reconfigurable plasmonic metamaterial operating in the near-infrared journal, March 2013

Electro-optical switching by liquid-crystal controlled metasurfaces journal, January 2013

Frequency tunable near-infrared metamaterials based on VO2 phase transition journal, January 2009

Gate-Tunable Conducting Oxide Metasurfaces journal, August 2016

Epsilon-Near-Zero Strong Coupling in Metamaterial-Semiconductor Hybrid Structures journal, October 2013

Thermal tuning of infrared resonant absorbers based on hybrid gold-VO 2 nanostructures journal, April 2015

A Switchable Mid-Infrared Plasmonic Perfect Absorber with Multispectral Thermal Imaging Capability journal, July 2015

An optoelectronic framework enabled by low-dimensional phase-change films journal, July 2014

Engineering the Phase Front of Light with Phase-Change Material Based Planar lenses journal, March 2015

Beam switching and bifocal zoom lensing using active plasmonic metasurfaces journal, June 2017

Phase Modulation with Electrically Tunable Vanadium Dioxide Phase-Change Metasurfaces journal, April 2019

Rapidly Tunable, Narrow-Band Infrared Filter Arrays patent-application, September 2017

Optical Modulator Using Phase Change Material and Device Including the Same patent-application, February 2018

Semiconductor to metal phase transition in the nucleation and growth of VO2 nanoparticles and thin films journal, July 2004

Nanoscale Conducting Oxide PlasMOStor journal, October 2014

Optimal Polarization Conversion in Coupled Dimer Plasmonic Nanoantennas for Metasurfaces journal, May 2014

Reconfigurable Photonic Platforms: A Lithography-Free and Field-Programmable Photonic Metacanvas (Adv. Mater. 5/2018) journal, February 2018

Optically Monitored Electrical Switching in VO 2 journal, July 2015

Optical Modulating Device Having Gate Structure patent-application, August 2016

Metalenses at visible wavelengths: Diffraction-limited focusing and subwavelength resolution imaging journal, June 2016

Metal-insulator transitions journal, October 1998

Nonvolatile Reconfigurable Phase-Change Metadevices for Beam Steering in the Near Infrared journal, January 2018

MEMS-tunable dielectric metasurface lens journal, February 2018

Adaptive metalenses with simultaneous electrical control of focal length, astigmatism, and shift journal, February 2018

Mid-infrared properties of a VO 2 film near the metal-insulator transition journal, August 1996

Ultra-thin perfect absorber employing a tunable phase change material journal, November 2012

Planar Photonics with Metasurfaces journal, March 2013

Memory Metamaterials journal, August 2009

Electronically Tunable Perfect Absorption in Graphene journal, January 2018

Systems and Methods for Implementing Electrically Tunable Metasurfaces patent-application, November 2018

Broad Electrical Tuning of Graphene-Loaded Plasmonic Antennas journal, February 2013

Tunable Metasurface and Flat Optical Zoom Lens on a Stretchable Substrate journal, March 2016

Optically reconfigurable metasurfaces and photonic devices based on phase change materials journal, December 2015

Versatile Polarization Generation with an Aluminum Plasmonic Metasurface journal, December 2016

Plasmonic Nanostructured Metal–Oxide–Semiconductor Reflection Modulators journal, March 2015

Ultrawide Thermo-optic Tuning of PbTe Meta-Atoms journal, May 2017

Dielectric gradient metasurface optical elements journal, July 2014

Voltage tuning of plasmonic absorbers by indium tin oxide journal, June 2013

Experimental Demonstration of >230° Phase Modulation in Gate-Tunable Graphene–Gold Reconfigurable Mid-Infrared Metasurfaces journal, April 2017

Dynamically Reconfigurable Metadevice Employing Nanostructured Phase-Change Materials journal, July 2017

Reversible Thermal Tuning of All-Dielectric Metasurfaces journal, July 2017

Tunable large resonant absorption in a midinfrared graphene Salisbury screen journal, October 2014

Aluminum Plasmonic Multicolor Meta-Hologram journal, April 2015

Two-dimensional current percolation in nanocrystalline vanadiumdioxide films journal, February 2006

Electronically-Controlled Beam-Steering through Vanadium Dioxide Metasurfaces journal, October 2016

Active Tuning of All-Dielectric Metasurfaces
journal, February 2015

Active Tuning of Spontaneous Emission by Mie-Resonant Dielectric Metasurfaces
journal, April 2018

Multiple Avalanches across the Metal-Insulator Transition of Vanadium Oxide Nanoscaled Junctions
journal, July 2008

Dynamic tuning of an infrared hybrid-metamaterial resonance using vanadium dioxide
journal, July 2008

Dual-Gated Active Metasurface at 1550 nm with Wide (>300°) Phase Tunability
journal, March 2018

Dynamic Beam Switching by Liquid Crystal Tunable Dielectric Metasurfaces
journal, February 2018

Dynamic Reflection Phase and Polarization Control in Metasurfaces
journal, December 2016

Gap plasmon-based metasurfaces for total control of reflected light
journal, July 2013

Electrical Switching of Infrared Light Using Graphene Integration with Plasmonic Fano Resonant Metasurfaces
journal, January 2015

Optical Modulator Including Nanostructure
patent-application, January 2017

Influence of deposition process and substrate on the phase transition of vanadium dioxide thin films
journal, June 2015

Active metasurfaces for dynamic polarization conversion
patent, October 2020

Dielectric metasurfaces for complete control of phase and polarization with subwavelength spatial resolution and high transmission
journal, August 2015

Light Propagation with Phase Discontinuities: Generalized Laws of Reflection and Refraction
journal, September 2011

Mott Transition in VO2 Revealed by Infrared Spectroscopy and Nano-Imaging
journal, December 2007

Terahertz-field-induced insulator-to-metal transition in vanadium dioxide metamaterial
journal, July 2012

Electrically Tunable Epsilon-Near-Zero (ENZ) Metafilm Absorbers
journal, November 2015

High-Efficiency Broadband Meta-Hologram with Polarization-Controlled Dual Images
journal, December 2013

Self-Affine Graphene Metasurfaces for Tunable Broadband Absorption
journal, October 2016

Hybrid metamaterials for electrically triggered multifunctional control
journal, October 2016

A magneto-electro-optical effect in a plasmonic nanowire material
journal, April 2015

Metasurface holograms reaching 80% efficiency
journal, February 2015

Deterministic and robust room-temperature exchange coupling in monodomain multiferroic BiFeO3 heterostructures
journal, November 2017

High-Efficiency Broadband Anomalous Reflection by Gradient Meta-Surfaces
journal, February 2012

Millivolt Modulation of Plasmonic Metasurface Optical Response via Ionic Conductance
journal, June 2017

Active Metasurfaces for Dynamic Polarization Conversion
patent-application, March 2019

High-Speed, Phase-Dominant Spatial Light Modulation with Silicon-Based Active Resonant Antennas
journal, November 2017

An electromechanically reconfigurable plasmonic metamaterial operating in the near-infrared
journal, March 2013

Electro-optical switching by liquid-crystal controlled metasurfaces
journal, January 2013

Frequency tunable near-infrared metamaterials based on VO₂ phase transition
journal, January 2009

Gate-Tunable Conducting Oxide Metasurfaces
journal, August 2016

Epsilon-Near-Zero Strong Coupling in Metamaterial-Semiconductor Hybrid Structures
journal, October 2013

Thermal tuning of infrared resonant absorbers based on hybrid gold-VO ₂ nanostructures
journal, April 2015

A Switchable Mid-Infrared Plasmonic Perfect Absorber with Multispectral Thermal Imaging Capability
journal, July 2015

An optoelectronic framework enabled by low-dimensional phase-change films
journal, July 2014

Engineering the Phase Front of Light with Phase-Change Material Based Planar lenses
journal, March 2015

Beam switching and bifocal zoom lensing using active plasmonic metasurfaces
journal, June 2017

Phase Modulation with Electrically Tunable Vanadium Dioxide Phase-Change Metasurfaces
journal, April 2019

Rapidly Tunable, Narrow-Band Infrared Filter Arrays
patent-application, September 2017

Optical Modulator Using Phase Change Material and Device Including the Same
patent-application, February 2018

Semiconductor to metal phase transition in the nucleation and growth of VO2 nanoparticles and thin films
journal, July 2004

Nanoscale Conducting Oxide PlasMOStor
journal, October 2014

Optimal Polarization Conversion in Coupled Dimer Plasmonic Nanoantennas for Metasurfaces
journal, May 2014

Reconfigurable Photonic Platforms: A Lithography-Free and Field-Programmable Photonic Metacanvas (Adv. Mater. 5/2018)
journal, February 2018

Optically Monitored Electrical Switching in VO ₂
journal, July 2015

Optical Modulating Device Having Gate Structure
patent-application, August 2016

Metalenses at visible wavelengths: Diffraction-limited focusing and subwavelength resolution imaging
journal, June 2016

Metal-insulator transitions
journal, October 1998

Nonvolatile Reconfigurable Phase-Change Metadevices for Beam Steering in the Near Infrared
journal, January 2018

MEMS-tunable dielectric metasurface lens
journal, February 2018

Adaptive metalenses with simultaneous electrical control of focal length, astigmatism, and shift
journal, February 2018

Mid-infrared properties of a ${VO}_{2}$ film near the metal-insulator transition
journal, August 1996

Ultra-thin perfect absorber employing a tunable phase change material
journal, November 2012

Planar Photonics with Metasurfaces
journal, March 2013

Memory Metamaterials
journal, August 2009

Electronically Tunable Perfect Absorption in Graphene
journal, January 2018

Systems and Methods for Implementing Electrically Tunable Metasurfaces
patent-application, November 2018

Broad Electrical Tuning of Graphene-Loaded Plasmonic Antennas
journal, February 2013

Tunable Metasurface and Flat Optical Zoom Lens on a Stretchable Substrate
journal, March 2016

Optically reconfigurable metasurfaces and photonic devices based on phase change materials
journal, December 2015

Versatile Polarization Generation with an Aluminum Plasmonic Metasurface
journal, December 2016

Plasmonic Nanostructured Metal–Oxide–Semiconductor Reflection Modulators
journal, March 2015

Ultrawide Thermo-optic Tuning of PbTe Meta-Atoms
journal, May 2017

Dielectric gradient metasurface optical elements
journal, July 2014

Voltage tuning of plasmonic absorbers by indium tin oxide
journal, June 2013

Experimental Demonstration of >230° Phase Modulation in Gate-Tunable Graphene–Gold Reconfigurable Mid-Infrared Metasurfaces
journal, April 2017

Dynamically Reconfigurable Metadevice Employing Nanostructured Phase-Change Materials
journal, July 2017

Reversible Thermal Tuning of All-Dielectric Metasurfaces
journal, July 2017

Tunable large resonant absorption in a midinfrared graphene Salisbury screen
journal, October 2014

Aluminum Plasmonic Multicolor Meta-Hologram
journal, April 2015

Two-dimensional current percolation in nanocrystalline vanadiumdioxide films
journal, February 2006

Electronically-Controlled Beam-Steering through Vanadium Dioxide Metasurfaces
journal, October 2016