Fast image acquisition system and method using pulsed light illumination and sample scanning to capture optical micrographs with sub-micron features
Abstract
An optical inspection system for detecting sub-micron features on a sample component. The system may have a controller, a camera responsive to the controller for capturing images, an objective lens able to capture submicron scale features on the sample component, and a pulsed light source. The pulsed light source may be used to generate light pulses. The camera may be controlled to acquire images, using the objective lens, only while the pulsed light source is providing light pulses illuminating a portion of the sample component. Relative movement between the sample component and the objective lens is provided to enable at least one of a desired subportion or an entirety of the sample component to be scanned with the camera.
- Inventors:
- Issue Date:
- Research Org.:
- Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1998274
- Patent Number(s):
- 11624710
- Application Number:
- 16/421,710
- Assignee:
- Lawrence Livermore National Security, LLC (Livermore, CA)
- DOE Contract Number:
- AC52-07NA27344
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 05/24/2019
- Country of Publication:
- United States
- Language:
- English
Citation Formats
Yoo, Jae Hyuck, Feigenbaum, Eyal, and Matthews, Manyalibo Joseph. Fast image acquisition system and method using pulsed light illumination and sample scanning to capture optical micrographs with sub-micron features. United States: N. p., 2023.
Web.
Yoo, Jae Hyuck, Feigenbaum, Eyal, & Matthews, Manyalibo Joseph. Fast image acquisition system and method using pulsed light illumination and sample scanning to capture optical micrographs with sub-micron features. United States.
Yoo, Jae Hyuck, Feigenbaum, Eyal, and Matthews, Manyalibo Joseph. Tue .
"Fast image acquisition system and method using pulsed light illumination and sample scanning to capture optical micrographs with sub-micron features". United States. https://www.osti.gov/servlets/purl/1998274.
@article{osti_1998274,
title = {Fast image acquisition system and method using pulsed light illumination and sample scanning to capture optical micrographs with sub-micron features},
author = {Yoo, Jae Hyuck and Feigenbaum, Eyal and Matthews, Manyalibo Joseph},
abstractNote = {An optical inspection system for detecting sub-micron features on a sample component. The system may have a controller, a camera responsive to the controller for capturing images, an objective lens able to capture submicron scale features on the sample component, and a pulsed light source. The pulsed light source may be used to generate light pulses. The camera may be controlled to acquire images, using the objective lens, only while the pulsed light source is providing light pulses illuminating a portion of the sample component. Relative movement between the sample component and the objective lens is provided to enable at least one of a desired subportion or an entirety of the sample component to be scanned with the camera.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2023},
month = {4}
}
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Works referenced in this record:
High Sensitivity Temporal Focusing Widefield Multiphoton Endoscope Capable of Deep Imaging
patent-application, May 2014
- Yew, Yan Seng Elijah; Choi, Heejin; Singh, Vijay Raj
- US Patent Application 14/007843; 20140128743
Micron resolution particle image velocimeter
patent, November 2003
- Meinhart, Carl D.; Santiago, Juan G.; Adrian, Ronald J.
- US Patent Document 6,653,651
Apparatus and Method for Spectroscopy
patent-application, March 2010
- Milster, Thomas D.; Khulbe, Pramod Kumar; Gelernt, Barry
- US Patent Application 12/614281; 20100053599
System and Method for Flexibly Holding Workpiece and Reporting Workpiece Location
patent-application, November 2019
- Finn, Alan Matthew; Fotache, Catalin G.
- US Patent Application 15/971205; 20190339207
Dynamic Illumination in Optical Inspection Systems
patent-application, December 2009
- Silberstein, Shai; Avni, Tsafrir
- US Patent Application 12/145708; 20090323052
Laser-Based Fourier Ptychographic Imaging Systems and Methods
patent-application, November 2016
- Ou, Xiaoze; Chung, Jaebum; Yang, Changhuei
- US Patent Application 15/160941; 20160341945
Metallic-like photoluminescence and absorption in fused silica surface flaws
journal, April 2009
- Laurence, Ted A.; Bude, Jeff D.; Shen, Nan
- Applied Physics Letters, Vol. 94, Issue 15
Optical Inspection Tool Featuring Multiple Speed Modes
patent-application, January 2009
- Eitan, Giora; Silberstein, Shai
- US Patent Application 11/781454; 20090030630