Systems and methods of electron beam induced processing

Fedorov, Andrei G.

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A - human necessities
A01 - agriculture
A21 - baking
A22 - butchering
A23 - foods or foodstuffs
A24 - tobacco
A41 - wearing apparel
A42 - headwear
A43 - footwear
A44 - haberdashery
A45 - hand or travelling articles
A46 - brushware
A47 - furniture
A61 - medical or veterinary science
A62 - life-saving
A63 - sports
A99 - subject matter not otherwise provided for in this section
B - performing operations
B01 - physical or chemical processes or apparatus in general
B02 - crushing, pulverising, or disintegrating
B03 - separation of solid materials using liquids or using pneumatic tables or jigs
B04 - centrifugal apparatus or machines for carrying-out physical or chemical processes
B05 - spraying or atomising in general
B06 - generating or transmitting mechanical vibrations in general
B07 - separating solids from solids
B08 - cleaning
B09 - disposal of solid waste
B21 - mechanical metal-working without essentially removing material
B22 - casting
B23 - machine tools
B24 - grinding
B25 - hand tools
B26 - hand cutting tools
B27 - working or preserving wood or similar material
B28 - working cement, clay, or stone
B29 - working of plastics
B30 - presses
B31 - making articles of paper, cardboard or material worked in a manner analogous to paper
B32 - layered products
B33 - additive manufacturing technology
B41 - printing
B42 - bookbinding
B43 - writing or drawing implements
B44 - decorative arts
B60 - vehicles in general
B61 - railways
B62 - land vehicles for travelling otherwise than on rails
B63 - ships or other waterborne vessels
B64 - aircraft
B65 - conveying
B66 - hoisting
B67 - opening, closing {or cleaning} bottles, jars or similar containers
B68 - saddlery
B81 - microstructural technology
B82 - nanotechnology
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C - chemistry
C01 - inorganic chemistry
C02 - treatment of water, waste water, sewage, or sludge
C03 - glass
C04 - cements
C05 - fertilisers
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C09 - dyes
C10 - petroleum, gas or coke industries
C11 - animal or vegetable oils, fats, fatty substances or waxes
C12 - biochemistry
C13 - sugar industry
C14 - skins
C21 - metallurgy of iron
C22 - metallurgy
C23 - coating metallic material
C25 - electrolytic or electrophoretic processes
C30 - crystal growth
C40 - combinatorial technology
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D - textiles
D01 - natural or man-made threads or fibres
D02 - yarns
D03 - weaving
D04 - braiding
D05 - sewing
D06 - treatment of textiles or the like
D07 - ropes
D10 - indexing scheme associated with sublasses of section d, relating to textiles
D21 - paper-making
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E01 - construction of roads, railways, or bridges
E02 - hydraulic engineering
E03 - water supply
E04 - building
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F01 - machines or engines in general
F02 - combustion engines
F03 - machines or engines for liquids
F04 - positive - displacement machines for liquids
F05 - indexing schemes relating to engines or pumps in various subclasses of classes f01-f04
F15 - fluid-pressure actuators
F16 - engineering elements and units
F17 - storing or distributing gases or liquids
F21 - lighting
F22 - steam generation
F23 - combustion apparatus
F24 - heating
F25 - refrigeration or cooling
F26 - drying
F27 - furnaces
F28 - heat exchange in general
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F42 - ammunition
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G - physics
G01 - measuring
G02 - optics
G03 - photography
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G06 - computing
G07 - checking-devices
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G09 - education
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G12 - instrument details
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H01 - basic electric elements
H02 - generation
H03 - basic electronic circuitry
H04 - electric communication technique
H05 - electric techniques not otherwise provided for
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Title: Systems and methods of electron beam induced processing

Abstract

Embodiments of the present disclosure provide for methods and systems for making structures using an electrospray system while under vacuum. In particular, embodiments of the present disclosure provide for methods and systems for ultra-fast growth of high aspect ratio nano/meso/micro-structures with three dimensional topological complexity and control of phase and composition of the structure formed.

Inventors:: Fedorov, Andrei G.

Issue Date:: 2023-02-21

Research Org.:: Georgia Institute of Technology, Atlanta, GA (United States)

Sponsoring Org.:: USDOE Office of Science (SC), Basic Energy Sciences (BES)

OSTI Identifier:: 1987157

Patent Number(s):: 11583875

Application Number:: 17/223,620

Assignee:: Georgia Tech Research Corporation (Atlanta, GA)

DOE Contract Number:: SC0010729

Resource Type:: Patent

Resource Relation:: Patent File Date: 04/06/2021

Country of Publication:: United States

Language:: English

Citation Formats


                    Fedorov, Andrei G. Systems and methods of electron beam induced processing.  United States: N. p., 2023. 
        Web.

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                    Fedorov, Andrei G. Systems and methods of electron beam induced processing.  United States.

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                    Fedorov, Andrei G. Tue .  
        "Systems and methods of electron beam induced processing".  United States.  https://www.osti.gov/servlets/purl/1987157.

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@article{osti_1987157,

  title        = {Systems and methods of electron beam induced processing},

  author       = {Fedorov, Andrei G.},

  abstractNote = {Embodiments of the present disclosure provide for methods and systems for making structures using an electrospray system while under vacuum. In particular, embodiments of the present disclosure provide for methods and systems for ultra-fast growth of high aspect ratio nano/meso/micro-structures with three dimensional topological complexity and control of phase and composition of the structure formed.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2023},

  month        = {2}

}

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Works referenced in this record:

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journal, November 2009

Donev, E. U.; Hastings, J. T.
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Nanotechnology, Vol. 22, Issue 1
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Liquid Phase Electron-Beam-Induced Deposition on Bulk Substrates Using Environmental Scanning Electron Microscopy
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Bresin, Matthew; Botman, Aurelien; Randolph, Steven J.
Microscopy and Microanalysis, Vol. 20, Issue 2
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Grogan, Joseph M.; Schneider, Nicholas M.; Ross, Frances M.
Nano Letters, Vol. 14, Issue 1
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Determination of Redox Reaction Rates and Orders by In Situ Liquid Cell Electron Microscopy of Pd and Au Solution Growth
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Electron beam induced deposition of silicon nanostructures from a liquid phase precursor
journal, September 2012

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Ultrasonic sensing device with ZnO piezoelectric nanorods by selectively electrospraying method
journal, September 2014

Pan, C. T.; Chen, Y. C.; Hsieh, C. C.
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Similar Records

Title: Systems and methods of electron beam induced processing

Abstract

Citation Formats

Liquid-precursor electron-beam-induced deposition of Pt nanostructures: dose, proximity, resolution journal, November 2009

A hydrodynamically optimized nano-electrospray ionization source and vacuum interface journal, January 2014

Rapid Patterning of Nanostructures patent-application, August 2007

Substrate effects on the electron-beam-induced deposition of platinum from a liquid precursor journal, January 2011

Electrospray systems and methods patent, July 2009

Electrospray systems and methods patent, August 2011

Systems and methods for producing metal clusters; functionalized surfaces; and droplets including solvated metal ions patent-application, March 2015

Method and apparatus for CVD using liquid delivery system with an ultrasonic nozzle patent, September 1995

Electron-beam-induced deposition of gold from aqueous solutions journal, December 2010

Liquid Phase Electron-Beam-Induced Deposition on Bulk Substrates Using Environmental Scanning Electron Microscopy journal, March 2014

Bubble and Pattern Formation in Liquid Induced by an Electron Beam journal, December 2013

Determination of Redox Reaction Rates and Orders by In Situ Liquid Cell Electron Microscopy of Pd and Au Solution Growth journal, November 2014

Electron beam induced deposition of silicon nanostructures from a liquid phase precursor journal, September 2012

Scanning Electron Microscope patent-application, July 2003

Contiguous capillary electrospray sources and analytical devices patent-application, March 2006

Ultrasonic sensing device with ZnO piezoelectric nanorods by selectively electrospraying method journal, September 2014

Rapid Electron Beam Writing of Topologically Complex 3D Nanostructures Using Liquid Phase Precursor journal, November 2015

Integrated micro fuel processor and flow delivery infrastructure patent, December 2007

Growth characterization of electron-beam-induced silver deposition from liquid precursor journal, November 2012

Electrospray systems and methods patent, April 2007

Electron-Beam-Induced Deposition of Bimetallic Nanostructures from Bulk Liquids journal, June 2013

Rapid patterning of nanostructures patent, January 2010

Capsule-free fluid delivery and beam-induced electrodeposition in a scanning electron microscope journal, January 2013

Method and Apparatus for Providing Beams of Nanodroplets for High Sputtering Rate of Inert Materials patent-application, December 2011

Liquid-precursor electron-beam-induced deposition of Pt nanostructures: dose, proximity, resolution
journal, November 2009

A hydrodynamically optimized nano-electrospray ionization source and vacuum interface
journal, January 2014

Rapid Patterning of Nanostructures
patent-application, August 2007

Substrate effects on the electron-beam-induced deposition of platinum from a liquid precursor
journal, January 2011

Electrospray systems and methods
patent, July 2009

Electrospray systems and methods
patent, August 2011

Systems and methods for producing metal clusters; functionalized surfaces; and droplets including solvated metal ions
patent-application, March 2015

Method and apparatus for CVD using liquid delivery system with an ultrasonic nozzle
patent, September 1995

Electron-beam-induced deposition of gold from aqueous solutions
journal, December 2010

Liquid Phase Electron-Beam-Induced Deposition on Bulk Substrates Using Environmental Scanning Electron Microscopy
journal, March 2014

Bubble and Pattern Formation in Liquid Induced by an Electron Beam
journal, December 2013

Determination of Redox Reaction Rates and Orders by In Situ Liquid Cell Electron Microscopy of Pd and Au Solution Growth
journal, November 2014

Electron beam induced deposition of silicon nanostructures from a liquid phase precursor
journal, September 2012

Scanning Electron Microscope
patent-application, July 2003

Contiguous capillary electrospray sources and analytical devices
patent-application, March 2006

Ultrasonic sensing device with ZnO piezoelectric nanorods by selectively electrospraying method
journal, September 2014

Rapid Electron Beam Writing of Topologically Complex 3D Nanostructures Using Liquid Phase Precursor
journal, November 2015

Integrated micro fuel processor and flow delivery infrastructure
patent, December 2007

Growth characterization of electron-beam-induced silver deposition from liquid precursor
journal, November 2012

Electrospray systems and methods
patent, April 2007

Electron-Beam-Induced Deposition of Bimetallic Nanostructures from Bulk Liquids
journal, June 2013

Rapid patterning of nanostructures
patent, January 2010

Capsule-free fluid delivery and beam-induced electrodeposition in a scanning electron microscope
journal, January 2013

Method and Apparatus for Providing Beams of Nanodroplets for High Sputtering Rate of Inert Materials
patent-application, December 2011