Title: Piezoelectric deformable photonic devices

Abstract

A CMOS-compatible actuator platform for implementing phase, amplitude, and frequency modulation in silicon nitride photonic integrated circuits via piezo-optomechanical coupling using tightly mechanically coupled aluminum nitride actuators is disclosed. The platform, which may be fabricated in a CMOS foundry, enables scalable active photonic integrated circuits for visible wavelengths, and the piezoelectric actuation functions without performance degradation down to cryogenic operating temperatures. A number of devices are possible, including ring modulator devices, phase shifter devices, Mach-Zehnder interferometer devices, directional coupler devices (including tunable directional coupler devices), and acousto-optic modulator and frequency shifter devices, each of which can employ the same AlN actuator platform. As all of these devices can be built on the same AlN actuator platform, numerous optical functions can be implemented on a single die.

Inventors:

Eichenfield, Matt; Leenheer, Andrew Jay; Stanfield, Paul

Issue Date:

2023-01-31

Research Org.:

Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)

Sponsoring Org.:

USDOE National Nuclear Security Administration (NNSA)

OSTI Identifier:

1987091

Patent Number(s):

11569431

Application Number:

16/989,535

Assignee:

National Technology & Engineering Solutions of Sandia, LLC (Albuquerque, NM)

DOE Contract Number:  

NA0003525

Resource Type:

Patent

Resource Relation:

Patent File Date: 08/10/2020

Country of Publication:

United States

Language:

English