Miniaturized vacuum package and methods of making same
Abstract
The present disclosure relates to an integrated package having an active area, an electrical routing circuit, an optical routing circuit, and a vacuum vessel. Methods of making such a package are also described herein.
- Inventors:
- Issue Date:
- Research Org.:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Org.:
- USDOE National Nuclear Security Administration (NNSA)
- OSTI Identifier:
- 1987030
- Patent Number(s):
- 11551921
- Application Number:
- 17/500,555
- Assignee:
- National Technology & Engineering Solutions of Sandia, LLC (Albuquerque, NM)
- DOE Contract Number:
- NA0003525
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 10/13/2021
- Country of Publication:
- United States
- Language:
- English
Citation Formats
McGuinness, Hayden James Evans, Gehl, Michael, DeRose, Christopher Todd, Parazzoli, Lambert Paul, and Haltli, Raymond A. Miniaturized vacuum package and methods of making same. United States: N. p., 2023.
Web.
McGuinness, Hayden James Evans, Gehl, Michael, DeRose, Christopher Todd, Parazzoli, Lambert Paul, & Haltli, Raymond A. Miniaturized vacuum package and methods of making same. United States.
McGuinness, Hayden James Evans, Gehl, Michael, DeRose, Christopher Todd, Parazzoli, Lambert Paul, and Haltli, Raymond A. Tue .
"Miniaturized vacuum package and methods of making same". United States. https://www.osti.gov/servlets/purl/1987030.
@article{osti_1987030,
title = {Miniaturized vacuum package and methods of making same},
author = {McGuinness, Hayden James Evans and Gehl, Michael and DeRose, Christopher Todd and Parazzoli, Lambert Paul and Haltli, Raymond A.},
abstractNote = {The present disclosure relates to an integrated package having an active area, an electrical routing circuit, an optical routing circuit, and a vacuum vessel. Methods of making such a package are also described herein.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2023},
month = {1}
}
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