Formation of pores in atomically thin layers
Abstract
Atomically thin layers including pores, their method of manufacture, and their use are disclosed. In some embodiments, pores may be formed in an atomically thin layer by growing the atomically thin layer on exposed portions of a substrate that includes islands comprising a material that is different than the material of the substrate. In some embodiments, pores and/or defects may be formed in an atomically thin layer by employing growth conditions that promote the formation of defects and/or pores. In certain embodiments, pores and/or defects may be etched to enlarge their size.
- Inventors:
- Issue Date:
- Research Org.:
- Massachusetts Inst. of Technology (MIT), Cambridge, MA (United States); King Fahd University of Petroleum & Minerals, Dhahran (Saudi Arabia)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1986917
- Patent Number(s):
- 11524898
- Application Number:
- 16/081,157
- Assignee:
- Massachusetts Institute of Technology (Cambridge, MA); King Fahd University of Petroleum & Minerals (Dhahran, SA)
- DOE Contract Number:
- SC0008059
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 11/03/2017
- Country of Publication:
- United States
- Language:
- English
Citation Formats
Kidambi, Piran, Ibrahim, Ahmed, Laoui, Tahar, Kong, Jing, Karnik, Rohit N., and Zhang, Sui. Formation of pores in atomically thin layers. United States: N. p., 2022.
Web.
Kidambi, Piran, Ibrahim, Ahmed, Laoui, Tahar, Kong, Jing, Karnik, Rohit N., & Zhang, Sui. Formation of pores in atomically thin layers. United States.
Kidambi, Piran, Ibrahim, Ahmed, Laoui, Tahar, Kong, Jing, Karnik, Rohit N., and Zhang, Sui. Tue .
"Formation of pores in atomically thin layers". United States. https://www.osti.gov/servlets/purl/1986917.
@article{osti_1986917,
title = {Formation of pores in atomically thin layers},
author = {Kidambi, Piran and Ibrahim, Ahmed and Laoui, Tahar and Kong, Jing and Karnik, Rohit N. and Zhang, Sui},
abstractNote = {Atomically thin layers including pores, their method of manufacture, and their use are disclosed. In some embodiments, pores may be formed in an atomically thin layer by growing the atomically thin layer on exposed portions of a substrate that includes islands comprising a material that is different than the material of the substrate. In some embodiments, pores and/or defects may be formed in an atomically thin layer by employing growth conditions that promote the formation of defects and/or pores. In certain embodiments, pores and/or defects may be etched to enlarge their size.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2022},
month = {12}
}
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Works referenced in this record:
Intermediate Layers for Electrode Fabrication
patent-application, May 2011
- DelHagen, William S.; Fasching, Rainer J.; Loveness, Ghyrn E.
- US Patent Application 12/944576; 20110111300
Porphyrins as Templates for Site-Selective Atomic Layer Deposition: Vapor Metalation and in Situ Monitoring of Island Growth
journal, July 2016
- Avila, Jason R.; Emery, Jonathan D.; Pellin, Michael J.
- ACS Applied Materials & Interfaces, Vol. 8, Issue 31
Mitigating leaks in membranes
patent, February 2018
- Karnik, Rohit N.; Bose, Suman; Boutilier, Michael S. H.
- US Patent Document 9,901,879
Electron-Beam-Induced Substitutional Carbon Doping of Boron Nitride Nanosheets, Nanoribbons, and Nanotubes
journal, March 2011
- Wei, Xianlong; Wang, Ming-Sheng; Bando, Yoshio
- ACS Nano, Vol. 5, Issue 4
Thin Films for Magnetic Device
patent-application, June 2002
- Hujanen, Juha; Raaijmakers, Ivo
- US Patent Application 09/997396; 20020076837
Nanoporous Graphene: Facile Fabrication of Large‐Area Atomically Thin Membranes by Direct Synthesis of Graphene with Nanoscale Porosity (Adv. Mater. 49/2018)
journal, December 2018
- Kidambi, Piran R.; Nguyen, Giang D.; Zhang, Sui
- Advanced Materials, Vol. 30, Issue 49
Water Desalination across Nanoporous Graphene
journal, June 2012
- Cohen-Tanugi, David; Grossman, Jeffrey C.
- Nano Letters, Vol. 12, Issue 7, p. 3602-3608
Porous Graphene as the Ultimate Membrane for Gas Separation
journal, December 2009
- Jiang, De-en; Cooper, Valentino R.; Dai, Sheng
- Nano Letters, Vol. 9, Issue 12, p. 4019-4024
Implications of Permeation through Intrinsic Defects in Graphene on the Design of Defect-Tolerant Membranes for Gas Separation
journal, December 2013
- Boutilier, Michael S. H.; Sun, Chengzhen; O’Hern, Sean C.
- ACS Nano, Vol. 8, Issue 1, p. 841-849
Molecular Sieving Across Centimeter-Scale Single-Layer Nanoporous Graphene Membranes
journal, May 2017
- Boutilier, Michael S. H.; Jang, Doojoon; Idrobo, Juan-Carlos
- ACS Nano, Vol. 11, Issue 6
Method for Fabrication of SiGe Layer Having Small Poly Grains and Related Structure
patent-application, November 2004
- U'Ren, Gregory D.; Vo, Sy
- US Patent Application 10/437530; 20040227157
Method for Treating Graphene Sheets for Large-Scale Transfer Using Free-Float Method
patent-application, October 2017
- Heise, Scott E.; Bedworth, Peter V.; Swett, Jacob L.
- US Patent Application 15/099464; 20170298504
Manufacture of Porous Diamond Films
patent-application, October 2005
- Ravi, Kramadhati V.
- US Patent Application 10/823836; 20050227079
Quantum semiconductor device having a quantum dot structure
patent, January 2001
- Sugiyama, Yoshihiro
- US Patent Document 6,177,684
Photolithographic surface micromachining of polydimethylsiloxane (PDMS)
journal, January 2012
- Chen, Weiqiang; Lam, Raymond H. W.; Fu, Jianping
- Lab Chip, Vol. 12, Issue 2
Atomic layers of hybridized boron nitride and graphene domains
journal, February 2010
- Ci, Lijie; Song, Li; Jin, Chuanhong
- Nature Materials, Vol. 9, Issue 5, p. 430-435
Hexagonal Boron Nitride-Graphene Heterostructures: Synthesis and Interfacial Properties
journal, October 2015
- Li, Qiucheng; Liu, Mengxi; Zhang, Yanfeng
- Small, Vol. 12, Issue 1
Effect of defects on the intrinsic strength and stiffness of graphene
journal, January 2014
- Zandiatashbar, Ardavan; Lee, Gwan-Hyoung; An, Sung Joo
- Nature Communications, Vol. 5, Issue 1
Fabricating Magnetic Recording Media on Patterned Seed Layers
patent-application, March 2009
- Dobisz, Elizabeth; Margulies, David; Hellwig, Olav
- US Patent Application 11/850165; 20090059430
Nanoporous Atomically Thin Graphene Membranes for Desalting and Dialysis Applications
journal, June 2017
- Kidambi, Piran R.; Jang, Doojoon; Idrobo, Juan-Carlos
- Advanced Materials, Vol. 29, Issue 33
Mitigating Leaks in Membranes
patent-application, July 2018
- Karnik, Rohit N.; Bose, Suman; Boutilier, Michael S. H.
- US Patent Application 15/878361; 20180185791
Knudsen effusion through polymer-coated three-layer porous graphene membranes
journal, April 2017
- Boutilier, Michael S. H.; Hadjiconstantinou, Nicolas G.; Karnik, Rohit
- Nanotechnology, Vol. 28, Issue 18
The Parameter Space of Graphene Chemical Vapor Deposition on Polycrystalline Cu
journal, October 2012
- Kidambi, Piran R.; Ducati, Caterina; Dlubak, Bruno
- The Journal of Physical Chemistry C, Vol. 116, Issue 42
Island growth in the atomic layer deposition of zirconium oxide and aluminum oxide on hydrogen-terminated silicon: Growth mode modeling and transmission electron microscopy
journal, November 2004
- Puurunen, Riikka L.; Vandervorst, Wilfried; Besling, Wim F. A.
- Journal of Applied Physics, Vol. 96, Issue 9
Graphene Based Filter
patent-application, October 2013
- Karnik, Rohit N.; O'Hern, Sean C.; Boutilier, Michael S. H.
- US Patent Application 13/835173; 20130270188
Multifunctional wafer-scale graphene membranes for fast ultrafiltration and high permeation gas separation
journal, November 2018
- Choi, Kyoungjun; Droudian, Amirhossein; Wyss, Roman M.
- Science Advances, Vol. 4, Issue 11
Process for Making an Iridium Layer
patent-application, November 2016
- Moffat, Thomas P.; Liu, Yihua; Ahn, Sang Hyun
- US Patent Application 15/146888; 20160340792
Flexible and Stretchable Graphene Film and Preparing Method of the Same
patent-application, October 2015
- Chen, Yang-Fang; Lai, Ying-Chih
- US Patent Application 14/242118; 20150273737
Direct chemical conversion of graphene to boron- and nitrogen- and carbon-containing atomic layers
journal, January 2014
- Gong, Yongji; Shi, Gang; Zhang, Zhuhua
- Nature Communications, Vol. 5, Issue 1
Atom-by-atom structural and chemical analysis by annular dark-field electron microscopy
journal, March 2010
- Krivanek, Ondrej L.; Chisholm, Matthew F.; Nicolosi, Valeria
- Nature, Vol. 464, Issue 7288
A review of reverse osmosis membrane materials for desalination—Development to date and future potential
journal, March 2011
- Lee, Kah Peng; Arnot, Tom C.; Mattia, Davide
- Journal of Membrane Science, Vol. 370, Issue 1-2
Synthesis of N-Doped Graphene by Chemical Vapor Deposition and Its Electrical Properties
journal, May 2009
- Wei, Dacheng; Liu, Yunqi; Wang, Yu
- Nano Letters, Vol. 9, Issue 5
Water and Solute Transport Governed by Tunable Pore Size Distributions in Nanoporous Graphene Membranes
journal, October 2017
- Jang, Doojoon; Idrobo, Juan-Carlos; Laoui, Tahar
- ACS Nano, Vol. 11, Issue 10
Band Gap Engineering of Chemical Vapor Deposited Graphene by in Situ BN Doping
journal, January 2013
- Chang, Cheng-Kai; Kataria, Satender; Kuo, Chun-Chiang
- ACS Nano, Vol. 7, Issue 2
Single-layer graphene membranes by crack-free transfer for gas mixture separation
journal, July 2018
- Huang, Shiqi; Dakhchoune, Mostapha; Luo, Wen
- Nature Communications, Vol. 9, Issue 1
Glass-Ceramics Substrates for Graphene Growth
patent-application, April 2015
- Borrelli, Nicholas Francis; Fekety, Curtis Robert; Liu, Xinyuan
- US Patent Application 14/061342; 20150110998
Selective Ionic Transport through Tunable Subnanometer Pores in Single-Layer Graphene Membranes
journal, February 2014
- O’Hern, Sean C.; Boutilier, Michael S. H.; Idrobo, Juan-Carlos
- Nano Letters, Vol. 14, Issue 3
Methods for perforating multi-layer graphene through ion bombardment
patent, August 2017
- Bedworth, Peter V.; Swett, Jacob L.
- US Patent Document 9,744,617
Method For Producing Graphene At A Low Temperature, Method For Direct Transfer Of Graphene Using Same, And Graphene Sheet
patent-application, July 2003
- Hong, Byung Hee; Ahn, Jong-Hyun; Yoo, Ji Beom
- US Patent Application 13/810144; 20130187097
Nanofiltration across Defect-Sealed Nanoporous Monolayer Graphene
journal, April 2015
- O’Hern, Sean C.; Jang, Doojoon; Bose, Suman
- Nano Letters, Vol. 15, Issue 5
Method of manufacturing a magnetic recording medium
patent, July 1996
- Ueda, Hideyuki; Kuwahara, Kenji; Seki, Hiroshi
- US Patent Document 5,540,957
Selective electroless-plated copper metallization
patent, May 2007
- Ahn, Kie Y.; Forbes, Leonard
- US Patent Document 7,211,512
Hemodialysis and Hemofiltration Membranes Based Upon a Two-Dimensional Membrane Material and Methods Employing Same
patent-application, March 2016
- Stetson, Jr., John B.; Simon, Sarah; Swett, Jacob L.
- US Patent Application 14/843944; 20160058932
Island growth as a growth mode in atomic layer deposition: A phenomenological model
journal, December 2004
- Puurunen, Riikka L.; Vandervorst, Wilfried
- Journal of Applied Physics, Vol. 96, Issue 12
The influence of intercalated oxygen on the properties of graphene on polycrystalline Cu under various environmental conditions
journal, January 2014
- Blume, Raoul; Kidambi, Piran R.; Bayer, Bernhard C.
- Phys. Chem. Chem. Phys., Vol. 16, Issue 47
Fabrication, Pressure Testing, and Nanopore Formation of Single-Layer Graphene Membranes
journal, June 2017
- Agrawal, Kumar Varoon; Benck, Jesse D.; Yuan, Zhe
- The Journal of Physical Chemistry C, Vol. 121, Issue 26
Non-Volatile Memory
patent-application, January 2004
- Tanaka, Hideyuki; Ohtsuka, Takashi; Morita, Kiyoyuki
- US Patent Application 10/608130; 20040001374
Electrochemical pore formation onto semiconductor surfaces
journal, September 2008
- Santinacci, Lionel; Djenizian, Thierry
- Comptes Rendus Chimie, Vol. 11, Issue 9
Selective Nanoscale Mass Transport across Atomically Thin Single Crystalline Graphene Membranes
journal, March 2017
- Kidambi, Piran R.; Boutilier, Michael S. H.; Wang, Luda
- Advanced Materials, Vol. 29, Issue 19
Selective Molecular Transport through Intrinsic Defects in a Single Layer of CVD Graphene
journal, October 2012
- O’Hern, Sean C.; Stewart, Cameron A.; Boutilier, Michael S. H.
- ACS Nano, Vol. 6, Issue 11, p. 10130-10138
Direct assessment of the mechanical modulus of graphene co-doped with low concentrations of boron–nitrogen by a non-contact approach
journal, June 2014
- Pan, Shun-Hsien; Medina, Henry; Wang, Sheng-Bo
- Nanoscale, Vol. 6, Issue 15
Accelerated Relaxation of Strain-Relaxed Epitaxial Buffers by Use of Integrated or Stand-Alone Thermal Processing
patent-application, February 2015
- Srinivasan, Swaminathan T.; Noori, Atif M.; Carlson, David K.
- US Patent Application 14/461191; 20150050753
Catalyst Design with Atomic Layer Deposition
journal, February 2015
- O’Neill, Brandon J.; Jackson, David H. K.; Lee, Jechan
- ACS Catalysis, Vol. 5, Issue 3
Large-Area Graphene Transfer Method
patent-application, May 2016
- You, Xuequi; Luo, Da; Ruoff, Rodney S.
- US Patent Application 14/547551; 20160137507
Analytical model for island growth in atomic layer deposition using geometrical principles
journal, July 2007
- Nilsen, O.; Mohn, C. E.; Kjekshus, A.
- Journal of Applied Physics, Vol. 102, Issue 2
Synthesis of Patched or Stacked Graphene and hBN Flakes: A Route to Hybrid Structure Discovery
journal, February 2013
- Kim, Soo Min; Hsu, Allen; Araujo, P. T.
- Nano Letters, Vol. 13, Issue 3
Bond Termination of Pores in a Porous Diamond Dielectric Material
patent-application, November 2007
- Haverty, Michael G.; Ravi, K. V.; Shankar, Sadasivan
- US Patent Application 11/437775; 20070269646
(Al,In,Ga,B)N Device Structures on a Patterned Substrate
patent-application, March 2009
- Iza, Michael; Sato, Hitoshi; Hwang, Eu Jin
- US Patent Application 12/234311; 20090072262
Process for Manufacturing a Nozzle Plate and Fluid-Ejection Device Provided with the Nozzle Plate
patent-application, September 2013
- Faralli, Dino; Palmieri, Michele
- US Patent Application 13/891609; 20130242000
Nanometer-Thick Conformal Pore Sealing of Self-Assembled Mesoporous Silica by Plasma-Assisted Atomic Layer Deposition
journal, August 2006
- Jiang, Ying-Bing; Liu, Nanguo; Gerung, Henry
- Journal of the American Chemical Society, Vol. 128, Issue 34
A Scalable Route to Nanoporous Large-Area Atomically Thin Graphene Membranes by Roll-to-Roll Chemical Vapor Deposition and Polymer Support Casting
journal, March 2018
- Kidambi, Piran R.; Mariappan, Dhanushkodi D.; Dee, Nicholas T.
- ACS Applied Materials & Interfaces, Vol. 10, Issue 12
Growth Intermediates for CVD Graphene on Cu(111): Carbon Clusters and Defective Graphene
journal, May 2013
- Niu, Tianchao; Zhou, Miao; Zhang, Jialin
- Journal of the American Chemical Society, Vol. 135, Issue 22
Observing Graphene Grow: Catalyst–Graphene Interactions during Scalable Graphene Growth on Polycrystalline Copper
journal, September 2013
- Kidambi, Piran R.; Bayer, Bernhard C.; Blume, Raoul
- Nano Letters, Vol. 13, Issue 10
In Situ Observations during Chemical Vapor Deposition of Hexagonal Boron Nitride on Polycrystalline Copper
journal, November 2014
- Kidambi, Piran R.; Blume, Raoul; Kling, Jens
- Chemistry of Materials, Vol. 26, Issue 22