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Title: Atomic-scale e-beam sculptor

Abstract

A system and method (referred to as the system) fabricates controllable atomic assemblies in two and three dimensions. The systems identify by a non-invasive imager, a local atomic structure, distribution of vacancies, and dopant atoms and modify, by a microscopic modifier, the local atomic structure, via electron beam irradiation. The systems store, by a knowledge base, cause-and-effect relationships based on a non-invasive imaging and electron scans. The systems detect, by detectors, changes in the local atomic structure induced by the electron irradiation; and fabricate, a modified atomic structure by a beam control software and feedback.

Inventors:
; ; ; ; ;
Issue Date:
Research Org.:
Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1986895
Patent Number(s):
11518674
Application Number:
16/780,561
Assignee:
UT-Battelle LLC (Oak Ridge, TN)
DOE Contract Number:  
AC05-00OR22725
Resource Type:
Patent
Resource Relation:
Patent File Date: 02/03/2020
Country of Publication:
United States
Language:
English

Citation Formats

Kalinin, Sergei V., Jesse, Stephen, Borisevich, Albina Y., Dyck, Ondrej E., Sumpter, Bobby G., and Unocic, Raymond R. Atomic-scale e-beam sculptor. United States: N. p., 2022. Web.
Kalinin, Sergei V., Jesse, Stephen, Borisevich, Albina Y., Dyck, Ondrej E., Sumpter, Bobby G., & Unocic, Raymond R. Atomic-scale e-beam sculptor. United States.
Kalinin, Sergei V., Jesse, Stephen, Borisevich, Albina Y., Dyck, Ondrej E., Sumpter, Bobby G., and Unocic, Raymond R. Tue . "Atomic-scale e-beam sculptor". United States. https://www.osti.gov/servlets/purl/1986895.
@article{osti_1986895,
title = {Atomic-scale e-beam sculptor},
author = {Kalinin, Sergei V. and Jesse, Stephen and Borisevich, Albina Y. and Dyck, Ondrej E. and Sumpter, Bobby G. and Unocic, Raymond R.},
abstractNote = {A system and method (referred to as the system) fabricates controllable atomic assemblies in two and three dimensions. The systems identify by a non-invasive imager, a local atomic structure, distribution of vacancies, and dopant atoms and modify, by a microscopic modifier, the local atomic structure, via electron beam irradiation. The systems store, by a knowledge base, cause-and-effect relationships based on a non-invasive imaging and electron scans. The systems detect, by detectors, changes in the local atomic structure induced by the electron irradiation; and fabricate, a modified atomic structure by a beam control software and feedback.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2022},
month = {12}
}

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