Atomic-scale e-beam sculptor
Abstract
A system and method (referred to as the system) fabricates controllable atomic assemblies in two and three dimensions. The systems identify by a non-invasive imager, a local atomic structure, distribution of vacancies, and dopant atoms and modify, by a microscopic modifier, the local atomic structure, via electron beam irradiation. The systems store, by a knowledge base, cause-and-effect relationships based on a non-invasive imaging and electron scans. The systems detect, by detectors, changes in the local atomic structure induced by the electron irradiation; and fabricate, a modified atomic structure by a beam control software and feedback.
- Inventors:
- Issue Date:
- Research Org.:
- Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1986895
- Patent Number(s):
- 11518674
- Application Number:
- 16/780,561
- Assignee:
- UT-Battelle LLC (Oak Ridge, TN)
- DOE Contract Number:
- AC05-00OR22725
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 02/03/2020
- Country of Publication:
- United States
- Language:
- English
Citation Formats
Kalinin, Sergei V., Jesse, Stephen, Borisevich, Albina Y., Dyck, Ondrej E., Sumpter, Bobby G., and Unocic, Raymond R. Atomic-scale e-beam sculptor. United States: N. p., 2022.
Web.
Kalinin, Sergei V., Jesse, Stephen, Borisevich, Albina Y., Dyck, Ondrej E., Sumpter, Bobby G., & Unocic, Raymond R. Atomic-scale e-beam sculptor. United States.
Kalinin, Sergei V., Jesse, Stephen, Borisevich, Albina Y., Dyck, Ondrej E., Sumpter, Bobby G., and Unocic, Raymond R. Tue .
"Atomic-scale e-beam sculptor". United States. https://www.osti.gov/servlets/purl/1986895.
@article{osti_1986895,
title = {Atomic-scale e-beam sculptor},
author = {Kalinin, Sergei V. and Jesse, Stephen and Borisevich, Albina Y. and Dyck, Ondrej E. and Sumpter, Bobby G. and Unocic, Raymond R.},
abstractNote = {A system and method (referred to as the system) fabricates controllable atomic assemblies in two and three dimensions. The systems identify by a non-invasive imager, a local atomic structure, distribution of vacancies, and dopant atoms and modify, by a microscopic modifier, the local atomic structure, via electron beam irradiation. The systems store, by a knowledge base, cause-and-effect relationships based on a non-invasive imaging and electron scans. The systems detect, by detectors, changes in the local atomic structure induced by the electron irradiation; and fabricate, a modified atomic structure by a beam control software and feedback.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2022},
month = {12}
}
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