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Title: Stretchable form of single crystal silicon for high performance electronics on rubber substrates

Abstract

The present invention provides stretchable, and optionally printable, semiconductors and electronic circuits capable of providing good performance when stretched, compressed, flexed or otherwise deformed. Stretchable semiconductors and electronic circuits of the present invention preferred for some applications are flexible, in addition to being stretchable, and thus are capable of significant elongation, flexing, bending or other deformation along one or more axes. Further, stretchable semiconductors and electronic circuits of the present invention may be adapted to a wide range of device configurations to provide fully flexible electronic and optoelectronic devices.

Inventors:
; ; ;
Issue Date:
Research Org.:
Univ. of Illinois at Urbana-Champaign, IL (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1925147
Patent Number(s):
11456258
Application Number:
16/272,488
Assignee:
The Board of Trustees of the University of Illinois (Urbana, IL)
Patent Classifications (CPCs):
B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81C - PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
DOE Contract Number:  
FA8650-04-C-7101; FG02-91ER45439
Resource Type:
Patent
Resource Relation:
Patent File Date: 02/11/2019
Country of Publication:
United States
Language:
English

Citation Formats

Rogers, John A., Khang, Dahl-Young, Sun, Yugang, and Menard, Etienne. Stretchable form of single crystal silicon for high performance electronics on rubber substrates. United States: N. p., 2022. Web.
Rogers, John A., Khang, Dahl-Young, Sun, Yugang, & Menard, Etienne. Stretchable form of single crystal silicon for high performance electronics on rubber substrates. United States.
Rogers, John A., Khang, Dahl-Young, Sun, Yugang, and Menard, Etienne. Tue . "Stretchable form of single crystal silicon for high performance electronics on rubber substrates". United States. https://www.osti.gov/servlets/purl/1925147.
@article{osti_1925147,
title = {Stretchable form of single crystal silicon for high performance electronics on rubber substrates},
author = {Rogers, John A. and Khang, Dahl-Young and Sun, Yugang and Menard, Etienne},
abstractNote = {The present invention provides stretchable, and optionally printable, semiconductors and electronic circuits capable of providing good performance when stretched, compressed, flexed or otherwise deformed. Stretchable semiconductors and electronic circuits of the present invention preferred for some applications are flexible, in addition to being stretchable, and thus are capable of significant elongation, flexing, bending or other deformation along one or more axes. Further, stretchable semiconductors and electronic circuits of the present invention may be adapted to a wide range of device configurations to provide fully flexible electronic and optoelectronic devices.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2022},
month = {9}
}

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Epitaxial self-assembly of block copolymers on lithographically defined nanopatterned substrates
journal, July 2003


Silicon Nanowires:  Preparation, Device Fabrication, and Transport Properties
journal, December 2000


Study of Mesa Undercuts Produced in GaAs with H3PO4-Based Etchants
journal, January 1989


Amorphous Si TFTs on plastically deformed spherical domes
journal, April 2002


Field-Effect Transistors Based on Single Semiconducting Oxide Nanobelts
journal, January 2003


Mesoscale organization of metal nanocrystals
journal, January 2002


Single-crystal metallic nanowires and metal/semiconductor nanowire heterostructures
journal, July 2004


Epidermal Devices for Analysis of Temperature and Thermal Transport Characteristics
patent-application, January 2018


Graded base GaAsSb for high speed GaAs HBT
patent, August 2004


Novel Nanostructures of Functional Oxides Synthesized by Thermal Evaporation
journal, January 2003


Planar nanowire based sensor elements, devices, systems and methods for using and making same
patent-application, July 2004


Invention of the integrated circuit
journal, July 1976


Stretchable interconnects using stress gradient films
patent, June 2004


Implantable biomedical devices on bioresorbable substrates
patent, June 2018


Herringbone Buckling Patterns of Compressed Thin Films on Compliant Substrates
journal, November 2004


Single-Crystal Nanorings Formed by Epitaxial Self-Coiling of Polar Nanobelts
journal, February 2004


Thermally managed LED arrays assembled by printing
patent, September 2017


Introduction to Organic Thin Film Transistors and Design of n-Channel Organic Semiconductors
journal, August 2004


Laser-lithography on non-planar surfaces
journal, January 2007


Methods for forming assemblies
patent, August 2001


Thin-Film Transistors
book, February 2003


Carbon Structures with Three-Dimensional Periodicity at Optical Wavelengths
journal, October 1998


A Printable Form of Single-Crystalline Gallium Nitride for Flexible Optoelectronic Systems
journal, October 2005


Methods and apparatus for fluidic self assembly
patent, September 2003


Direct Observation of Vapor−Liquid−Solid Nanowire Growth
journal, April 2001


Release Strategies for Making Transferable Semiconductor Structures, Devices and Device Components
patent-application, December 2011


Controlled Synthesis and Photoluminescence Properties of ZnS Nanowires and Nanoribbons
journal, March 2005


The Effectiveness of Silane Adhesion Promoters in the Performance of Polyurethane Adhesives
journal, July 1998


Functional Pixel Circuits for Elastic AMOLED Displays
journal, July 2005


Contact Electrification and Adhesion Between Dissimilar Materials
journal, April 1992


Effect of process parameters on the surface morphology and mechanical performance of silicon structures after deep reactive ion etching (DRIE)
journal, June 2002


Finer features for functional microdevices
journal, August 2001


Highly Emissive Self-assembled Organic Nanoparticles having Dual Color Capacity for Targeted Immunofluorescence Labeling
journal, March 2008


Shaped Films of Ionotropic Hydrogels Fabricated Using Templates of Patterned Paper
journal, January 2009


Testing integrated circuit dice
patent, April 2002


Nanowire Nanosensors for Highly Sensitive and Selective Detection of Biological and Chemical Species
journal, August 2001


Organic Nanodielectrics for Low Voltage Carbon Nanotube Thin Film Transistors and Complementary Logic Gates
journal, October 2005


Rapid Prototyping of Microfluidic Systems in Poly(dimethylsiloxane)
journal, October 1998


High-Efficiency Multijunction Solar Cells
journal, March 2007


Electronic materials: Buckling down for flexible electronics
journal, December 2006


Universal description of channel conductivity for nanotube and nanowire transistors
journal, August 2003


Patterned Luminescence of Organic Light-Emitting Diodes by Hot Microcontact Printing (HμCP) of Self-Assembled Monolayers
journal, November 2000


Method of selective removal of SiGe alloys
patent, May 2005


Elastically relaxed free-standing strained-silicon nanomembranes
journal, April 2006


Surface mount and flip chip technology for total integrated circuit isolation
patent, May 1998


The rise of graphene
journal, March 2007


Amorphous silicon technology for large area digital X-ray and optical imaging
journal, April 2002


Fabricating complex three-dimensional nanostructures with high-resolution conformable phase masks
journal, August 2004


Preparation of Metallic Films on Elastomeric Stamps and Their Application for Contact Processing and Contact Printing
journal, February 2003


Methods for transferring elements from a template to a substrate
patent, April 2003


InGaAs metal-semiconductor-metal photodetectors for long wavelength optical communications
journal, March 1991


Fluidic self-assembly for the integration of GaAs light-emitting diodes on Si substrates
journal, June 1994


Stretchable and foldable electronic devices
patent, December 2014


Contact bonding, including direct-bonding in a historical and recent context of materials science and technology, physics and chemistry
journal, April 2002


Mechanics of rollable and foldable film-on-foil electronics
journal, February 1999


Non-contact transfer printing
patent, July 2018


Unconventional Methods for Fabricating and Patterning Nanostructures
journal, May 1999


Magnetic trapping and self-assembly of multicomponent nanowires
journal, May 2002


Nanotransfer printing of organic and carbon nanotube thin-film transistors on plastic substrates
journal, April 2005


Methods of forming two-sided HDMI interconnect structures
patent, November 1997


Molecule-Mimetic Chemistry and Mesoscale Self-Assembly
journal, December 2000


GaN: Processing, defects, and devices
journal, July 1999


Compliant substrate technology: Integration of mismatched materials for opto-electronic applications
journal, January 2000


High-Performance Semiconducting Polythiophenes for Organic Thin-Film Transistors
journal, March 2004


Alternative Approach for UV Sensing
patent-application, September 2018


High-Mobility Poly-Si Thin Film Transistors Fabricated on Stainless-Steel Foils by Low-Temperature Processes Using Sputter-Depositions
journal, May 2000


Flexible electronic assembly
patent-application, February 2008


Template Synthesis of Electronically Conductive Polymer Nanostructures
journal, February 1995


Free standing single-crystal silicon microstructures
journal, March 1995


Stretchable interconnects using stress gradient films
patent-application, July 2002


Carbon Nanotube Inter- and Intramolecular Logic Gates
journal, September 2001


Conversion of Some Siloxane Polymers to Silicon Oxide by UV/Ozone Photochemical Processes
journal, June 2000


Macroelectronics
journal, June 2006


Organic single-crystal field-effect transistors
journal, May 2004


Correlation of buffer strain relaxation modes with transport properties of two‐dimensional electron gases
journal, December 1996


Protective diamond-like carbon coatings for future optical storage disks
journal, March 2005


Single-crystalline gallium nitride nanobelts
journal, July 2002


Direct mask-free patterning of molecular organic semiconductors using organic vapor jet printing
journal, October 2004


Waterproof stretchable optoelectronics
patent, April 2018


Luminescence Photophysics in Semiconductor Nanocrystals
journal, November 1998


Coating system transparent to light and reflecting thermal radiation
patent, November 1999


Micro-lens arrays for display intensity enhancement
patent, January 2006


Fullerenes as precursors for diamond film growth without hydrogen or oxygen additions
journal, March 1994


Semiconductor nanotube formation by a two-step template process
journal, October 1996


High-resolution transfer printing on GaAs surfaces using alkane dithiol monolayers
journal, September 2002

  • Loo, Yueh-Lin; Hsu, Julia W. P.; Willett, Robert L.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 20, Issue 6, p. 2853-2856
  • https://doi.org/10.1116/1.1523405

Temperature coefficient of the surface resistivity of two-dimensional island gold films
journal, September 2000


Mechanical properties of silicones for MEMS
journal, April 2008


Deformable organic devices
patent-application, October 2005


A Rubberlike Stretchable Active Matrix Using Elastic Conductors
journal, September 2008


Device mounting method
patent-application, May 2002


Curvilinear Electronics Formed Using Silicon Membrane Circuits and Elastomeric Transfer Elements
journal, October 2009


Nanotube Molecular Wires as Chemical Sensors
journal, January 2000


Architectonic Quantum Dot Solids
journal, January 1999


Cooling system for a semiconductor device and method of fabricating same
patent, January 2007


Organic smart pixels and complementary inverter circuits formed on plastic substrates by casting and rubber stamping
journal, March 2000


Apparatus relating to block configurations and fluidic self-assembly processes
patent, December 2003


In-line fabrication of curved surface transistors
patent-application, June 2006


The formation of controlled-porosity membranes from anodically oxidized aluminium
journal, January 1989


High electron mobility transistor based on a GaN‐AlxGa 1−xN heterojunction
journal, August 1993


Electro-optical response of a single-crystal diamond ultraviolet photoconductor in transverse configuration
journal, May 2005


Electronic devices with small functional elements supported on a carrier
patent, November 2004


A hemispherical electronic eye camera based on compressible silicon optoelectronics
journal, August 2008


Characterization of a Time Multiplexed Inductively Coupled Plasma Etcher
journal, January 1999


Piezoelectric/ultrananocrystalline diamond heterostructures for high-performance multifunctional micro/nanoelectromechanical systems
journal, March 2007


Self-Catalysis and Phase Transformation in the Formation of CdSe Nanosaws
journal, October 2004


Thermal oxide of polycrystalline silicon on steel foil as a thin-film transistor gate dielectric
journal, June 2001


Multiwalled carbon nanotube AFM probes for surface characterization of micro/nanostructures
journal, November 2004


Conformable, flexible, large-area networks of pressure and thermal sensors with organic transistor active matrixes
journal, August 2005


From Si Source Gas Directly to Positioned, Electrically Contacted Si Nanowires: The Self-Assembling “Grow-in-Place” Approach
journal, November 2004


Medium-scale carbon nanotube thin-film integrated circuits on flexible plastic substrates
journal, July 2008


Colloidal Two-Dimensional Systems: CdSe Quantum Shells and Wells
journal, October 2003


Organic electronics on paper
journal, April 2004


Magnetic self-assembly of three-dimensional surfaces from planar sheets
journal, March 2005


Finite deformation mechanics in buckled thin films on compliant supports
journal, September 2007


Stability of low-temperature amorphous silicon thin film transistors formed on glass and transparent plastic substrates
journal, April 2000

  • Yang, C.-S.; Smith, L. L.; Arthur, C. B.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 18, Issue 2, p. 683-689
  • https://doi.org/10.1116/1.591259

The Chemistry and Physics of Semiconductor Nanowires
journal, February 2005


Printing-Based Assembly of Multi-Junction, Multi-Terminal Photovoltaic Devices and Related Methods
patent-application, July 2015


Methods of making spatially aligned nanotubes and nanotube arrays
patent, February 2013


Multispectral plasmonic crystal sensors
patent, April 2010


Spin on dopants for high-performance single-crystal silicon transistors on flexible plastic substrates
journal, March 2005


Microporous materials: Electrochemically grown photonic crystals
journal, December 1999


Gallium Oxide Nanoribbons and Nanosheets
journal, February 2002


Design of High-Performance Regioregular Polythiophenes for Organic Thin-Film Transistors
journal, August 2005


Chemical Etching Characteristics of (001)GaAs
journal, January 1983


Ordering of microwrinkle patterns by compressive strain
journal, April 2004


Additive, nanoscale patterning of metal films with a stamp and a surface chemistry mediated transfer process: Applications in plastic electronics
journal, July 2002


High-frequency ultrasound array element using thermoelastic expansion in an elastomeric film
journal, July 2001


Stretchable Electronic Systems With Containment Chambers
patent-application, December 2015


Chemistry and Physics in One Dimension: Synthesis and Properties of Nanowires and Nanotubes
journal, February 1999


Characterization of Pd–GaAs Schottky diodes prepared by the electroless plating technique
journal, May 2003


Low-Temperature Materials and Thin Film Transistors for Flexible Electronics
journal, August 2005


Creating micro- and nanostructures on tubular and spherical surfaces
journal, December 2007

  • Lima, O.; Tan, L.; Goel, A.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 25, Issue 6, p. 2412-2418
  • https://doi.org/10.1116/1.2804428

Mixed Mode Cracking in Layered Materials
book, January 1991


Growth and properties of nanocrystalline diamond films
journal, October 2006

  • Williams, Oliver A.; Nesládek, Miloss
  • physica status solidi (a), Vol. 203, Issue 13, p. 3375-3386