Method and apparatus for implementing ultra-high stability stages with combined degrees of freedom for multiple axes of motion
Abstract
A method and apparatus are provided for implementing an ultra-high stability stage with combined degrees of freedom for multiple axes of motion. The ultra-high stability stage includes a base, a driving wedge supported by the base and a following wedge supported by the driving wedge. The base and each wedge are formed of a selected stable material having predefined rigidity and low thermal expansion coefficient. Integrated air bearings, respective driving mechanics associated with each of the wedges and guiding components having selected degrees of freedom enable movement about multiple axes of motion, such as X, Y, Z translation axes, and rotation X and rotation Y axes. Another ultra-high stability stage with combined degrees of freedom for multiple axes of motion includes an intermediate wedge between the driving wedge and the following wedge to enable additional movement about a rotation X axis.
- Inventors:
- Issue Date:
- Research Org.:
- Argonne National Laboratory (ANL), Argonne, IL (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1924925
- Patent Number(s):
- 11396974
- Application Number:
- 17/034,133
- Assignee:
- Uchicago Argonne, LLC (Chicago, IL)
- Patent Classifications (CPCs):
-
F - MECHANICAL ENGINEERING F16 - ENGINEERING ELEMENTS AND UNITS F16M - FRAMES, CASINGS, OR BEDS OF ENGINES OR OTHER MACHINES OR APPARATUS NOT SPECIFIC TO AN ENGINE, MACHINE, OR APPARATUS PROVIDED FOR ELSEWHERE
- DOE Contract Number:
- AC02-06CH11357
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 09/28/2020
- Country of Publication:
- United States
- Language:
- English
Citation Formats
Preissner, Curt Alfred, Bean, Sunil Jeffrey, and Rose, Volker. Method and apparatus for implementing ultra-high stability stages with combined degrees of freedom for multiple axes of motion. United States: N. p., 2022.
Web.
Preissner, Curt Alfred, Bean, Sunil Jeffrey, & Rose, Volker. Method and apparatus for implementing ultra-high stability stages with combined degrees of freedom for multiple axes of motion. United States.
Preissner, Curt Alfred, Bean, Sunil Jeffrey, and Rose, Volker. Tue .
"Method and apparatus for implementing ultra-high stability stages with combined degrees of freedom for multiple axes of motion". United States. https://www.osti.gov/servlets/purl/1924925.
@article{osti_1924925,
title = {Method and apparatus for implementing ultra-high stability stages with combined degrees of freedom for multiple axes of motion},
author = {Preissner, Curt Alfred and Bean, Sunil Jeffrey and Rose, Volker},
abstractNote = {A method and apparatus are provided for implementing an ultra-high stability stage with combined degrees of freedom for multiple axes of motion. The ultra-high stability stage includes a base, a driving wedge supported by the base and a following wedge supported by the driving wedge. The base and each wedge are formed of a selected stable material having predefined rigidity and low thermal expansion coefficient. Integrated air bearings, respective driving mechanics associated with each of the wedges and guiding components having selected degrees of freedom enable movement about multiple axes of motion, such as X, Y, Z translation axes, and rotation X and rotation Y axes. Another ultra-high stability stage with combined degrees of freedom for multiple axes of motion includes an intermediate wedge between the driving wedge and the following wedge to enable additional movement about a rotation X axis.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2022},
month = {7}
}
Works referenced in this record:
Stage Apparatus for Semiconductor Inspection and Lithography Systems
patent-application, June 2015
- Balan, Aviv
- US Patent Application 14/559,398; 2015/0160564 Al