Hybrid piezoelectric microresonator
Abstract
A hybrid ferroelectric/non-ferroelectric piezoelectric microresonator is disclosed. The hybrid microresonator uses a ferroelectric layer as the actuator as ferroelectric materials typically have higher actuation coefficients than non-ferroelectric piezoelectric materials. The hybrid microresonator uses a non-ferroelectric piezoelectric layer as the sensor layer as non-ferroelectric piezoelectric materials typically have higher sensing coefficients than ferroelectric materials. This hybrid microresonator design allows the independent optimization of actuator and sensor materials. This hybrid microresonator design may be used for bulk acoustic wave contour mode resonators, bulk acoustic wave solidly mounted resonators, free-standing bulk acoustic resonators, and piezoelectric transformers.
- Inventors:
- Issue Date:
- Research Org.:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Org.:
- USDOE National Nuclear Security Administration (NNSA)
- OSTI Identifier:
- 1924901
- Patent Number(s):
- 11387802
- Application Number:
- 16/658,339
- Assignee:
- National Technology & Engineering Solutions of Sandia, LLC (Albuquerque, NM); The United States of America as Represented by the Secretary of the Army (Washington, DC)
- Patent Classifications (CPCs):
-
H - ELECTRICITY H03 - BASIC ELECTRONIC CIRCUITRY H03H - IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
- DOE Contract Number:
- NA0003525
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 10/21/2019
- Country of Publication:
- United States
- Language:
- English
Citation Formats
Griffin, Benjamin, Nordquist, Christopher, and Polcawich, Ronald G. Hybrid piezoelectric microresonator. United States: N. p., 2022.
Web.
Griffin, Benjamin, Nordquist, Christopher, & Polcawich, Ronald G. Hybrid piezoelectric microresonator. United States.
Griffin, Benjamin, Nordquist, Christopher, and Polcawich, Ronald G. Tue .
"Hybrid piezoelectric microresonator". United States. https://www.osti.gov/servlets/purl/1924901.
@article{osti_1924901,
title = {Hybrid piezoelectric microresonator},
author = {Griffin, Benjamin and Nordquist, Christopher and Polcawich, Ronald G.},
abstractNote = {A hybrid ferroelectric/non-ferroelectric piezoelectric microresonator is disclosed. The hybrid microresonator uses a ferroelectric layer as the actuator as ferroelectric materials typically have higher actuation coefficients than non-ferroelectric piezoelectric materials. The hybrid microresonator uses a non-ferroelectric piezoelectric layer as the sensor layer as non-ferroelectric piezoelectric materials typically have higher sensing coefficients than ferroelectric materials. This hybrid microresonator design allows the independent optimization of actuator and sensor materials. This hybrid microresonator design may be used for bulk acoustic wave contour mode resonators, bulk acoustic wave solidly mounted resonators, free-standing bulk acoustic resonators, and piezoelectric transformers.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2022},
month = {7}
}
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Works referenced in this record:
Laminated Structure, Piezoelectric Actuator and Method of Manufacturing the Same
patent-application, March 2005
- Miyoshi, Tetsu
- US Patent Application 10/928,148; 2005/0046312 Al
Process for producing a micro-electro-mechanical system from a transferred piezoelectric or ferroelectric layer
patent-application, September 2020
- Reinhardt, Alexandre; Bousquet, Marie; Bartasyte, Ausrine
- US Patent Application 16/801051; 20200287511
Near-zero power accelerometer wakeup system
conference, October 2017
- Reger, Robert W.; Barney, Bryson; Yen, Sean
- 2017 IEEE SENSORS
Piezoelectric Transducer
patent-application, July 2019
- Dejaeger, Remy; Fain, Bruno
- US Patent Application 16/248,593; 2019/0229256 Al
BAW resonator having piezoelectric layers oriented in opposed directions
patent, December 2005
- Aigner, Robert; Handtmann, Martin; Marksteiner, Stephan
- US Patent Document 6,975,183
Piezoelectric Device, Method of Manufacturing Piezoelectric Device, and Liquid Ejection Head
patent-application, September 2013
- Fujii, Takamichi; Hishinuma, Yoshikazu
- US Patent Application 13/644,239; 2013/0229465 Al
Suppressing parasitic sidebands in lateral bulk acoustic wave resonators
patent-application, April 2021
- Makkonen, Tapani; Pensala, Tuomas; Ylilammi, Markku
- US Patent Application 16/660480; 20210119600
Piezoelectric Cross-Sectional Lame Mode Transformer
patent-application, October 2018
- Rinaldi, Matteo; Cassella, Cristian
- US Patent Application 15/767,490; 2018/0287047 Al
Devices Having a Tunable Acoustic Path Length and Methods for Making Same
patent-application, November 2009
- Sinhua, Rajarishi; Carley, L. Richard; Kim, Deok-Yang
- US Patent Application 12/391,490; 2009/0289526 Al
11E-2 Review and Comparison of Bulk Acoustic Wave FBAR, SMR Technology
conference, October 2007
- Ruby, R.
- 2007 IEEE Ultrasonics Symposium Proceedings
Optimization of PbTiO 3 seed layers and Pt metallization for PZT-based piezoMEMS actuators
journal, July 2013
- Sanchez, Luz M.; Potrepka, Daniel M.; Fox, Glen R.
- Journal of Materials Research, Vol. 28, Issue 14
Piezoelectric Device, Piezoelectric Transformer, and Method of Manufacturing Piezoelectric Device
patent-application, March 2018
- Ikeuchi, Shinsuke; Yamamoto, Kansho; Hada, Takuo
- US Patent Application 15/795,579; 2018/0069168 Al
Piezoelectric Aluminum Nitride Vibrating Contour-Mode MEMS Resonators
journal, January 2006
- Piazza, Gianluca; Stephanou, Philip J.; Pisano, Albert P.
- Journal of Microelectromechanical Systems, Vol. 15, Issue 6