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Title: Organic vapor jet deposition using an exhaust

Abstract

Methods and systems for organic vapor jet deposition are provided, where an exhaust is disposed between adjacent nozzles. The exhaust may reduce pressure buildup in the nozzles and between the nozzles and the substrate, leading to improved deposition profiles, resolution, and improved nozzle-to-nozzle uniformity. The exhaust may be in fluid communication with an ambient vacuum, or may be directly connected to a vacuum source.

Inventors:
;
Issue Date:
Research Org.:
Univ. of Michigan, Ann Arbor, NY (United States); Princeton Univ., NJ (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1893090
Patent Number(s):
11374172
Application Number:
12/974,070
Assignee:
The Regents of the University of Michigan (Ann Arbor, MI); The Trustees of Princeton University (Princeton, NJ)
Patent Classifications (CPCs):
C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
DOE Contract Number:  
FC26-04NT42273
Resource Type:
Patent
Resource Relation:
Patent File Date: 12/21/2010
Country of Publication:
United States
Language:
English

Citation Formats

Forrest, Stephen, and Lunt, Richard R. Organic vapor jet deposition using an exhaust. United States: N. p., 2022. Web.
Forrest, Stephen, & Lunt, Richard R. Organic vapor jet deposition using an exhaust. United States.
Forrest, Stephen, and Lunt, Richard R. Tue . "Organic vapor jet deposition using an exhaust". United States. https://www.osti.gov/servlets/purl/1893090.
@article{osti_1893090,
title = {Organic vapor jet deposition using an exhaust},
author = {Forrest, Stephen and Lunt, Richard R.},
abstractNote = {Methods and systems for organic vapor jet deposition are provided, where an exhaust is disposed between adjacent nozzles. The exhaust may reduce pressure buildup in the nozzles and between the nozzles and the substrate, leading to improved deposition profiles, resolution, and improved nozzle-to-nozzle uniformity. The exhaust may be in fluid communication with an ambient vacuum, or may be directly connected to a vacuum source.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2022},
month = {6}
}

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