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Title: Microscale gas breakdown device and process

Abstract

A microscale gas breakdown device includes a first surface and a second surface. The first surface and the second surface define a gap distance. The device includes a perturbation on the first surface or the second surface. The perturbation is defined by a height value and a radius value. The device includes a current source or a voltage source configured to apply a current or a voltage across the first surface and the second surface. In response to the current or the voltage being applied, a resulting discharge travels along a first discharge path in response to being exposed to a high pressure and a second discharge path in response to being exposed to a low pressure.

Inventors:
; ;
Issue Date:
Research Org.:
Michigan State Univ., East Lansing, MI (United States)
Sponsoring Org.:
USDOE; US Air Force Office of Scientific Research (AFOSR)
OSTI Identifier:
1893086
Patent Number(s):
11371960
Application Number:
16/523,255
Assignee:
Board of Trustees of Michigan State University (East Lansing, MI)
Patent Classifications (CPCs):
G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
DOE Contract Number:  
FA9550-18-1-0061; FA9550-18-1-0062; SC0001939
Resource Type:
Patent
Resource Relation:
Patent File Date: 07/26/2019
Country of Publication:
United States
Language:
English

Citation Formats

Fu, Yangyang, Zhang, Peng, and Verboncoeur, John P. Microscale gas breakdown device and process. United States: N. p., 2022. Web.
Fu, Yangyang, Zhang, Peng, & Verboncoeur, John P. Microscale gas breakdown device and process. United States.
Fu, Yangyang, Zhang, Peng, and Verboncoeur, John P. Tue . "Microscale gas breakdown device and process". United States. https://www.osti.gov/servlets/purl/1893086.
@article{osti_1893086,
title = {Microscale gas breakdown device and process},
author = {Fu, Yangyang and Zhang, Peng and Verboncoeur, John P.},
abstractNote = {A microscale gas breakdown device includes a first surface and a second surface. The first surface and the second surface define a gap distance. The device includes a perturbation on the first surface or the second surface. The perturbation is defined by a height value and a radius value. The device includes a current source or a voltage source configured to apply a current or a voltage across the first surface and the second surface. In response to the current or the voltage being applied, a resulting discharge travels along a first discharge path in response to being exposed to a high pressure and a second discharge path in response to being exposed to a low pressure.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2022},
month = {6}
}

Works referenced in this record:

Electrical breakdown at low pressure for planar microelectromechanical systems with 10-to500-μm gaps
journal, July 2009


Pre-breakdown evaluation of gas discharge mechanisms in microgaps
journal, April 2013


Evaluating microgap breakdown mode transition with electric field non-uniformity
journal, September 2018


Paschen's curve in microgaps with an electrode surface protrusion
journal, July 2018


Gas and Particle Sensor Using Voltage and Current Behavior Between Electrodes
patent-application, July 2021


Microdischarge lamp
patent, January 2000