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Title: Time-resolved chemical studies via time-of-flight secondary ion mass spectrometry

Abstract

A method of performing time-of-flight secondary ion mass spectrometry on a sample includes the step of directing a beam of primary ions to the sample, and stimulating the migration of ions within the sample while the beam of primary ions is directed at the sample. The stimulation of the ions is cycled between a stimulation state and a lower stimulation state. Secondary ions emitted from the sample by the beam of primary ions are collected in a time-of-flight mass spectrometer. Time-of-flight secondary ion mass spectrometry is then performed on the secondary ions. A system for performing time-of-flight secondary ion mass spectrometry on a sample is also disclosed.

Inventors:
; ; ;
Issue Date:
Research Org.:
Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1893012
Patent Number(s):
11355336
Application Number:
17/174,968
Assignee:
UT-Battelle, LLC (Oak Ridge, TN); University of Tennessee Research Foundation (Knoxville, TN)
Patent Classifications (CPCs):
G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
DOE Contract Number:  
AC05-00OR22725
Resource Type:
Patent
Resource Relation:
Patent File Date: 02/12/2021
Country of Publication:
United States
Language:
English

Citation Formats

Ievlev, Anton V., Ovchinnikova, Olga S., Lorenz, Matthias, and Liu, Yongtao. Time-resolved chemical studies via time-of-flight secondary ion mass spectrometry. United States: N. p., 2022. Web.
Ievlev, Anton V., Ovchinnikova, Olga S., Lorenz, Matthias, & Liu, Yongtao. Time-resolved chemical studies via time-of-flight secondary ion mass spectrometry. United States.
Ievlev, Anton V., Ovchinnikova, Olga S., Lorenz, Matthias, and Liu, Yongtao. Tue . "Time-resolved chemical studies via time-of-flight secondary ion mass spectrometry". United States. https://www.osti.gov/servlets/purl/1893012.
@article{osti_1893012,
title = {Time-resolved chemical studies via time-of-flight secondary ion mass spectrometry},
author = {Ievlev, Anton V. and Ovchinnikova, Olga S. and Lorenz, Matthias and Liu, Yongtao},
abstractNote = {A method of performing time-of-flight secondary ion mass spectrometry on a sample includes the step of directing a beam of primary ions to the sample, and stimulating the migration of ions within the sample while the beam of primary ions is directed at the sample. The stimulation of the ions is cycled between a stimulation state and a lower stimulation state. Secondary ions emitted from the sample by the beam of primary ions are collected in a time-of-flight mass spectrometer. Time-of-flight secondary ion mass spectrometry is then performed on the secondary ions. A system for performing time-of-flight secondary ion mass spectrometry on a sample is also disclosed.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2022},
month = {6}
}

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