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Title: Metal-overcoated grating and method

Abstract

Metallic overcoated diffraction gratings are particularly useful for high average power laser pulse compression. A dielectric oxide layer is attached to an etch-stop layer, where the dielectric oxide layer comprises a grating pattern including grating lines. Sidewalls of the grating lines taper together toward an upper surface of the dielectric oxide layer. A metallic overcoat is attached to the etch-stop layer and the dielectric oxide layer.

Inventors:
;
Issue Date:
Research Org.:
Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1892935
Patent Number(s):
11333807
Application Number:
16/620,139
Assignee:
Lawrence Livermore National Security, LLC (Livermore, CA)
Patent Classifications (CPCs):
G - PHYSICS G02 - OPTICS G02B - OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01S - DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT
DOE Contract Number:  
AC52-07NA27344
Resource Type:
Patent
Resource Relation:
Patent File Date: 06/01/2018
Country of Publication:
United States
Language:
English

Citation Formats

Nguyen, Hoang T., and Britten, Jerald A. Metal-overcoated grating and method. United States: N. p., 2022. Web.
Nguyen, Hoang T., & Britten, Jerald A. Metal-overcoated grating and method. United States.
Nguyen, Hoang T., and Britten, Jerald A. Tue . "Metal-overcoated grating and method". United States. https://www.osti.gov/servlets/purl/1892935.
@article{osti_1892935,
title = {Metal-overcoated grating and method},
author = {Nguyen, Hoang T. and Britten, Jerald A.},
abstractNote = {Metallic overcoated diffraction gratings are particularly useful for high average power laser pulse compression. A dielectric oxide layer is attached to an etch-stop layer, where the dielectric oxide layer comprises a grating pattern including grating lines. Sidewalls of the grating lines taper together toward an upper surface of the dielectric oxide layer. A metallic overcoat is attached to the etch-stop layer and the dielectric oxide layer.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2022},
month = {5}
}

Works referenced in this record:

Method For Making Large Scale Multilayer Dielectric Diffraction Gratings On Thick Substrates Using Reactive Ion Etching
patent-application, October 2005


Optimized Dielectric Reflective Diffraction Grating
patent-application, November 2012


Photoelectric Position Measuring Device
patent-application, November 2001


Surface Reflection Encoder Scale and Surface Reflection Encoder Using the Same
patent-application, December 2008


Diffraction Grating Having High Throughput Efficiency
patent-application, April 2005


Surface-Relief Diffraction Grating
patent-application, October 2009


Precise Optical Grating Element And Method Of Making A Stamper Thereof
patent-application, June 2005


Semiconductor buried grating fabrication method
patent-application, October 2009


Method for Forming Phase Grating
patent-application, April 2010