System, apparatus, and method for determining elemental composition using 4D STEM

Bammes, Benjamin; Bilhorn, Robert

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Title: System, apparatus, and method for determining elemental composition using 4D STEM

Abstract

The present disclosure relates to transmission electron microscopy for evaluation of biological matter. According to an embodiment, the present disclosure further relates to an apparatus for determining the structure and/or elemental composition of a sample using 4D STEM, comprising a direct bombardment detector operating with global shutter readout, processing circuitry configured to acquire images of bright-field disks using either a contiguous array or non-contiguous array of detector pixel elements, correct distortions in the images, align each image of the images based on a centroid of the bright-field disk, calculate a radial profile of the images, normalize the radial profiles by a scaling factor, calculate the rotationally-averaged edge profile of the bright-field disk, and determine elemental composition within the specimen based on the characteristics of the edge profile of the bright-field disk corresponding to each specimen location.

Inventors:: Bammes, Benjamin; Bilhorn, Robert

Issue Date:: 2022-04-19

Research Org.:: Direct Electron, LP, San Diego, CA (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1892861

Patent Number(s):: 11310438

Application Number:: 16/851,835

Assignee:: Direct Electron, LP (San Diego, CA)

Patent Classifications (CPCs):: G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS

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G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
G01N2223/6126 - tissue
G01N23/2251 - using incident electron beams, e.g. scanning electron microscopy [SEM]

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J2237/2441 - Semiconductor detectors, e.g. diodes
H01J2237/2446 - Position sensitive detectors
H01J2237/24592 - Inspection and quality control of devices
H01J2237/2802 - Transmission microscopes
H01J2237/2806 - Secondary charged particle
H01J2237/2817 - Pattern inspection
H01J37/244 - Detectors
H01J37/28 - with scanning beams

H - ELECTRICITY H04 - ELECTRIC COMMUNICATION TECHNIQUE H04N - PICTORIAL COMMUNICATION, e.g. TELEVISION
H04N5/00 - Details of television systems

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DOE Contract Number:: SC0018493

Resource Type:: Patent

Resource Relation:: Patent File Date: 04/17/2020

Country of Publication:: United States

Language:: English

Citation Formats


                    Bammes, Benjamin, and Bilhorn, Robert. System, apparatus, and method for determining elemental composition using 4D STEM.  United States: N. p., 2022. 
        Web.

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                    Bammes, Benjamin, & Bilhorn, Robert. System, apparatus, and method for determining elemental composition using 4D STEM.  United States.

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                    Bammes, Benjamin, and Bilhorn, Robert. Tue .  
        "System, apparatus, and method for determining elemental composition using 4D STEM".  United States.  https://www.osti.gov/servlets/purl/1892861.

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@article{osti_1892861,

  title        = {System, apparatus, and method for determining elemental composition using 4D STEM},

  author       = {Bammes, Benjamin and Bilhorn, Robert},

  abstractNote = {The present disclosure relates to transmission electron microscopy for evaluation of biological matter. According to an embodiment, the present disclosure further relates to an apparatus for determining the structure and/or elemental composition of a sample using 4D STEM, comprising a direct bombardment detector operating with global shutter readout, processing circuitry configured to acquire images of bright-field disks using either a contiguous array or non-contiguous array of detector pixel elements, correct distortions in the images, align each image of the images based on a centroid of the bright-field disk, calculate a radial profile of the images, normalize the radial profiles by a scaling factor, calculate the rotationally-averaged edge profile of the bright-field disk, and determine elemental composition within the specimen based on the characteristics of the edge profile of the bright-field disk corresponding to each specimen location.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2022},

  month        = {4}

}

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Works referenced in this record:

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Title: System, apparatus, and method for determining elemental composition using 4D STEM

Abstract

Citation Formats

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Aberration Computing Device, aberration Computing Method, Image Processor, Image Processing Method, and Electron Microscope patent-application, February 2016

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Scanning Electron Microscope and Methods of Inspecting and Reviewing Samples patent-application, November 2017

Charged Particle Beam Microscope and Method of Measurement Employing Same patent-application, November 2012

Systems and methods for generating high dynamic range images patent, August 2016

Image Based Systems fir Detecting Information on Moving Objects patent-application, March 2014

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Control Imaging Methods in Advanced Ultrafast Electron Microscopy
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Photoelectric Conversion Element and Imaging Device
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Method and System for 4D tomography and Ultrafast Scanning Electron Microscopy
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Focused Ion Beam System and a Method of Sample Preparation and Observation
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