Efficient black silicon photovoltaic devices with enhanced blue response

Oh, Jihun; Branz, Howard M.; Yuan, Hao-Chih

Title: Efficient black silicon photovoltaic devices with enhanced blue response

Abstract

A photovoltaic (PV) device with improved blue response. The PV device includes a silicon substrate with an emitter layer on a light receiving side. The emitter layer has a low opant level such that it has sheet resistance of 90 to 170 ohm/sq. Anti-reflection in the PV device is provided solely by a nano-structured or black silicon surface on the light-receiving surface, through which the emitter is formed by diffusion. The nano structures of the black silicon are formed in a manner that does not result in gold or another high-recombination metal being left in the black silicon such as with metal-assisted etching using silver. The black silicon is further processed to widen these pores so as to provide larger nanostructures with lateral dimensions in the range of 65 to 150 nanometers so as to reduce surface area and also to etch away a highly doped portion of the emitter.

Inventors:: Oh, Jihun; Branz, Howard M.; Yuan, Hao-Chih

Issue Date:: 2022-02-15

Research Org.:: National Renewable Energy Laboratory (NREL), Golden, CO (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1892619

Patent Number(s):: 11251318

Application Number:: 14/002,950

Assignee:: Alliance for Sustainable Energy, LLC (Golden, CO)

Patent Classifications (CPCs):: H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE Y02E - REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION

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H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
H01L31/02168 - {the coatings being antireflective or having enhancing optical properties for the solar cells}
H01L31/02363 - {of the semiconductor body itself, e.g. textured active layers}
H01L31/0284 - {comprising porous silicon as part of the active layer
H01L31/1868 - {Passivation}

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE Y02E - REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
Y02E10/50 - Photovoltaic [PV] energy
Y02E10/547 - Monocrystalline silicon PV cells

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE Y02P - CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
Y02P70/50 - Manufacturing or production processes characterised by the final manufactured product

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DOE Contract Number:: AC36-08GO28308

Resource Type:: Patent

Resource Relation:: Patent File Date: 03/08/2011

Country of Publication:: United States

Language:: English

Citation Formats


                    Oh, Jihun, Branz, Howard M., and Yuan, Hao-Chih. Efficient black silicon photovoltaic devices with enhanced blue response.  United States: N. p., 2022. 
        Web.

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                    Oh, Jihun, Branz, Howard M., & Yuan, Hao-Chih. Efficient black silicon photovoltaic devices with enhanced blue response.  United States.

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                    Oh, Jihun, Branz, Howard M., and Yuan, Hao-Chih. Tue .  
        "Efficient black silicon photovoltaic devices with enhanced blue response".  United States.  https://www.osti.gov/servlets/purl/1892619.

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@article{osti_1892619,

  title        = {Efficient black silicon photovoltaic devices with enhanced blue response},

  author       = {Oh, Jihun and Branz, Howard M. and Yuan, Hao-Chih},

  abstractNote = {A photovoltaic (PV) device with improved blue response. The PV device includes a silicon substrate with an emitter layer on a light receiving side. The emitter layer has a low opant level such that it has sheet resistance of 90 to 170 ohm/sq. Anti-reflection in the PV device is provided solely by a nano-structured or black silicon surface on the light-receiving surface, through which the emitter is formed by diffusion. The nano structures of the black silicon are formed in a manner that does not result in gold or another high-recombination metal being left in the black silicon such as with metal-assisted etching using silver. The black silicon is further processed to widen these pores so as to provide larger nanostructures with lateral dimensions in the range of 65 to 150 nanometers so as to reduce surface area and also to etch away a highly doped portion of the emitter.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2022},

  month        = {2}

}

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Patent:

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Kuzma-Filipek, Izabela; Dross, Frederic; Baert, Kris
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Li, Y.; Zhang, J. Z.
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Nishimoto, Yoichiro
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Methods of selective deposition of fine particles onto selected regions of a substrate
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Cohen, Guy
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Method for raw etching silicon solar cells
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Title: Efficient black silicon photovoltaic devices with enhanced blue response

Abstract

Citation Formats

Methods of selective deposition of fine particles onto selected regions of a substrate patent, November 2011

Silicon Surface Roughening Mechanisms in Ammonia Hydrogen Peroxide Mixtures journal, January 2000

Metal catalyst technique for texturing silicon solar cells patent, December 2001

Novel Nanoparticle Patterning Process patent-application, December 2007

Anti-Reflection Etching of Silicon Surfaces Catalyzed with Ionic Metal Solutions patent-application, September 2009

High-Productivity Porous Semiconductor Manufacturing Equipment patent-application, February 2011

Methods of forming spin-on-glass insulating layers in semiconductor devices and associated semiconductor device patent, September 2009

Method of Forming an Array of High Aspect Ration Semiconductor Nanostructures patent-application, February 2013

Systems and methods for forming processing streams patent-application, August 2002

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Nanostructure-Film LCD Devices patent-application, June 2009

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Method of forming nanoscale three-dimensional patterns in a porous material patent, July 2013

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Black multi-crystalline silicon solar cells journal, March 2007

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Methods of forming a multi-doped junction with silicon-containing particles patent-application, January 2011

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Silicon substrate with periodical structure patent-application, October 2010

Applications of laser-processed substrate for molecular diagnostics patent-application, July 2010

Method of fabricating semiconductor device patent-application, June 2007

Solar hydrogen charger patent-application, January 2009

Method of producing semiconductor substrate patent, October 1993

Electrophoretic displays using nanoparticles patent-application, October 2002

Photonic silicon on a transparent substrate patent, July 2000

Solar hydrogen charger patent, November 2010

Intermediate transfer layers for nanoscale pattern transfer and nanostructure formation patent-application, September 2002

Lithography-based patterning of layer-by-layer nano-assembled thin films patent, August 2006

Method of manufacturing solar cell patent, February 2012

Method of forming pores in crystal substrate, and crystal substrate containing pores formed by the same patent-application, April 2008

Forming High Efficiency Silicon Solar Cells Using Density-Graded Anti-reflection Surfaces patent-application, December 2011

Superconducting detector and method of making same patent, November 1993

Electroless deposition method patent, June 2005

Patterning of various silicon structures via polymer lithography and catalytic chemical etching journal, May 2011

Texturization of multicrystalline silicon wafers for solar cells by chemical treatment using metallic catalyst journal, January 2006

Silicon membrane micro-scale patent, October 1990

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Apparatus and method for imaging with surface enhanced coherent anti-stokes raman scattering (SECARS) patent-application, October 2007

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Micromechanical membrane tilt-mirror switch patent, January 2001

Electroless deposition method patent-application, October 2003

Anti-Reflective Nanoporous Silicon for Efficient Hydrogen Production patent-application, May 2012

Devices and methods for enhanced microneedle penetration of biological barriers patent-application, June 2005

Method for forming high-resolution pattern with direct writing means patent-application, December 2006

Method for forming high-resolution pattern and substrate having prepattern formed thereby patent-application, December 2006

Black nonreflecting silicon surfaces for solar cells journal, May 2006

Design and characterization of a robust photoelectrochemical device to generate hydrogen using solar water splitting journal, September 2006

Conversion of Carbon Dioxide to Organic Products patent-application, July 2010

Metal-Assisted Chemical Etching of Substrates patent-application, September 2010

Fabrication of large area subwavelength antireflection structures on Si using trilayer resist nanoimprint lithography and liftoff journal, January 2003

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Photoelectrochemical Behavior of n-Type Porous-Si Electrodes journal, July 1986

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Method for Producing an Emitter Structure and Emitter Structures Resulting Therefrom patent-application, June 2010

Method for removing black silicon in semiconductor fabrication patent, May 2002

Nano-sized Taper Structure Formed by Wet Process Using Catalysis of Gold Nanoparticle journal, January 2007

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Black silicon layer formation for application in solar cells journal, November 2006

Methods for producing MEMS with protective coatings using multi-component sacrificial layers patent-application, September 2007

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patent, November 2011

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journal, January 2000

Metal catalyst technique for texturing silicon solar cells
patent, December 2001

Novel Nanoparticle Patterning Process
patent-application, December 2007

Anti-Reflection Etching of Silicon Surfaces Catalyzed with Ionic Metal Solutions
patent-application, September 2009

High-Productivity Porous Semiconductor Manufacturing Equipment
patent-application, February 2011

Methods of forming spin-on-glass insulating layers in semiconductor devices and associated semiconductor device
patent, September 2009

Method of Forming an Array of High Aspect Ration Semiconductor Nanostructures
patent-application, February 2013

Systems and methods for forming processing streams
patent-application, August 2002

Spatial light modulators with light absorbing areas
patent-application, May 2014

Nanostructure-Film LCD Devices
patent-application, June 2009

Solar cell, method of manufacturing the same, and method of texturing solar cell
patent-application, July 2009

Method for producing multicrystalline silicon substrate for solar cells
patent, November 2006

Template for Pyramidal Three-Dimensional Thin-Film Solar Cell Manufacturing and Methods of Use
patent-application, April 2009

Silicon cells made by self-aligned selective-emitter plasma-etchback process
patent, July 2000

Method of forming nanoscale three-dimensional patterns in a porous material
patent, July 2013

Light Emitting Device
patent-application, July 2007

Method for producing multicrystalline silicon substrate for solar cells
patent-application, May 2005

Black multi-crystalline silicon solar cells
journal, March 2007

Metal-assisted chemical etch porous silicon formation method
patent, September 2004

Methods of forming a multi-doped junction with silicon-containing particles
patent-application, January 2011

Microscreen for filtering particles in microfluidics applications and production thereof
patent-application, November 2010

Silicon substrate with periodical structure
patent-application, October 2010

Applications of laser-processed substrate for molecular diagnostics
patent-application, July 2010

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patent-application, June 2007

Solar hydrogen charger
patent-application, January 2009

Method of producing semiconductor substrate
patent, October 1993

Electrophoretic displays using nanoparticles
patent-application, October 2002

Photonic silicon on a transparent substrate
patent, July 2000

Solar hydrogen charger
patent, November 2010

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patent-application, September 2002

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patent, August 2006

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patent, February 2012

Method of forming pores in crystal substrate, and crystal substrate containing pores formed by the same
patent-application, April 2008

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patent-application, December 2011

Superconducting detector and method of making same
patent, November 1993

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patent, June 2005

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journal, May 2011

Texturization of multicrystalline silicon wafers for solar cells by chemical treatment using metallic catalyst
journal, January 2006

Silicon membrane micro-scale
patent, October 1990

Method of fabricating a semiconductor device
patent-application, December 2004

Method of fabricating a semiconductor device
patent, July 2004

Method for forming silicon trench
patent, June 2012

Superhydrophobic and Low Light Reflectivity Silicon Surfaces Fabricated by Hierarchical Etching
journal, September 2008

Method for producing silicon substrate for solar cells
patent, November 2011

Method of fabricating solar cell
patent-application, June 2011

Apparatus and method for imaging with surface enhanced coherent anti-stokes raman scattering (SECARS)
patent-application, October 2007

Extremely Superhydrophobic Surfaces with Micro- and Nanostructures Fabricated by Copper Catalytic Etching
journal, January 2011

Micromechanical membrane tilt-mirror switch
patent, January 2001

Electroless deposition method
patent-application, October 2003

Anti-Reflective Nanoporous Silicon for Efficient Hydrogen Production
patent-application, May 2012

Devices and methods for enhanced microneedle penetration of biological barriers
patent-application, June 2005

Method for forming high-resolution pattern with direct writing means
patent-application, December 2006

Method for forming high-resolution pattern and substrate having prepattern formed thereby
patent-application, December 2006

Black nonreflecting silicon surfaces for solar cells
journal, May 2006

Design and characterization of a robust photoelectrochemical device to generate hydrogen using solar water splitting
journal, September 2006

Conversion of Carbon Dioxide to Organic Products
patent-application, July 2010

Metal-Assisted Chemical Etching of Substrates
patent-application, September 2010

Fabrication of large area subwavelength antireflection structures on Si using trilayer resist nanoimprint lithography and liftoff
journal, January 2003

Methods of nanostructure formation and shape selection
patent-application, March 2005

Electrophoretic displays using nanoparticles
patent, April 2004

Efficient SERS substrates made by electroless silver deposition into patterned silicon structures
journal, January 2004

Photoelectrochemical Behavior of n-Type Porous-Si Electrodes
journal, July 1986

Method and Device for Modulating Light
patent-application, May 2007

Method for Producing an Emitter Structure and Emitter Structures Resulting Therefrom
patent-application, June 2010

Method for removing black silicon in semiconductor fabrication
patent, May 2002

Nano-sized Taper Structure Formed by Wet Process Using Catalysis of Gold Nanoparticle
journal, January 2007

Photoelectrochemical device and electrode
patent, May 2006

Solar Cell Fabrication with Faceting and Ion Implantation
patent-application, December 2009

Copper-Assisted, Anti-Reflection Etching of Silicon Surfaces
patent-application, July 2012

Black silicon layer formation for application in solar cells
journal, November 2006

Methods for producing MEMS with protective coatings using multi-component sacrificial layers
patent-application, September 2007

Fabrication of Single-Crystalline Silicon Nanowires by Scratching a Silicon Surface with Catalytic Metal Particles
journal, February 2006

Texturing Surface of Light Absorbing Substrate
patent-application, September 2012

Semiconductor storage device and manufacturing method thereof
patent-application, December 2011

Wet-chemical systems and methods for producing black silicon substrates
patent-application, September 2013

Epitaxial Structures, Methods of Forming the Same, and Devices Including the Same
patent-application, October 2011

Structural and optical features of nanoporous silicon prepared by electrochemical anodic etching
journal, May 2004

Modification of metal nanoparticles for improved analyte detection by surface enhanced Raman spectroscopy (SERS)
patent-application, July 2007

Chemical etching of Si by Ag nanocatalysts in HF‐H ₂ O ₂ : application to multicrystalline Si solar cell texturisation
journal, June 2009