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Title: Methods and devices configured to operated scanning tunneling microscopes using out-of-bandwidth frequency components added to bias voltage and related software

Abstract

In the system and method disclosed, an ultrahigh vacuum (UHV) scanning tunneling microscope (STM) tip is used to selectively desorb hydrogen atoms from the Si(100)-2X1:H surface by injecting electrons at a negative sample bias voltage. A new lithography method is disclosed that allows the STM to operate under imaging conditions and simultaneously desorb H atoms as required. A high frequency signal is added to the negative sample bias voltage to deliver the required energy for hydrogen removal. The resulted current at this frequency and its harmonics are filtered to minimize their effect on the operation of the STM's feedback loop. This approach offers a significant potential for controlled and precise removal of hydrogen atoms from a hydrogen-terminated silicon surface and thus may be used for the fabrication of practical silicon-based atomic-scale devices.

Inventors:
;
Issue Date:
Research Org.:
Univ. of Texas at Dallas, Richardson, TX (United States)
Sponsoring Org.:
USDOE; US Air Force Office of Scientific Research (AFOSR)
OSTI Identifier:
1859940
Patent Number(s):
11143671
Application Number:
17/089,214
Assignee:
Board of Regents, The University of Texas System (Austin, TX)
Patent Classifications (CPCs):
B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82B - NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS, MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES AS DISCRETE UNITS
G - PHYSICS G01 - MEASURING G01Q - SCANNING-PROBE TECHNIQUES OR APPARATUS
DOE Contract Number:  
EE0008322; FA8650-15-C-7542
Resource Type:
Patent
Resource Relation:
Patent File Date: 11/04/2020
Country of Publication:
United States
Language:
English

Citation Formats

Moheimani, Seyed Omid Reza, and Alemansour, Hamed. Methods and devices configured to operated scanning tunneling microscopes using out-of-bandwidth frequency components added to bias voltage and related software. United States: N. p., 2021. Web.
Moheimani, Seyed Omid Reza, & Alemansour, Hamed. Methods and devices configured to operated scanning tunneling microscopes using out-of-bandwidth frequency components added to bias voltage and related software. United States.
Moheimani, Seyed Omid Reza, and Alemansour, Hamed. Tue . "Methods and devices configured to operated scanning tunneling microscopes using out-of-bandwidth frequency components added to bias voltage and related software". United States. https://www.osti.gov/servlets/purl/1859940.
@article{osti_1859940,
title = {Methods and devices configured to operated scanning tunneling microscopes using out-of-bandwidth frequency components added to bias voltage and related software},
author = {Moheimani, Seyed Omid Reza and Alemansour, Hamed},
abstractNote = {In the system and method disclosed, an ultrahigh vacuum (UHV) scanning tunneling microscope (STM) tip is used to selectively desorb hydrogen atoms from the Si(100)-2X1:H surface by injecting electrons at a negative sample bias voltage. A new lithography method is disclosed that allows the STM to operate under imaging conditions and simultaneously desorb H atoms as required. A high frequency signal is added to the negative sample bias voltage to deliver the required energy for hydrogen removal. The resulted current at this frequency and its harmonics are filtered to minimize their effect on the operation of the STM's feedback loop. This approach offers a significant potential for controlled and precise removal of hydrogen atoms from a hydrogen-terminated silicon surface and thus may be used for the fabrication of practical silicon-based atomic-scale devices.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2021},
month = {10}
}

Works referenced in this record:

Highly parallel scanning tunneling microscope based hydrogen depassivation lithography
journal, November 2018


Apparatus for and method of driving X-Y scanner in scanning probe microscope
patent-application, January 2007


Methods, devices and systems for scanning tunneling microscopy control system design
patent-application, April 2018