Reflective laser-based particle detector
Abstract
A reflective laser-based particle detector for detecting contamination particles moving through a vacuum. Laser light is directed through a vacuum access window in the containment vessel and toward a reflective surface on an inner surface opposite the window. A photonic detector is positioned to monitor reflected laser from the opposite inner surface inside the vessel and is capable of detecting perturbations of the reflected light. The system makes use of optical interferometry techniques embodied as a photonic integrated circuit to detect the particles. The reflective laser-based system can be placed entirely outside the vacuum thereby avoiding the need for breaking the vacuum environment to check for accumulation of contaminant particles.
- Inventors:
- Issue Date:
- Research Org.:
- Thomas Jefferson National Accelerator Facility (TJNAF), Newport News, VA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1824095
- Patent Number(s):
- 11041795
- Application Number:
- 16/657,295
- Assignee:
- Jefferson Science Associates, LLC (Newport News, VA)
- Patent Classifications (CPCs):
-
G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- DOE Contract Number:
- AC05-06OR23177
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 10/18/2019
- Country of Publication:
- United States
- Language:
- English
Citation Formats
Xi, Wenze, Geng, Rongli, Zorn, Carl, Kross, Brian J., Weisenberger, Andrew G., McKisson, Jack, and McKisson, John. Reflective laser-based particle detector. United States: N. p., 2021.
Web.
Xi, Wenze, Geng, Rongli, Zorn, Carl, Kross, Brian J., Weisenberger, Andrew G., McKisson, Jack, & McKisson, John. Reflective laser-based particle detector. United States.
Xi, Wenze, Geng, Rongli, Zorn, Carl, Kross, Brian J., Weisenberger, Andrew G., McKisson, Jack, and McKisson, John. Tue .
"Reflective laser-based particle detector". United States. https://www.osti.gov/servlets/purl/1824095.
@article{osti_1824095,
title = {Reflective laser-based particle detector},
author = {Xi, Wenze and Geng, Rongli and Zorn, Carl and Kross, Brian J. and Weisenberger, Andrew G. and McKisson, Jack and McKisson, John},
abstractNote = {A reflective laser-based particle detector for detecting contamination particles moving through a vacuum. Laser light is directed through a vacuum access window in the containment vessel and toward a reflective surface on an inner surface opposite the window. A photonic detector is positioned to monitor reflected laser from the opposite inner surface inside the vessel and is capable of detecting perturbations of the reflected light. The system makes use of optical interferometry techniques embodied as a photonic integrated circuit to detect the particles. The reflective laser-based system can be placed entirely outside the vacuum thereby avoiding the need for breaking the vacuum environment to check for accumulation of contaminant particles.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2021},
month = {6}
}
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