Conducting metal oxides integrated with the surface acoustic wave (SAW) sensor platform
Abstract
One or more embodiments relates a single port surface acoustic wave sensor (SAW) device adapted for use in a wide range of operational temperatures and gas phase chemical species. The device includes a piezoelectric crystal substrate; at least one interdigitated electrode/transducer (IDT) positioned on the piezoelectric crystal substrate; and at least one conducting metal oxide film positioned on the piezoelectric crystal substrate and in communication with at least the IDT.
- Inventors:
- Issue Date:
- Research Org.:
- US Dept. of Energy, Washington, DC (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1823840
- Patent Number(s):
- 10976287
- Application Number:
- 16/203,533
- Assignee:
- U.S. Department of Energy (Washington, DC)
- Patent Classifications (CPCs):
-
G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 11/28/2018
- Country of Publication:
- United States
- Language:
- English
Citation Formats
Ohodnicki, Jr., Paul R., Fryer, Robert, and Devkota, Jagannath. Conducting metal oxides integrated with the surface acoustic wave (SAW) sensor platform. United States: N. p., 2021.
Web.
Ohodnicki, Jr., Paul R., Fryer, Robert, & Devkota, Jagannath. Conducting metal oxides integrated with the surface acoustic wave (SAW) sensor platform. United States.
Ohodnicki, Jr., Paul R., Fryer, Robert, and Devkota, Jagannath. Tue .
"Conducting metal oxides integrated with the surface acoustic wave (SAW) sensor platform". United States. https://www.osti.gov/servlets/purl/1823840.
@article{osti_1823840,
title = {Conducting metal oxides integrated with the surface acoustic wave (SAW) sensor platform},
author = {Ohodnicki, Jr., Paul R. and Fryer, Robert and Devkota, Jagannath},
abstractNote = {One or more embodiments relates a single port surface acoustic wave sensor (SAW) device adapted for use in a wide range of operational temperatures and gas phase chemical species. The device includes a piezoelectric crystal substrate; at least one interdigitated electrode/transducer (IDT) positioned on the piezoelectric crystal substrate; and at least one conducting metal oxide film positioned on the piezoelectric crystal substrate and in communication with at least the IDT.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2021},
month = {4}
}
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Works referenced in this record:
Electronically conductive perovskite-based oxide nanoparticles and films for optical sensing applications
patent, April 2015
- Ohodnicki, Paul R.; Schultz, Andrew Max
- US Patent Document 9,019,502
Magnetic Surface Acoustic Wave Sensor Apparatus and Method
patent-application, October 2010
- Koyilothu, Sarinkumar Anakkat; Kalathil, Sankaranarayanan
- US Patent Application 12/417894; 20100253326
Electronically conducting metal oxide nanoparticles and films for optical sensing applications
patent, September 2014
- Ohodnicki, Paul R.; Wang, Congjun; Andio, Mark A.
- US Patent Document 8,836,945
Acoustic wave flow sensor for high-condensation applications
patent, May 2008
- Liu, James; Carlson, Stephen C.; Magee, Steven
- US Patent Document 7,373,838
Saw Devices, Processes for Making Them, and Methods of Use
patent-application, September 2008
- Zaghloul, Mona; Tigli, Onur
- US Patent Application 11/738460; 20080230859