Planar electrode arrays and fabrication methods thereof
Abstract
The present invention relates to a method of fabricating an electrode array, in which an underlying handle wafer is removed to provide a planar device having the electrode array. Also provided are wafers including a plurality of planar devices having an electrode array, as well as sensors including such an electrode array.
- Inventors:
- Issue Date:
- Research Org.:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Org.:
- USDOE National Nuclear Security Administration (NNSA)
- OSTI Identifier:
- 1823812
- Patent Number(s):
- 10969359
- Application Number:
- 16/268,806
- Assignee:
- National Technology & Engineering Solutions of Sandia, LLC (Albuquerque, NM)
- Patent Classifications (CPCs):
-
B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81C - PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- DOE Contract Number:
- NA0003525
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 02/06/2019
- Country of Publication:
- United States
- Language:
- English
Citation Formats
Schindelholz, Eric John, and Finnegan, Patrick Sean. Planar electrode arrays and fabrication methods thereof. United States: N. p., 2021.
Web.
Schindelholz, Eric John, & Finnegan, Patrick Sean. Planar electrode arrays and fabrication methods thereof. United States.
Schindelholz, Eric John, and Finnegan, Patrick Sean. Tue .
"Planar electrode arrays and fabrication methods thereof". United States. https://www.osti.gov/servlets/purl/1823812.
@article{osti_1823812,
title = {Planar electrode arrays and fabrication methods thereof},
author = {Schindelholz, Eric John and Finnegan, Patrick Sean},
abstractNote = {The present invention relates to a method of fabricating an electrode array, in which an underlying handle wafer is removed to provide a planar device having the electrode array. Also provided are wafers including a plurality of planar devices having an electrode array, as well as sensors including such an electrode array.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2021},
month = {4}
}
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