High temperature substrate heater for use in high and ultra-high vacuum systems
Abstract
A braze-free substrate heating device including a heater block body, a heater block lid, and a heating element. The heating element sits inside the heater block body. The heater block lid is on the heating element, such that the heating element is sandwiched between the heater block lid and the floor of the heater block body. The heating element is held in place by compressing the heater block lid into the heater block body and attaching the heater block lid to the top of the heater block body so that the heating element is fully supported over its surface area, and can maintain uniform thermal contact with the heater block lid and heater block body over its entire surface area.
- Inventors:
- Issue Date:
- Research Org.:
- Los Alamos National Laboratory (LANL), Los Alamos, NM (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1805620
- Patent Number(s):
- 10945311
- Application Number:
- 15/801,261
- Assignee:
- Triad National Security, LLC (Los Alamos, NM)
- Patent Classifications (CPCs):
-
B - PERFORMING OPERATIONS B23 - MACHINE TOOLS B23K - SOLDERING OR UNSOLDERING
H - ELECTRICITY H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR H05B - ELECTRIC HEATING
- DOE Contract Number:
- AC52-06NA25396
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 11/01/2017
- Country of Publication:
- United States
- Language:
- English
Citation Formats
Dowden, Paul, and Jia, Quanxi. High temperature substrate heater for use in high and ultra-high vacuum systems. United States: N. p., 2021.
Web.
Dowden, Paul, & Jia, Quanxi. High temperature substrate heater for use in high and ultra-high vacuum systems. United States.
Dowden, Paul, and Jia, Quanxi. Tue .
"High temperature substrate heater for use in high and ultra-high vacuum systems". United States. https://www.osti.gov/servlets/purl/1805620.
@article{osti_1805620,
title = {High temperature substrate heater for use in high and ultra-high vacuum systems},
author = {Dowden, Paul and Jia, Quanxi},
abstractNote = {A braze-free substrate heating device including a heater block body, a heater block lid, and a heating element. The heating element sits inside the heater block body. The heater block lid is on the heating element, such that the heating element is sandwiched between the heater block lid and the floor of the heater block body. The heating element is held in place by compressing the heater block lid into the heater block body and attaching the heater block lid to the top of the heater block body so that the heating element is fully supported over its surface area, and can maintain uniform thermal contact with the heater block lid and heater block body over its entire surface area.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Mar 09 00:00:00 EST 2021},
month = {Tue Mar 09 00:00:00 EST 2021}
}
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Works referenced in this record:
Quartz substrate heater
patent, March 2000
- Lanham, Christopher C.; Ptasienski, Kevin; Steinhauser, Louis P.
- US Patent Document 6,037,574