Gallidation assisted impurity doping

Voss, Lars; Dryden, Daniel Max; Frye, Clint; Harrison, Sara Elizabeth; Nikolic, Rebecca J.; Shao, Qinghui

Title: Gallidation assisted impurity doping

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Abstract

In one embodiment, a product includes a structure comprising a material of a Group-III-nitride having a dopant, where a concentration of the dopant in the structure has a concentration gradient characteristic of diffusion of the dopant inward from at least a portion of a surface of the structure in a direction substantially normal to the portion of the surface. The structure has less than 1% decomposition of the Group-III-nitride at the surface of the structure.

Inventors:: Voss, Lars; Dryden, Daniel Max; Frye, Clint; Harrison, Sara Elizabeth; Nikolic, Rebecca J.; Shao, Qinghui

Issue Date:: 2021-02-23

Research Org.:: Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1805544

Patent Number(s):: 10930506

Application Number:: 16/446,460

Assignee:: Lawrence Livermore National Security, LLC (Livermore, CA)

DOE Contract Number:: AC52-07NA27344

Resource Type:: Patent

Resource Relation:: Patent File Date: 06/19/2019

Country of Publication:: United States

Language:: English

Citation Formats


                    Voss, Lars, Dryden, Daniel Max, Frye, Clint, Harrison, Sara Elizabeth, Nikolic, Rebecca J., and Shao, Qinghui. Gallidation assisted impurity doping.  United States: N. p., 2021. 
        Web.

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                    Voss, Lars, Dryden, Daniel Max, Frye, Clint, Harrison, Sara Elizabeth, Nikolic, Rebecca J., & Shao, Qinghui. Gallidation assisted impurity doping.  United States.

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                    Voss, Lars, Dryden, Daniel Max, Frye, Clint, Harrison, Sara Elizabeth, Nikolic, Rebecca J., and Shao, Qinghui. Tue .  
        "Gallidation assisted impurity doping".  United States.  https://www.osti.gov/servlets/purl/1805544.

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@article{osti_1805544,

  title        = {Gallidation assisted impurity doping},

  author       = {Voss, Lars and Dryden, Daniel Max and Frye, Clint and Harrison, Sara Elizabeth and Nikolic, Rebecca J. and Shao, Qinghui},

  abstractNote = {In one embodiment, a product includes a structure comprising a material of a Group-III-nitride having a dopant, where a concentration of the dopant in the structure has a concentration gradient characteristic of diffusion of the dopant inward from at least a portion of a surface of the structure in a direction substantially normal to the portion of the surface. The structure has less than 1% decomposition of the Group-III-nitride at the surface of the structure.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2021},

  month        = {2}

}

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