Electroabsorption optical modulator
Abstract
An electroabsorption modulator that operates based on electroabsorption of a surface plasmon polariton mode is improved by various structural changes and/or selection of different materials. For example, at least a portion of the waveguide may be made to be conductive, e.g., by doping. Also, layers that make up the modulator structure may be placed along sides of waveguides in addition to or instead of simply on the top thereof. High permittivity gate dielectric materials may be employed. Also, materials other than ITO may be employed as a transparent conductor. Such an improved plasmonic electroabsorption modulator can be fabricated using standard semiconductor processing techniques and may be integrated with standard photonic integrated circuits, including silicon photonics and compound semiconductor-based platforms. Advantageously, high-speed, low-voltage operation over a wide spectrum of wavelengths may be achieved.
- Inventors:
- Issue Date:
- Research Org.:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Org.:
- USDOE National Nuclear Security Administration (NNSA)
- OSTI Identifier:
- 1805467
- Patent Number(s):
- 10908438
- Application Number:
- 15/909,767
- Assignee:
- National Technology & Engineering Solutions of Sandia, LLC (Albuquerque, NM)
- DOE Contract Number:
- NA0003525
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 03/01/2018
- Country of Publication:
- United States
- Language:
- English
Citation Formats
Wood, Michael, Campione, Salvatore, Keeler, Gordon Arthur, Geib, Kent M., Shank, Joshua, Ihlefeld, Jon, Serkland, Darwin K., and Luk, Ting S. Electroabsorption optical modulator. United States: N. p., 2021.
Web.
Wood, Michael, Campione, Salvatore, Keeler, Gordon Arthur, Geib, Kent M., Shank, Joshua, Ihlefeld, Jon, Serkland, Darwin K., & Luk, Ting S. Electroabsorption optical modulator. United States.
Wood, Michael, Campione, Salvatore, Keeler, Gordon Arthur, Geib, Kent M., Shank, Joshua, Ihlefeld, Jon, Serkland, Darwin K., and Luk, Ting S. Tue .
"Electroabsorption optical modulator". United States. https://www.osti.gov/servlets/purl/1805467.
@article{osti_1805467,
title = {Electroabsorption optical modulator},
author = {Wood, Michael and Campione, Salvatore and Keeler, Gordon Arthur and Geib, Kent M. and Shank, Joshua and Ihlefeld, Jon and Serkland, Darwin K. and Luk, Ting S.},
abstractNote = {An electroabsorption modulator that operates based on electroabsorption of a surface plasmon polariton mode is improved by various structural changes and/or selection of different materials. For example, at least a portion of the waveguide may be made to be conductive, e.g., by doping. Also, layers that make up the modulator structure may be placed along sides of waveguides in addition to or instead of simply on the top thereof. High permittivity gate dielectric materials may be employed. Also, materials other than ITO may be employed as a transparent conductor. Such an improved plasmonic electroabsorption modulator can be fabricated using standard semiconductor processing techniques and may be integrated with standard photonic integrated circuits, including silicon photonics and compound semiconductor-based platforms. Advantageously, high-speed, low-voltage operation over a wide spectrum of wavelengths may be achieved.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2021},
month = {2}
}