DOE Patents title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Enhanced electron amplifier structure and method of fabricating the enhanced electron amplifier structure

Abstract

An enhanced electron amplifier structure includes a microporous substrate having a front surface and a rear surface, the microporous substrate including at least one channel extending substantially through the substrate between the front surface and the rear surface, an ion diffusion layer formed on a surface of the channel, the ion diffusion layer comprising a metal oxide, a resistive coating layer formed on the first ion diffusion layer, an emissive coating layer formed on the resistive coating layer, and an optional ion feedback layer formed on the front surface of the structure. The emissive coating produces a secondary electron emission responsive to an interaction with a particle received by the channel. The ion diffusion layer, the resistive coating layer, the emissive coating layer, and the ion feedback layer are independently deposited via chemical vapor deposition or atomic layer deposition.

Inventors:
;
Issue Date:
Research Org.:
Argonne National Lab. (ANL), Argonne, IL (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1771736
Patent Number(s):
10867768
Application Number:
15/691,633
Assignee:
UChicago Argonne, LLC (Chicago, IL)
Patent Classifications (CPCs):
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
DOE Contract Number:  
AC02-06CH11357
Resource Type:
Patent
Resource Relation:
Patent File Date: 08/30/2017
Country of Publication:
United States
Language:
English

Citation Formats

Mane, Anil U., and Elam, Jeffrey W. Enhanced electron amplifier structure and method of fabricating the enhanced electron amplifier structure. United States: N. p., 2020. Web.
Mane, Anil U., & Elam, Jeffrey W. Enhanced electron amplifier structure and method of fabricating the enhanced electron amplifier structure. United States.
Mane, Anil U., and Elam, Jeffrey W. Tue . "Enhanced electron amplifier structure and method of fabricating the enhanced electron amplifier structure". United States. https://www.osti.gov/servlets/purl/1771736.
@article{osti_1771736,
title = {Enhanced electron amplifier structure and method of fabricating the enhanced electron amplifier structure},
author = {Mane, Anil U. and Elam, Jeffrey W.},
abstractNote = {An enhanced electron amplifier structure includes a microporous substrate having a front surface and a rear surface, the microporous substrate including at least one channel extending substantially through the substrate between the front surface and the rear surface, an ion diffusion layer formed on a surface of the channel, the ion diffusion layer comprising a metal oxide, a resistive coating layer formed on the first ion diffusion layer, an emissive coating layer formed on the resistive coating layer, and an optional ion feedback layer formed on the front surface of the structure. The emissive coating produces a secondary electron emission responsive to an interaction with a particle received by the channel. The ion diffusion layer, the resistive coating layer, the emissive coating layer, and the ion feedback layer are independently deposited via chemical vapor deposition or atomic layer deposition.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2020},
month = {12}
}

Works referenced in this record:

Effect of thermal annealing and chemical treatments on secondary electron emission properties of atomic layer deposited MgO
journal, November 2018


Electron transmittance characteristics of MCP ion barrier film
conference, January 2005


Effects of ion barrier film on image noise in generation III image tube
conference, August 2012


Electron multipliers with reduced ion feedback
patent, December 1990


The Tynode: A new vacuum electron multiplier
journal, March 2017

  • van der Graaf, Harry; Akhtar, Hassan; Budko, Neil
  • Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 847
  • https://doi.org/10.1016/j.nima.2016.11.064