In-situ localized growth of porous metal oxide films on microheater platform for low temperature gas detection

Maboudian, Roya; Long, Hu; Harley-Trochimczyk, Anna; Mickelson, William; Carraro, Carlo

Title: In-situ localized growth of porous metal oxide films on microheater platform for low temperature gas detection

Abstract

A solid-state, low power microheater sensor platform that is configurable with selected metal oxide films for particular gas sensing applications is described. The sensor platform is configured by selecting a chemiresistive or catalytic material that is suitable for detecting a desired gas and then forming a porous nanostructured film on the designated surfaces of the microheater platform. Also described are methods for creating a highly porous, nanostructured metal oxide film in a controlled location from a liquid precursor using a localized heat source. By fast annealing deposited liquid precursors with the microheater, a highly porous, nanocrystalline metal oxide film can be generated in-situ and locally on the sensor platform.

Inventors:: Maboudian, Roya; Long, Hu; Harley-Trochimczyk, Anna; Mickelson, William; Carraro, Carlo

Issue Date:: 2020-11-24

Research Org.:: Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1771662

Patent Number(s):: 10845325

Application Number:: 16/045,300

Assignee:: The Regents of the University of California (Oakland, CA)

Patent Classifications (CPCs):: G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES

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G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
G01N27/4074 - {for detection of gases other than oxygen}
G01N27/4067 - {Means for heating or controlling the temperature of the solid electrolyte}
G01N27/127 - {comprising nanoparticles}
G01N27/4075 - {Composition or fabrication of the electrodes and coatings thereon, e.g. catalysts}

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DOE Contract Number:: AC02-05CH11231

Resource Type:: Patent

Resource Relation:: Patent File Date: 07/25/2018

Country of Publication:: United States

Language:: English

Citation Formats


                    Maboudian, Roya, Long, Hu, Harley-Trochimczyk, Anna, Mickelson, William, and Carraro, Carlo. In-situ localized growth of porous metal oxide films on microheater platform for low temperature gas detection.  United States: N. p., 2020. 
        Web.

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                    Maboudian, Roya, Long, Hu, Harley-Trochimczyk, Anna, Mickelson, William, & Carraro, Carlo. In-situ localized growth of porous metal oxide films on microheater platform for low temperature gas detection.  United States.

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                    Maboudian, Roya, Long, Hu, Harley-Trochimczyk, Anna, Mickelson, William, and Carraro, Carlo. Tue .  
        "In-situ localized growth of porous metal oxide films on microheater platform for low temperature gas detection".  United States.  https://www.osti.gov/servlets/purl/1771662.

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@article{osti_1771662,

  title        = {In-situ localized growth of porous metal oxide films on microheater platform for low temperature gas detection},

  author       = {Maboudian, Roya and Long, Hu and Harley-Trochimczyk, Anna and Mickelson, William and Carraro, Carlo},

  abstractNote = {A solid-state, low power microheater sensor platform that is configurable with selected metal oxide films for particular gas sensing applications is described. The sensor platform is configured by selecting a chemiresistive or catalytic material that is suitable for detecting a desired gas and then forming a porous nanostructured film on the designated surfaces of the microheater platform. Also described are methods for creating a highly porous, nanostructured metal oxide film in a controlled location from a liquid precursor using a localized heat source. By fast annealing deposited liquid precursors with the microheater, a highly porous, nanocrystalline metal oxide film can be generated in-situ and locally on the sensor platform.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2020},

  month        = {11}

}

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Works referenced in this record:

Micromachined Oxygen Sensor and Method for Making the Same
patent-application, October 2014

Huang, Liji; Chen, Chih-Chang
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Limiting-Current Type Gas Sensor, Fabrication Method of the Limiting-Current Type Gas Sensor and Sensor Network System
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Akasaka, Shunsuke
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Prismatic ceramic heater for heating gas sensor element, prismatic gas sensor element in multilayered structure including the prismatic ceramic heater, and method for manufacturing the prismatic ceramic heater and prismatic gas sensor element
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Kojima, Takao; Makino, Keisuke; Awano, Shinya
US Patent Application 10/374056; 20030159928
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Gas Sensor
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Title: In-situ localized growth of porous metal oxide films on microheater platform for low temperature gas detection

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Citation Formats

Micromachined Oxygen Sensor and Method for Making the Same patent-application, October 2014

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journal, January 2015

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