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Title: In-situ localized growth of porous metal oxide films on microheater platform for low temperature gas detection

Abstract

A solid-state, low power microheater sensor platform that is configurable with selected metal oxide films for particular gas sensing applications is described. The sensor platform is configured by selecting a chemiresistive or catalytic material that is suitable for detecting a desired gas and then forming a porous nanostructured film on the designated surfaces of the microheater platform. Also described are methods for creating a highly porous, nanostructured metal oxide film in a controlled location from a liquid precursor using a localized heat source. By fast annealing deposited liquid precursors with the microheater, a highly porous, nanocrystalline metal oxide film can be generated in-situ and locally on the sensor platform.

Inventors:
; ; ; ;
Issue Date:
Research Org.:
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1771662
Patent Number(s):
10845325
Application Number:
16/045,300
Assignee:
The Regents of the University of California (Oakland, CA)
Patent Classifications (CPCs):
G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
DOE Contract Number:  
AC02-05CH11231
Resource Type:
Patent
Resource Relation:
Patent File Date: 07/25/2018
Country of Publication:
United States
Language:
English

Citation Formats

Maboudian, Roya, Long, Hu, Harley-Trochimczyk, Anna, Mickelson, William, and Carraro, Carlo. In-situ localized growth of porous metal oxide films on microheater platform for low temperature gas detection. United States: N. p., 2020. Web.
Maboudian, Roya, Long, Hu, Harley-Trochimczyk, Anna, Mickelson, William, & Carraro, Carlo. In-situ localized growth of porous metal oxide films on microheater platform for low temperature gas detection. United States.
Maboudian, Roya, Long, Hu, Harley-Trochimczyk, Anna, Mickelson, William, and Carraro, Carlo. Tue . "In-situ localized growth of porous metal oxide films on microheater platform for low temperature gas detection". United States. https://www.osti.gov/servlets/purl/1771662.
@article{osti_1771662,
title = {In-situ localized growth of porous metal oxide films on microheater platform for low temperature gas detection},
author = {Maboudian, Roya and Long, Hu and Harley-Trochimczyk, Anna and Mickelson, William and Carraro, Carlo},
abstractNote = {A solid-state, low power microheater sensor platform that is configurable with selected metal oxide films for particular gas sensing applications is described. The sensor platform is configured by selecting a chemiresistive or catalytic material that is suitable for detecting a desired gas and then forming a porous nanostructured film on the designated surfaces of the microheater platform. Also described are methods for creating a highly porous, nanostructured metal oxide film in a controlled location from a liquid precursor using a localized heat source. By fast annealing deposited liquid precursors with the microheater, a highly porous, nanocrystalline metal oxide film can be generated in-situ and locally on the sensor platform.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2020},
month = {11}
}

Works referenced in this record:

Catalytic hydrogen sensing using microheated platinum nanoparticle-loaded graphene aerogel
journal, January 2015