Apparatus, method and system for imaging and utilization of SEM charged particles

Chandler, David W.; Celio, Kimberlee Chiyoko

Title: Apparatus, method and system for imaging and utilization of SEM charged particles

Abstract

A scanning electron microscope (SEM) system includes an SEM objective that emits an electron beam toward a sample, causing emission of charged particles including secondary electrons, Auger electrons, backscattered electrons, anions and cations. The SEM system includes electron optics elements that are configured to establish electric fields around the sample that accelerate charged particles toward a detector. A two-dimensional distribution of locations of incidence of the charged particles on the detector is indicative of energies of the charged particles and their emission angles from the sample. A three-dimensional spatial distribution of charged particles emitted from the sample is recovered by performing an Abel transform over the distribution on the detector. The energies and emission angles of the charged particles are then determined from the three-dimensional spatial distribution.

Inventors:: Chandler, David W.; Celio, Kimberlee Chiyoko

Issue Date:: 2020-09-08

Research Org.:: Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1735243

Patent Number(s):: 10770262

Application Number:: 16/198,356

Assignee:: National Technology & Engineering Solutions of Sandia, LLC (Albuquerque, NM)

Patent Classifications (CPCs):: H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS

Show more

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J2237/24485 - Energy spectrometers
H01J37/20 - Means for supporting or positioning the objects or the material
H01J37/28 - with scanning beams
H01J37/244 - Detectors
H01J2237/2443 - Scintillation detectors
H01J2237/24495 - Signal processing, e.g. mixing of two or more signals
H01J2237/24585 - Other variables, e.g. energy, mass, velocity, time, temperature
H01J2237/2449 - Detector devices with moving charges in electric or magnetic fields
H01J37/22 - Optical or photographic arrangements associated with the tube {
H01J37/06 - Electron sources
H01J2237/04735 - with electrostatic means
H01J2237/2446 - Position sensitive detectors
H01J37/12 - electrostatic

Show less

DOE Contract Number:: NA0003525

Resource Type:: Patent

Resource Relation:: Patent File Date: 11/21/2018

Country of Publication:: United States

Language:: English

Citation Formats


                    Chandler, David W., and Celio, Kimberlee Chiyoko. Apparatus, method and system for imaging and utilization of SEM charged particles.  United States: N. p., 2020. 
        Web.

Copy to clipboard


                    Chandler, David W., & Celio, Kimberlee Chiyoko. Apparatus, method and system for imaging and utilization of SEM charged particles.  United States.

Copy to clipboard


                    Chandler, David W., and Celio, Kimberlee Chiyoko. Tue .  
        "Apparatus, method and system for imaging and utilization of SEM charged particles".  United States.  https://www.osti.gov/servlets/purl/1735243.

Copy to clipboard


                    
@article{osti_1735243,

  title        = {Apparatus, method and system for imaging and utilization of SEM charged particles},

  author       = {Chandler, David W. and Celio, Kimberlee Chiyoko},

  abstractNote = {A scanning electron microscope (SEM) system includes an SEM objective that emits an electron beam toward a sample, causing emission of charged particles including secondary electrons, Auger electrons, backscattered electrons, anions and cations. The SEM system includes electron optics elements that are configured to establish electric fields around the sample that accelerate charged particles toward a detector. A two-dimensional distribution of locations of incidence of the charged particles on the detector is indicative of energies of the charged particles and their emission angles from the sample. A three-dimensional spatial distribution of charged particles emitted from the sample is recovered by performing an Abel transform over the distribution on the detector. The energies and emission angles of the charged particles are then determined from the three-dimensional spatial distribution.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2020},

  month        = {9}

}

Copy to clipboard

Patent:

View Patent

Save / Share:

Export Metadata

Save to My Library

Works referenced in this record:

Coaxial charged particle energy analyzer
patent, April 2011

Kelly, Michael A.; Bryson, III, Charles E.; Wu, Warren
US Patent Document 7,928,381
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=7928381

Defect detection using energy spectrometer
patent, October 2007

Bertsche, Kirk J.
US Patent Document 7,276,694
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=7276694

Electron Spectrometer and Measurement Method
patent-application, September 2016

Nakagawa, Yasuhide
US Patent Application 15/064954; 20160268119
URL: http://appft.uspto.gov/netacgi/nph-Parser?Sect1=PTO1&Sect2=HITOFF&d=PG01&p=1&u=%2Fnetahtml%2FPTO%2Fsrchnum.html&r=1&f=G&l=50&s1=%2220160268119%22.PGNR.&OS=DN/20160268119&RS=DN/20160268119

Apparatus and method for obtaining topographical dark-field images in a scanning electron microscope
patent, May 2010

James, Edward M.; Yang, Ye; Lin, Mark
US Patent Document 7,714,287
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=7714287

Scanning electron beam microscope
patent, May 2000

Masnaghetti, Douglas K.; Concina, Stefano E.; Sun, Stanley S.
US Patent Document 6,066,849
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=6066849

A fast, parallel acquisition, electron energy analyzer: The hyperbolic field analyzer
journal, May 1999

Jacka, M.; Kirk, M.; El Gomati, M. M.
Review of Scientific Instruments, Vol. 70, Issue 5
https://doi.org/10.1063/1.1149753

Scanning electron microscope
patent, September 2002

Todokoro, Hideo; Takami, Sho; Ezumi, Makoto
US Patent Document 6,444,981
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=6444981

Multi-beam ion/electron spectra-microscope
patent, May 2011

Khursheed, Anjam
US Patent Document 7,947,951
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=7947951

Aberration-corrected and energy-filtered low energy electron microscope with monochromatic dual beam illumination
patent, May 2014

Mankos, Marian
US Patent Document 8,729,466
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=8729466

Method and apparatus for irradiating low-energy electrons
patent, August 1992

Yamazaki, Yuichiro; Miyoshi, Motosuke; Okumura, Katsuya
US Patent Document 5,138,169
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=5138169

Electron beam apparatus
patent, June 2015

Ren, Weiming; Li, Shuai; Chen, Zhongwei
US Patent Document 9,048,063
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=9048063

Scanning electron microscope
patent, February 1999

Todokoro, Hideo; Ezumi, Makoto
US Patent Document 5,872,358
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=5872358

Scanning electron microscope
patent, November 2007

Todokoro, Hideo; Ezumi, Makoto; Ose, Yoichi
US Patent Document 7,294,835
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=7294835

Electron-optical system and inspection method using the same
patent, December 2003

Takagi, Toru; Goto, Akihiro
US Patent Document 6,661,008
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=6661008

Scanning electron microscope
patent, January 2003

Todokoro, Hideo; Takami, Sho; Ezumi, Makoto
US Patent Document 6,512,228
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=6512228

Similar Records in DOE Patents and OSTI.GOV collections:

Method and apparatus for simultaneous detection and measurement of charged particles at one or more levels of particle flux for analysis of same

Patent Denton, M Bonner [Tucson, AZ]; Sperline, Roger (Tucson, AZ), Koppenaal, David W. (Richland, WA), Barinaga, Charles J. (Richland, WA), Hieftje, Gary (Bloomington, IN), Barnes, IV, James H. (Santa Fe, NM); Atlas, Eugene [Irvine, CA]

A charged particle detector and method are disclosed providing for simultaneous detection and measurement of charged particles at one or more levels of particle flux in a measurement cycle. The detector provides multiple and independently selectable levels of integration and/or gain in a fully addressable readout manner.
Full Text Available
Method and apparatus for charged particle propagation

Patent Hershcovitch, Ady [Mount Sinai, NY]

A method and apparatus are provided for propagating charged particles from a vacuum to a higher pressure region. A generator 14,14b includes an evacuated chamber 16a,b having a gun 18,18b for discharging a beam of charged particles such as an electron beam 12 or ion beam 12b. The beam 12,12b is discharged through a beam exit 22 in the chamber 16a,b into a higher pressure region 24. A plasma interface 34 is disposed at the beam exit 22 and includes a plasma channel 38 for bounding a plasma 40 maintainable between a cathode 42 and an anode 44 disposed atmore »« less
Full Text Available
Method and apparatus for directing ions and other charged particles generated at near atmospheric pressures into a region under vacuum

Patent Smith, Richard D [Richland, WA]; Shaffer, Scott A [Seattle, WA]

A method and apparatus for focusing dispersed charged particles. More specifically, a series of elements within a region maintained at a pressure between 10.sup.-1 millibar and 1 bar, each having successively larger apertures forming an ion funnel, wherein RF voltages are applied to the elements so that the RF voltage on any element has phase, amplitude and frequency necessary to define a confinement zone for charged particles of appropriate charge and mass in the interior of the ion funnel, wherein the confinement zone has an acceptance region and an emmitance region and where the acceptance region area is larger thanmore » the emmitance region area.« less
Full Text Available
Apparatus and method for monitoring the intensities of charged particle beams

Patent Varma, Matesh N [Mt. Sinai, NY]; Baum, John W [Patchogue, NY]

Charged particle beam monitoring means (40) are disposed in the path of a charged particle beam (44) in an experimental device (10). The monitoring means comprise a beam monitoring component (42) which is operable to prevent passage of a portion of beam (44), while concomitantly permitting passage of another portion thereof (46) for incidence in an experimental chamber (18), and providing a signal (I.sub.m) indicative of the intensity of the beam portion which is not passed. Calibration means (36) are disposed in the experimental chamber in the path of the said another beam portion and are operable to provide amore »« less
Full Text Available
Method and apparatus for detection of charge on ions and particles

Patent Fuerstenau, Stephen Douglas [3938 Park Pl., Montrose, CA 91020]; Soli, George Arthur [4003 Wanna Vista Dr., Vancouver, WA 98661]

The present invention provides a tessellated array detector with charge collecting plate (or cup) electrode pixels and amplifying circuitry integrated into each pixel making it sensitive to external electrostatic charge; a micro collector/amplifier pixel design possessing a small capacitance to ensure a high charge to voltage signal conversion for low noise/high sensitivity operation; a micro-fabricated array of such pixels to create a useful macroscopic target area for ion and charged particle collection.
Full Text Available

Similar Records

Title: Apparatus, method and system for imaging and utilization of SEM charged particles

Abstract

Citation Formats

Coaxial charged particle energy analyzer patent, April 2011

Defect detection using energy spectrometer patent, October 2007

Electron Spectrometer and Measurement Method patent-application, September 2016

Apparatus and method for obtaining topographical dark-field images in a scanning electron microscope patent, May 2010

Scanning electron beam microscope patent, May 2000

A fast, parallel acquisition, electron energy analyzer: The hyperbolic field analyzer journal, May 1999

Scanning electron microscope patent, September 2002

Multi-beam ion/electron spectra-microscope patent, May 2011

Aberration-corrected and energy-filtered low energy electron microscope with monochromatic dual beam illumination patent, May 2014

Method and apparatus for irradiating low-energy electrons patent, August 1992

Electron beam apparatus patent, June 2015

Scanning electron microscope patent, February 1999

Scanning electron microscope patent, November 2007

Electron-optical system and inspection method using the same patent, December 2003

Scanning electron microscope patent, January 2003

Coaxial charged particle energy analyzer
patent, April 2011

Defect detection using energy spectrometer
patent, October 2007

Electron Spectrometer and Measurement Method
patent-application, September 2016

Apparatus and method for obtaining topographical dark-field images in a scanning electron microscope
patent, May 2010

Scanning electron beam microscope
patent, May 2000

A fast, parallel acquisition, electron energy analyzer: The hyperbolic field analyzer
journal, May 1999

Scanning electron microscope
patent, September 2002

Multi-beam ion/electron spectra-microscope
patent, May 2011

Aberration-corrected and energy-filtered low energy electron microscope with monochromatic dual beam illumination
patent, May 2014

Method and apparatus for irradiating low-energy electrons
patent, August 1992

Electron beam apparatus
patent, June 2015

Scanning electron microscope
patent, February 1999

Scanning electron microscope
patent, November 2007

Electron-optical system and inspection method using the same
patent, December 2003

Scanning electron microscope
patent, January 2003