Laminated magnetic materials for on-chip magnetic inductors/transformers
Abstract
A technique relates to a method of forming a laminated multilayer magnetic structure. An adhesion layer is deposited on a substrate. A magnetic seed layer is deposited on top of the adhesion layer. Magnetic layers and non-magnetic spacer layers are alternatingly deposited such that an even number of the magnetic layers is deposited while an odd number of the non-magnetic spacer layers is deposited. The odd number is one less than the even number. Every two of the magnetic layers is separated by one of the non-magnetic spacer layers. The first of the magnetic layers is deposited on the magnetic seed layer, and the magnetic layers each have a thickness less than 500 nanometers.
- Inventors:
- Issue Date:
- Research Org.:
- International Business Machines Corp., Armonk, NY (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1735213
- Patent Number(s):
- 10763038
- Application Number:
- 14/950,364
- Assignee:
- International Business Machines Corporation (Armonk, NY)
- DOE Contract Number:
- B601996
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 11/24/2015
- Country of Publication:
- United States
- Language:
- English
Citation Formats
Deligianni, Hariklia, Gallagher, William J., Kitayaporn, Sathana, O'Sullivan, Eugene J., Romankiw, Lubomyr T., Wang, Naigang, and Yoon, Joonah. Laminated magnetic materials for on-chip magnetic inductors/transformers. United States: N. p., 2020.
Web.
Deligianni, Hariklia, Gallagher, William J., Kitayaporn, Sathana, O'Sullivan, Eugene J., Romankiw, Lubomyr T., Wang, Naigang, & Yoon, Joonah. Laminated magnetic materials for on-chip magnetic inductors/transformers. United States.
Deligianni, Hariklia, Gallagher, William J., Kitayaporn, Sathana, O'Sullivan, Eugene J., Romankiw, Lubomyr T., Wang, Naigang, and Yoon, Joonah. Tue .
"Laminated magnetic materials for on-chip magnetic inductors/transformers". United States. https://www.osti.gov/servlets/purl/1735213.
@article{osti_1735213,
title = {Laminated magnetic materials for on-chip magnetic inductors/transformers},
author = {Deligianni, Hariklia and Gallagher, William J. and Kitayaporn, Sathana and O'Sullivan, Eugene J. and Romankiw, Lubomyr T. and Wang, Naigang and Yoon, Joonah},
abstractNote = {A technique relates to a method of forming a laminated multilayer magnetic structure. An adhesion layer is deposited on a substrate. A magnetic seed layer is deposited on top of the adhesion layer. Magnetic layers and non-magnetic spacer layers are alternatingly deposited such that an even number of the magnetic layers is deposited while an odd number of the non-magnetic spacer layers is deposited. The odd number is one less than the even number. Every two of the magnetic layers is separated by one of the non-magnetic spacer layers. The first of the magnetic layers is deposited on the magnetic seed layer, and the magnetic layers each have a thickness less than 500 nanometers.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2020},
month = {9}
}
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