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Title: Femtosecond laser-induced formation of submicrometer spikes on a semiconductor substrate

Abstract

The present invention generally provides semiconductor substrates having submicron-sized surface features generated by irradiating the surface with ultra short laser pulses. In one aspect a method of processing a semiconductor substrate is disclosed that includes placing at least a portion of a surface of the substrate in contact with a fluid, and exposing that surface portion to one or more femtosecond pulses so as to modify the topography of that portion. The modification can include, e.g., generating a plurality of submicron-sized spikes in an upper layer of the surface.

Inventors:
;
Issue Date:
Research Org.:
Harvard Univ., Cambridge, MA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1735142
Patent Number(s):
10741399
Application Number:
15/896,940
Assignee:
President and Fellows of Harvard College (Cambridge, MA)
Patent Classifications (CPCs):
B - PERFORMING OPERATIONS B23 - MACHINE TOOLS B23K - SOLDERING OR UNSOLDERING
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
DOE Contract Number:  
FG36-01GO11053
Resource Type:
Patent
Resource Relation:
Patent File Date: 02/14/2018
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Citation Formats

Mazur, Eric, and Shen, Mengyan. Femtosecond laser-induced formation of submicrometer spikes on a semiconductor substrate. United States: N. p., 2020. Web.
Mazur, Eric, & Shen, Mengyan. Femtosecond laser-induced formation of submicrometer spikes on a semiconductor substrate. United States.
Mazur, Eric, and Shen, Mengyan. Tue . "Femtosecond laser-induced formation of submicrometer spikes on a semiconductor substrate". United States. https://www.osti.gov/servlets/purl/1735142.
@article{osti_1735142,
title = {Femtosecond laser-induced formation of submicrometer spikes on a semiconductor substrate},
author = {Mazur, Eric and Shen, Mengyan},
abstractNote = {The present invention generally provides semiconductor substrates having submicron-sized surface features generated by irradiating the surface with ultra short laser pulses. In one aspect a method of processing a semiconductor substrate is disclosed that includes placing at least a portion of a surface of the substrate in contact with a fluid, and exposing that surface portion to one or more femtosecond pulses so as to modify the topography of that portion. The modification can include, e.g., generating a plurality of submicron-sized spikes in an upper layer of the surface.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2020},
month = {8}
}

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patent, October 2006


Ge Short Wavelength Infrared Imager
patent-application, May 2008


Method of multiple pulse laser annealing to activate ultra-shallow junctions
patent, May 2005


Solid State Imaging Device
patent-application, October 2007


Manufacture of silicon-based devices having disordered sulfur-doped surface layers
patent-application, February 2008


Integrated Devices With Optical and Electrical Isolation and Method for Making
patent-application, May 2005


Shallow trench isolation by atomic-level silicon reconstruction
patent, October 2008


Backside Illuminated Image Sensor Having Deep Light Reflective Trenches
patent-application, August 2009


Backside Illuminated Imaging Sensor with Vertical Pixel Sensor
patent-application, August 2009


Semiconductor photodiode and an optical receiver
patent-application, May 2002


Solid-State Imaging Device, Method for Producing Same, and Camera
patent-application, June 2012


Method for fabricating silicon cells
patent, August 1998


Femtosecond laser processing system with process parameters, controls and feedback
patent-application, October 2005


Semiconductor Device and Manufacturing Method Thereof
patent-application, July 2004


High Speed Photosensitive Devices and Associated Methods
patent-application, November 2017


Composite back reflector for photovoltaic device
patent, March 1994


One Chip, Low Light Level Color Camera
patent-application, November 2003


Method of forming polycrystalline semiconductor film
patent-application, March 2002


Method for modifying wiring of semiconductor device
patent, January 1993


By-Product Removal for Wafer Bonding Process
patent-application, August 2008


Photovoltaics on silicon
patent-application, October 2008


Underwater laser processing device including chamber with partitioning wall
patent, November 1999


Process module for increasing the response of backside illuminated photosensitive imagers and associated methods
patent-application, September 2019


Silicon-Based Visible and Near Infrared Optoelectric Devices
patent-application, October 2006


Photosensitive Imaging Devices and Associated Methods
patent-application, July 2019


High-Resolution Optical Code Imaging Using a Color Imager
patent-application, August 2010


Pixel Isolation Elements, Devices and Associated Methods
patent-application, June 2019


Method of manufacturing photoluminescing semiconductor material using lasers
patent, January 1997


Multi-spectrum photosensitive device
patent, November 2015


Photovoltaic Thin-Film Solar Cell and Method of Making the Same
patent-application, March 2009


Method for balancing cells in a battery pack
patent, October 2011


Photosensitive Imaging Devices and Associated Methods
patent-application, November 2014


Photoelectric Conversion Device, Method of Manufacturing the Same and Photoelectric Conversion System
patent-application, April 2013


Annealing methods of doping electrode surfaces using dopant gases
patent, August 1999


Deposition of dopant impurities and pulsed energy drive-in
patent, June 1999


Materials, systems and methods for optoelectronic devices
patent, April 2011


Photoelectric Conversion Device and Method for Manufacturing the Same
patent-application, October 2009


Silicon-Based Visible and Near-infrared Optoelectric Devices
patent-application, July 2009


Monolithic antenna with integral pin diode tuning
patent, October 1988


Solid-State Image Pickup Device
patent-application, November 2003


Image pick-up apparatus with high resolution and anti-bloom characteristics
patent, March 1990


Imaging Sensors with Optical Cavity Pixels
patent-application, August 2013


Backside illuminated imaging sensor with light attenuating layer
patent-application, August 2009


Image Sensor and Method of Manufacturing the Same
patent-application, December 2014


Semiconductor Voltage Transformer
patent, November 1975


Optoelectronic device with lateral pin or pin junction
patent-application, March 2012


Method for enhancing chemisorption of material
patent, April 2000


Photosensitive imaging devices and associated methods
patent, April 2014


Photovoltaic Device and Method of Manufacturing the Same
patent-application, February 2010


Surface Modification Method for solid Sample, Impurity Activation Method, and Method for Manufacturing Semiconductor Device
patent-application, December 2007


Monolithic diode assay
patent, September 1996


Back-Side Illuminated Image Sensor
patent-application, June 2010


Monolithic Assembly of Semiconductor Components Including a Fast Diode
patent-application, February 2002


Method and apparatus for improved photoplethysmographic perfusion-index monitoring
patent, June 1998


Laser annealing apparatus
patent, July 2007


Photosensitive imaging devices and associated methods
patent, July 2019


Identifying Ambient Light Type and Illuminance Compensation Using a Plurality of Photodetectors
patent-application, January 2012


Zinc oxide multi-junction photovoltaic cells and optoelectronic devices
patent-application, February 2010


Method and Structure for Hydrogenation of Silicon Substrates with Shaped Covers
patent-application, March 2009


Photodiode manufacturing method and photodiodes
patent, October 2013


Shallow trench textured regions and associated methods
patent-application, February 2016


Semiconductor photodetection element
patent, January 2014


Optical Pickup Apparatus and Laser Diode Chip
patent-application, September 2001


Image Sensor, Electronic Apparatus, and Driving Method of Electronic Apparatus
patent-application, November 2008


Image sensor
patent, March 1990


Three dimensional sensors, systems, and associated methods
patent-application, March 2013


Selective laser annealing of semiconductor material
patent, October 2009


Laser-induced structuring of substrate surfaces
patent, October 2010


Micro-texture media made by polishing of a selectively irradiated surface
patent, September 2000


Method and Apparatus for Laser-Processing a Semiconductor Photovoltaic Apparatus
patent-application, June 2010


Method of Manufacturing Photoelectric Conversion Device
patent-application, June 2009


TFA Image Sensor with Stability-Optimized Photodiode
patent-application, January 2006


Super Bright Light Emitting Diode of Nanorod Array Structure Having InGaN Quantum Well and Method for Manufacturing the Same
patent-application, September 2005


Electromagnetic radiation imaging devices and associated methods
patent, March 2014


Shallow Trench Textured Regions and Associated Methods
patent-application, September 2017


Photosensitive imaging devices and associated methods
patent-application, September 2017


Laser-Induced Structure of Substrate Surfaces
patent-application, February 2011


Highly-Depleted Laser Doped Semiconductor Volume
patent-application, March 2013


Image Sensor Having Curved Micro-Mirrors Over the Sensing Photodiode and Method for Fabricating
patent-application, May 2008


Method for Fabricating Semiconductor Device
patent-application, January 2004


Personal Authentication Apparatus and Mobile Communication Terminal
patent-application, June 2011


Laser Irradiation Method, Laser Irradiation Apparatus and Method for Manufacturing Semiconductor Device
patent-application, August 2007


Systems and Processes for Forming Three-Dimensional Circuits
patent-application, June 2010


Solid-State Imaging Device, Production Method Thereof, and Electronic Device
patent-application, October 2009


Apparatus and methods for use in flash detection
patent-application, June 2007


Infrared Face Authenticating Apparatus, and Portable Terminal and Security Apparatus Including the Same
patent-application, August 2007


Solar Cell
patent-application, March 2011


Isolation process for VLSI
patent, August 1993


Anti-Reflection Structures for CMOS Image Sensors
patent-application, November 2009


Overvoltage protection device
patent, October 2003


Selective Emitter Solar Cell and Fabrication Method Thereof
patent-application, February 2010


Solid-state imaging device
patent, May 2013


Heterojunction Bipolar Transistor and Manufacturing Method Thereof
patent-application, November 2006


Large area, low voltage, high current photovoltaic modules and method of fabricating same
patent, September 1988


Photosensitive imaging devices and associated methods
patent, July 2013


Photovoltaic device
patent, January 1998


Photosensitive Imaging Devices and Associated Methods
patent-application, December 2017


Solar cell structures, photovoltaic panels and corresponding processes
patent-application, August 2008