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Title: Fabrication of amorphous diamond films

Amorphous diamond films having a significant reduction in intrinsic stress are prepared by biasing a substrate to be coated and depositing carbon ions thereon under controlled temperature conditions. 1 fig.
Inventors:
Issue Date:
OSTI Identifier:
170486
Assignee:
Univ. of California, Oakland, CA (United States) PTO; SCA: 360601; PA: EDB-96:028237; SN: 96001517626
Patent Number(s):
US 5,474,816/A/
Application Number:
PAN: 8-047,176
Contract Number:
W-7405-ENG-48
Resource Relation:
Other Information: PBD: 12 Dec 1995
Research Org:
University of California
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; DIAMONDS; SURFACE COATING; AMORPHOUS STATE; TEMPERATURE CONTROL; CONTROLLED ATMOSPHERES

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