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Title: Fabrication of amorphous diamond films

Abstract

Amorphous diamond films having a significant reduction in intrinsic stress are prepared by biasing a substrate to be coated and depositing carbon ions thereon under controlled temperature conditions. 1 fig.

Inventors:
Issue Date:
Research Org.:
University of California
OSTI Identifier:
170486
Patent Number(s):
5,474,816
Application Number:
PAN: 8-047,176
Assignee:
Univ. of California, Oakland, CA (United States)
DOE Contract Number:  
W-7405-ENG-48
Resource Type:
Patent
Resource Relation:
Other Information: PBD: 12 Dec 1995
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; DIAMONDS; SURFACE COATING; AMORPHOUS STATE; TEMPERATURE CONTROL; CONTROLLED ATMOSPHERES

Citation Formats

Falabella, S. Fabrication of amorphous diamond films. United States: N. p., 1995. Web.
Falabella, S. Fabrication of amorphous diamond films. United States.
Falabella, S. Tue . "Fabrication of amorphous diamond films". United States.
@article{osti_170486,
title = {Fabrication of amorphous diamond films},
author = {Falabella, S},
abstractNote = {Amorphous diamond films having a significant reduction in intrinsic stress are prepared by biasing a substrate to be coated and depositing carbon ions thereon under controlled temperature conditions. 1 fig.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1995},
month = {12}
}