Multiple target laser ablation system
Abstract
A laser ablation apparatus and method are provided in which multiple targets consisting of material to be ablated are mounted on a movable support. The material transfer rate is determined for each target material, and these rates are stored in a controller. A position detector determines which target material is in a position to be ablated, and then the controller controls the beam trigger timing and energy level to achieve a desired proportion of each constituent material in the resulting film. 3 figs.
- Inventors:
- Issue Date:
- Research Org.:
- Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
- OSTI Identifier:
- 170472
- Patent Number(s):
- 5483037
- Application Number:
- PAN: 8-159,614
- Assignee:
- Martin Marietta Energy Systems, Inc., Oak Ridge, TN (United States)
- DOE Contract Number:
- AC05-84OR21400
- Resource Type:
- Patent
- Resource Relation:
- Other Information: PBD: 9 Jan 1996
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; MATERIALS; SURFACE COATING; EQUIPMENT; DESIGN; ABLATION; LASER RADIATION; MASS TRANSFER; PROCESS CONTROL; COMPUTERIZED CONTROL SYSTEMS; FILMS
Citation Formats
Mashburn, D N. Multiple target laser ablation system. United States: N. p., 1996.
Web.
Mashburn, D N. Multiple target laser ablation system. United States.
Mashburn, D N. Tue .
"Multiple target laser ablation system". United States.
@article{osti_170472,
title = {Multiple target laser ablation system},
author = {Mashburn, D N},
abstractNote = {A laser ablation apparatus and method are provided in which multiple targets consisting of material to be ablated are mounted on a movable support. The material transfer rate is determined for each target material, and these rates are stored in a controller. A position detector determines which target material is in a position to be ablated, and then the controller controls the beam trigger timing and energy level to achieve a desired proportion of each constituent material in the resulting film. 3 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1996},
month = {1}
}
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