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Title: Multiple target laser ablation system

A laser ablation apparatus and method are provided in which multiple targets consisting of material to be ablated are mounted on a movable support. The material transfer rate is determined for each target material, and these rates are stored in a controller. A position detector determines which target material is in a position to be ablated, and then the controller controls the beam trigger timing and energy level to achieve a desired proportion of each constituent material in the resulting film. 3 figs.
Inventors:
Issue Date:
OSTI Identifier:
170472
Assignee:
Martin Marietta Energy Systems, Inc., Oak Ridge, TN (United States) PTO; SCA: 360101; 360201; 360601; PA: EDB-96:027597; SN: 96001517573
Patent Number(s):
US 5,483,037/A/
Application Number:
PAN: 8-159,614
Contract Number:
AC05-84OR21400
Resource Relation:
Other Information: PBD: 9 Jan 1996
Research Org:
Lockheed Martin Energy Syst Inc
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; MATERIALS; SURFACE COATING; EQUIPMENT; DESIGN; ABLATION; LASER RADIATION; MASS TRANSFER; PROCESS CONTROL; COMPUTERIZED CONTROL SYSTEMS; FILMS