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Title: Multiple target laser ablation system

Abstract

A laser ablation apparatus and method are provided in which multiple targets consisting of material to be ablated are mounted on a movable support. The material transfer rate is determined for each target material, and these rates are stored in a controller. A position detector determines which target material is in a position to be ablated, and then the controller controls the beam trigger timing and energy level to achieve a desired proportion of each constituent material in the resulting film. 3 figs.

Inventors:
Issue Date:
Research Org.:
Lockheed Martin Energy Syst Inc
OSTI Identifier:
170472
Patent Number(s):
5,483,037
Application Number:
PAN: 8-159,614
Assignee:
Martin Marietta Energy Systems, Inc., Oak Ridge, TN (United States)
DOE Contract Number:  
AC05-84OR21400
Resource Type:
Patent
Resource Relation:
Other Information: PBD: 9 Jan 1996
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; MATERIALS; SURFACE COATING; EQUIPMENT; DESIGN; ABLATION; LASER RADIATION; MASS TRANSFER; PROCESS CONTROL; COMPUTERIZED CONTROL SYSTEMS; FILMS

Citation Formats

Mashburn, D N. Multiple target laser ablation system. United States: N. p., 1996. Web.
Mashburn, D N. Multiple target laser ablation system. United States.
Mashburn, D N. Tue . "Multiple target laser ablation system". United States.
@article{osti_170472,
title = {Multiple target laser ablation system},
author = {Mashburn, D N},
abstractNote = {A laser ablation apparatus and method are provided in which multiple targets consisting of material to be ablated are mounted on a movable support. The material transfer rate is determined for each target material, and these rates are stored in a controller. A position detector determines which target material is in a position to be ablated, and then the controller controls the beam trigger timing and energy level to achieve a desired proportion of each constituent material in the resulting film. 3 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1996},
month = {1}
}