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Title: Method for error correction in scanning probe microscopy

Abstract

Disclosed here is a scanning probe microscope system and method for operating the same for producing scanning probe microscope images at fast scan rates and reducing oscillation artifacts. In some embodiments, an inverse consistent image registration method is used to align forward and backward scan traces for each line of the scanning microscope image. In some embodiments, the aligned forward and backward scan traces are combined using a weighting factor favoring the scan trace with higher smoothness. In some embodiments, the scanning probe microscope image is a potentiometry map and a method is provided to extract from the potentiometry map a conductivity map.

Inventors:
; ; ; ;
Issue Date:
Research Org.:
Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1650967
Patent Number(s):
10670625
Application Number:
16/316,385
Assignee:
University of Florida Research Foundation, Inc. (Gainesville, FL)
Patent Classifications (CPCs):
G - PHYSICS G01 - MEASURING G01Q - SCANNING-PROBE TECHNIQUES OR APPARATUS
DOE Contract Number:  
AC05-00OR22725
Resource Type:
Patent
Resource Relation:
Patent File Date: 07/12/2017
Country of Publication:
United States
Language:
English

Citation Formats

Zhang, Xiaoguang, Li, Xianqi, Li, An-Ping, Zhang, Hao, and Chen, Yunmei. Method for error correction in scanning probe microscopy. United States: N. p., 2020. Web.
Zhang, Xiaoguang, Li, Xianqi, Li, An-Ping, Zhang, Hao, & Chen, Yunmei. Method for error correction in scanning probe microscopy. United States.
Zhang, Xiaoguang, Li, Xianqi, Li, An-Ping, Zhang, Hao, and Chen, Yunmei. Tue . "Method for error correction in scanning probe microscopy". United States. https://www.osti.gov/servlets/purl/1650967.
@article{osti_1650967,
title = {Method for error correction in scanning probe microscopy},
author = {Zhang, Xiaoguang and Li, Xianqi and Li, An-Ping and Zhang, Hao and Chen, Yunmei},
abstractNote = {Disclosed here is a scanning probe microscope system and method for operating the same for producing scanning probe microscope images at fast scan rates and reducing oscillation artifacts. In some embodiments, an inverse consistent image registration method is used to align forward and backward scan traces for each line of the scanning microscope image. In some embodiments, the aligned forward and backward scan traces are combined using a weighting factor favoring the scan trace with higher smoothness. In some embodiments, the scanning probe microscope image is a potentiometry map and a method is provided to extract from the potentiometry map a conductivity map.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2020},
month = {6}
}

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