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Title: Method and precision nanopositioning apparatus with compact vertical and horizontal linear nanopositioning flexure stages for implementing enhanced nanopositioning performance

Abstract

An enhanced method and precision nanopositioning apparatus for implementing enhanced nanopositioning performance is provided. The nanopositioning apparatus includes a vertical linear nanopositioning flexure stage and a horizontal linear nanopositioning flexure stage. The vertical linear nanopositioning flexure stage includes a stage base, a symmetrically configured flexure linear guiding mechanism with precision motion enhancement structure, and a stage carriage. The horizontal linear nanopositioning flexure stage is mounted on the stage carriage of the vertical linear nanopositioning flexure stage, and includes a middle-bar relative position control mechanism to enhance the stiffness of a flexure linear guiding mechanism.

Inventors:
; ; ; ; ; ; ;
Issue Date:
Research Org.:
Argonne National Lab. (ANL), Argonne, IL (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1650947
Patent Number(s):
10663040
Application Number:
15/662,086
Assignee:
UChicago Argonne, LLC (Chicago, IL)
Patent Classifications (CPCs):
F - MECHANICAL ENGINEERING F16 - ENGINEERING ELEMENTS AND UNITS F16H - GEARING
H - ELECTRICITY H02 - GENERATION H02N - ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
DOE Contract Number:  
AC02-06CH11357
Resource Type:
Patent
Resource Relation:
Patent File Date: 07/27/2017
Country of Publication:
United States
Language:
English

Citation Formats

Shu, Deming, Lai, Barry, Kearney, Steven P., Anton, Jayson W., Liu, Wenjun, Maser, Jorg M., Roehrig, Christian, and Tischler, Jonathan Z.. Method and precision nanopositioning apparatus with compact vertical and horizontal linear nanopositioning flexure stages for implementing enhanced nanopositioning performance. United States: N. p., 2020. Web.
Shu, Deming, Lai, Barry, Kearney, Steven P., Anton, Jayson W., Liu, Wenjun, Maser, Jorg M., Roehrig, Christian, & Tischler, Jonathan Z.. Method and precision nanopositioning apparatus with compact vertical and horizontal linear nanopositioning flexure stages for implementing enhanced nanopositioning performance. United States.
Shu, Deming, Lai, Barry, Kearney, Steven P., Anton, Jayson W., Liu, Wenjun, Maser, Jorg M., Roehrig, Christian, and Tischler, Jonathan Z.. Tue . "Method and precision nanopositioning apparatus with compact vertical and horizontal linear nanopositioning flexure stages for implementing enhanced nanopositioning performance". United States. https://www.osti.gov/servlets/purl/1650947.
@article{osti_1650947,
title = {Method and precision nanopositioning apparatus with compact vertical and horizontal linear nanopositioning flexure stages for implementing enhanced nanopositioning performance},
author = {Shu, Deming and Lai, Barry and Kearney, Steven P. and Anton, Jayson W. and Liu, Wenjun and Maser, Jorg M. and Roehrig, Christian and Tischler, Jonathan Z.},
abstractNote = {An enhanced method and precision nanopositioning apparatus for implementing enhanced nanopositioning performance is provided. The nanopositioning apparatus includes a vertical linear nanopositioning flexure stage and a horizontal linear nanopositioning flexure stage. The vertical linear nanopositioning flexure stage includes a stage base, a symmetrically configured flexure linear guiding mechanism with precision motion enhancement structure, and a stage carriage. The horizontal linear nanopositioning flexure stage is mounted on the stage carriage of the vertical linear nanopositioning flexure stage, and includes a middle-bar relative position control mechanism to enhance the stiffness of a flexure linear guiding mechanism.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2020},
month = {5}
}

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