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Title: Method for electrochemical roughening of thin film electrodes

Abstract

The present invention relates to surface roughening methods and more particularly to a method for electrochemical roughening of thin film macro- and micro-electrodes. In one embodiment, an electrochemical etch template is formed comprising polymer particles adsorbed on a surface of a substrate to be roughened, followed by electrochemically etching of exposed regions of the substrate between the polymer particles in the electrochemical etch template so as to selectively roughen the surface of the substrate. In another embodiment, a surface of the electrode is immersed in either a adsorbing acidic solution, such as sulfuric acid, or a non-adsorbing acidic solution, such as perchloric acid, followed by electrochemically pulse etching the surface of the substrate at a narrow frequency range for adsorbing acidic solutions, or at a wide frequency range for non-adsorbing acidic solutions.

Inventors:
; ; ; ; ; ;
Issue Date:
Research Org.:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1650737
Patent Number(s):
10612153
Application Number:
15/615,648
Assignee:
Lawrence Livermore National Security, LLC (Livermore, CA)
Patent Classifications (CPCs):
C - CHEMISTRY C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES C25F - PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS
DOE Contract Number:  
AC52-07NA27344
Resource Type:
Patent
Resource Relation:
Patent File Date: 06/06/2017
Country of Publication:
United States
Language:
English

Citation Formats

Ivanovskaya, Anna Nikolaevna, Tolosa, Vanessa, Dahlquist, Dylan, Pannu, Satinderpall S., Shah, Kedar G., Tooker, Angela C., and Qian, Fang. Method for electrochemical roughening of thin film electrodes. United States: N. p., 2020. Web.
Ivanovskaya, Anna Nikolaevna, Tolosa, Vanessa, Dahlquist, Dylan, Pannu, Satinderpall S., Shah, Kedar G., Tooker, Angela C., & Qian, Fang. Method for electrochemical roughening of thin film electrodes. United States.
Ivanovskaya, Anna Nikolaevna, Tolosa, Vanessa, Dahlquist, Dylan, Pannu, Satinderpall S., Shah, Kedar G., Tooker, Angela C., and Qian, Fang. Tue . "Method for electrochemical roughening of thin film electrodes". United States. https://www.osti.gov/servlets/purl/1650737.
@article{osti_1650737,
title = {Method for electrochemical roughening of thin film electrodes},
author = {Ivanovskaya, Anna Nikolaevna and Tolosa, Vanessa and Dahlquist, Dylan and Pannu, Satinderpall S. and Shah, Kedar G. and Tooker, Angela C. and Qian, Fang},
abstractNote = {The present invention relates to surface roughening methods and more particularly to a method for electrochemical roughening of thin film macro- and micro-electrodes. In one embodiment, an electrochemical etch template is formed comprising polymer particles adsorbed on a surface of a substrate to be roughened, followed by electrochemically etching of exposed regions of the substrate between the polymer particles in the electrochemical etch template so as to selectively roughen the surface of the substrate. In another embodiment, a surface of the electrode is immersed in either a adsorbing acidic solution, such as sulfuric acid, or a non-adsorbing acidic solution, such as perchloric acid, followed by electrochemically pulse etching the surface of the substrate at a narrow frequency range for adsorbing acidic solutions, or at a wide frequency range for non-adsorbing acidic solutions.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2020},
month = {4}
}

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