Laser process and corresponding structures for forming contact holes of solar cells

Harley, Gabriel; Smith, David D.; Dennis, Tim; Waldhauer, Ann; Kim, Taeseok; Cousins, Peter John

Title: Laser process and corresponding structures for forming contact holes of solar cells

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Abstract

Contact holes of solar cells are formed by laser ablation to accommodate various solar cell designs. Use of a laser to form the contact holes is facilitated by replacing films formed on the diffusion regions with a film that has substantially uniform thickness. Contact holes may be formed to deep diffusion regions to increase the laser ablation process margins. The laser configuration may be tailored to form contact holes through dielectric films of varying thicknesses.

Inventors:: Harley, Gabriel; Smith, David D.; Dennis, Tim; Waldhauer, Ann; Kim, Taeseok; Cousins, Peter John

Issue Date:: 2020-03-31

Research Org.:: SunPower Corp., San Jose, CA (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1637772

Patent Number(s):: 10608126

Application Number:: 15/794,406

Assignee:: SunPower Corporation (San Jose, CA)

Patent Classifications (CPCs):: H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE Y02E - REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION

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H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
H01L31/022441 - {Electrode arrangements specially adapted for back-contact solar cells}
H01L31/1804 - {comprising only elements of Group IV of the Periodic System}

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE Y02E - REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
Y02E10/52 - PV systems with concentrators
Y02E10/547 - Monocrystalline silicon PV cells

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE Y02P - CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
Y02P70/50 - Manufacturing or production processes characterised by the final manufactured product

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
H01L31/0682 - {back-junction, i.e. rearside emitter, solar cells, e.g. interdigitated base-emitter regions back-junction cells}
H01L31/02168 - {the coatings being antireflective or having enhancing optical properties for the solar cells}

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DOE Contract Number:: FC36-07GO17043

Resource Type:: Patent

Resource Relation:: Patent File Date: 10/26/2017

Country of Publication:: United States

Language:: English

Citation Formats


                    Harley, Gabriel, Smith, David D., Dennis, Tim, Waldhauer, Ann, Kim, Taeseok, and Cousins, Peter John. Laser process and corresponding structures for forming contact holes of solar cells.  United States: N. p., 2020. 
        Web.

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                    Harley, Gabriel, Smith, David D., Dennis, Tim, Waldhauer, Ann, Kim, Taeseok, & Cousins, Peter John. Laser process and corresponding structures for forming contact holes of solar cells.  United States.

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                    Harley, Gabriel, Smith, David D., Dennis, Tim, Waldhauer, Ann, Kim, Taeseok, and Cousins, Peter John. Tue .  
        "Laser process and corresponding structures for forming contact holes of solar cells".  United States.  https://www.osti.gov/servlets/purl/1637772.

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@article{osti_1637772,

  title        = {Laser process and corresponding structures for forming contact holes of solar cells},

  author       = {Harley, Gabriel and Smith, David D. and Dennis, Tim and Waldhauer, Ann and Kim, Taeseok and Cousins, Peter John},

  abstractNote = {Contact holes of solar cells are formed by laser ablation to accommodate various solar cell designs. Use of a laser to form the contact holes is facilitated by replacing films formed on the diffusion regions with a film that has substantially uniform thickness. Contact holes may be formed to deep diffusion regions to increase the laser ablation process margins. The laser configuration may be tailored to form contact holes through dielectric films of varying thicknesses.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2020},

  month        = {3}

}

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