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Title: Laser process and corresponding structures for forming contact holes of solar cells

Abstract

Contact holes of solar cells are formed by laser ablation to accommodate various solar cell designs. Use of a laser to form the contact holes is facilitated by replacing films formed on the diffusion regions with a film that has substantially uniform thickness. Contact holes may be formed to deep diffusion regions to increase the laser ablation process margins. The laser configuration may be tailored to form contact holes through dielectric films of varying thicknesses.

Inventors:
; ; ; ; ;
Issue Date:
Research Org.:
SunPower Corp., San Jose, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1637772
Patent Number(s):
10608126
Application Number:
15/794,406
Assignee:
SunPower Corporation (San Jose, CA)
Patent Classifications (CPCs):
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE Y02E - REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
DOE Contract Number:  
FC36-07GO17043
Resource Type:
Patent
Resource Relation:
Patent File Date: 10/26/2017
Country of Publication:
United States
Language:
English

Citation Formats

Harley, Gabriel, Smith, David D., Dennis, Tim, Waldhauer, Ann, Kim, Taeseok, and Cousins, Peter John. Laser process and corresponding structures for forming contact holes of solar cells. United States: N. p., 2020. Web.
Harley, Gabriel, Smith, David D., Dennis, Tim, Waldhauer, Ann, Kim, Taeseok, & Cousins, Peter John. Laser process and corresponding structures for forming contact holes of solar cells. United States.
Harley, Gabriel, Smith, David D., Dennis, Tim, Waldhauer, Ann, Kim, Taeseok, and Cousins, Peter John. Tue . "Laser process and corresponding structures for forming contact holes of solar cells". United States. https://www.osti.gov/servlets/purl/1637772.
@article{osti_1637772,
title = {Laser process and corresponding structures for forming contact holes of solar cells},
author = {Harley, Gabriel and Smith, David D. and Dennis, Tim and Waldhauer, Ann and Kim, Taeseok and Cousins, Peter John},
abstractNote = {Contact holes of solar cells are formed by laser ablation to accommodate various solar cell designs. Use of a laser to form the contact holes is facilitated by replacing films formed on the diffusion regions with a film that has substantially uniform thickness. Contact holes may be formed to deep diffusion regions to increase the laser ablation process margins. The laser configuration may be tailored to form contact holes through dielectric films of varying thicknesses.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2020},
month = {3}
}

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Works referenced in this record:

Solar cell with reduced base diffusion area
patent, August 2011


Solar cell with reduced base diffusion area
patent, March 2014