Fabrication of multilayered carbon MEMS devices
Abstract
The various technologies presented herein relate to formation of carbon micromechanical systems (CMEMS), wherein the CMEMS comprise multiple layers of carbon structures and are formed using a plurality of photoresist precursors that are processed to form carbon. The various embodiments can be utilized in producing a plurality of CMEMS with full production level fabrication, e.g., 6 inch wafers can be processed. A pyrolyzed layer of carbon is lithographically defined after pyrolysis, wherein the post-pyrolysis etch process can produce carbon structures having repeatable and accurate device geometries, with straight sidewalls. A sacrificial layer can be applied to facilitate separation of a first carbon layer from a second carbon layer, wherein, upon pyrolysis to form the second carbon layer and lithography thereof, the sacrificial layer is removed to form a CMEMS comprising a first carbon layer (e.g., comprising bottom contacts) located beneath a second carbon layer (e.g., a mechanical layer).
- Inventors:
- Issue Date:
- Research Org.:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Org.:
- USDOE National Nuclear Security Administration (NNSA)
- OSTI Identifier:
- 1632600
- Patent Number(s):
- 10570010
- Application Number:
- 15/624,928
- Assignee:
- National Technology & Engineering Solutions of Sandia, LLC (Albuquerque, NM)
- Patent Classifications (CPCs):
-
B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81C - PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- DOE Contract Number:
- NA0003525
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 06/16/2017
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY
Citation Formats
Finnegan, Patrick Sean, Washburn, Cody M., Burckel, David Bruce, Wheeler, David R., Lambert, Timothy N., Massey, Lee Taylor, Strong, Jennifer Marie, and Dyck, Christopher. Fabrication of multilayered carbon MEMS devices. United States: N. p., 2020.
Web.
Finnegan, Patrick Sean, Washburn, Cody M., Burckel, David Bruce, Wheeler, David R., Lambert, Timothy N., Massey, Lee Taylor, Strong, Jennifer Marie, & Dyck, Christopher. Fabrication of multilayered carbon MEMS devices. United States.
Finnegan, Patrick Sean, Washburn, Cody M., Burckel, David Bruce, Wheeler, David R., Lambert, Timothy N., Massey, Lee Taylor, Strong, Jennifer Marie, and Dyck, Christopher. Tue .
"Fabrication of multilayered carbon MEMS devices". United States. https://www.osti.gov/servlets/purl/1632600.
@article{osti_1632600,
title = {Fabrication of multilayered carbon MEMS devices},
author = {Finnegan, Patrick Sean and Washburn, Cody M. and Burckel, David Bruce and Wheeler, David R. and Lambert, Timothy N. and Massey, Lee Taylor and Strong, Jennifer Marie and Dyck, Christopher},
abstractNote = {The various technologies presented herein relate to formation of carbon micromechanical systems (CMEMS), wherein the CMEMS comprise multiple layers of carbon structures and are formed using a plurality of photoresist precursors that are processed to form carbon. The various embodiments can be utilized in producing a plurality of CMEMS with full production level fabrication, e.g., 6 inch wafers can be processed. A pyrolyzed layer of carbon is lithographically defined after pyrolysis, wherein the post-pyrolysis etch process can produce carbon structures having repeatable and accurate device geometries, with straight sidewalls. A sacrificial layer can be applied to facilitate separation of a first carbon layer from a second carbon layer, wherein, upon pyrolysis to form the second carbon layer and lithography thereof, the sacrificial layer is removed to form a CMEMS comprising a first carbon layer (e.g., comprising bottom contacts) located beneath a second carbon layer (e.g., a mechanical layer).},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2020},
month = {2}
}