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Title: Nanoscale optical tomography with cathodoluminescence spectroscopy

Abstract

In one aspect, a cathodoluminescence (CL) spectroscopic tomography device includes a sample stage to support a sample. An electron beam source scans an electron beam over the sample to yield light emission by the sample. A reflective element directs the light emission by the sample to a light detector. A controller controls operation of the sample stage, the electron beam source, and the light detector. In one aspect, a CL spectroscopic tomography device includes an electron beam source which directs an electron beam at an object to yield an emission by the object. A detector detects the emission. A controller receives information from the detector related to the detected emission. The controller derives a two-dimensional (2D) CL map from the information related to the detected emission, and derives a three-dimensional (3D) CL tomogram from the 2D CL map.

Inventors:
; ; ; ;
Issue Date:
Research Org.:
Stanford Univ., CA (United States); Stichting voor Fundamenteel Onderzoek der Materie, Utrecht (Netherlands)
Sponsoring Org.:
USDOE
OSTI Identifier:
1632524
Patent Number(s):
10551330
Application Number:
15/305,329
Assignee:
The Board of Trustees of the Leland Stanford Junior University (Stanford, CA); Stichting voor Fundamenteel Onderzoek der Materie (Utrecht, NL)
Patent Classifications (CPCs):
G - PHYSICS G01 - MEASURING G01J - MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT
A - HUMAN NECESSITIES A61 - MEDICAL OR VETERINARY SCIENCE A61B - DIAGNOSIS
DOE Contract Number:  
EE0005331
Resource Type:
Patent
Resource Relation:
Patent File Date: 04/22/2015
Country of Publication:
United States
Language:
English
Subject:
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS

Citation Formats

Atre, Ashwin C., Dionne, Jennifer A., Brenny, Benjamin, Coenen, Toon, and Polman, Albert. Nanoscale optical tomography with cathodoluminescence spectroscopy. United States: N. p., 2020. Web.
Atre, Ashwin C., Dionne, Jennifer A., Brenny, Benjamin, Coenen, Toon, & Polman, Albert. Nanoscale optical tomography with cathodoluminescence spectroscopy. United States.
Atre, Ashwin C., Dionne, Jennifer A., Brenny, Benjamin, Coenen, Toon, and Polman, Albert. Tue . "Nanoscale optical tomography with cathodoluminescence spectroscopy". United States. https://www.osti.gov/servlets/purl/1632524.
@article{osti_1632524,
title = {Nanoscale optical tomography with cathodoluminescence spectroscopy},
author = {Atre, Ashwin C. and Dionne, Jennifer A. and Brenny, Benjamin and Coenen, Toon and Polman, Albert},
abstractNote = {In one aspect, a cathodoluminescence (CL) spectroscopic tomography device includes a sample stage to support a sample. An electron beam source scans an electron beam over the sample to yield light emission by the sample. A reflective element directs the light emission by the sample to a light detector. A controller controls operation of the sample stage, the electron beam source, and the light detector. In one aspect, a CL spectroscopic tomography device includes an electron beam source which directs an electron beam at an object to yield an emission by the object. A detector detects the emission. A controller receives information from the detector related to the detected emission. The controller derives a two-dimensional (2D) CL map from the information related to the detected emission, and derives a three-dimensional (3D) CL tomogram from the 2D CL map.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2020},
month = {2}
}

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Works referenced in this record:

Systems and methods for imaging dynamic processes
patent, October 2016


Multi-color nanoscale imaging based on nanoparticle cathodoluminescence
patent, January 2017