Nanoscale optical tomography with cathodoluminescence spectroscopy

Title: Nanoscale optical tomography with cathodoluminescence spectroscopy

Abstract

In one aspect, a cathodoluminescence (CL) spectroscopic tomography device includes a sample stage to support a sample. An electron beam source scans an electron beam over the sample to yield light emission by the sample. A reflective element directs the light emission by the sample to a light detector. A controller controls operation of the sample stage, the electron beam source, and the light detector. In one aspect, a CL spectroscopic tomography device includes an electron beam source which directs an electron beam at an object to yield an emission by the object. A detector detects the emission. A controller receives information from the detector related to the detected emission. The controller derives a two-dimensional (2D) CL map from the information related to the detected emission, and derives a three-dimensional (3D) CL tomogram from the 2D CL map.

Inventors:: Atre, Ashwin C.; Dionne, Jennifer A.; Brenny, Benjamin; Coenen, Toon; Polman, Albert

Issue Date:: 2020-02-04

Research Org.:: Stanford Univ., CA (United States); Stichting voor Fundamenteel Onderzoek der Materie, Utrecht (Netherlands)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1632524

Patent Number(s):: 10551330

Application Number:: 15/305,329

Assignee:: The Board of Trustees of the Leland Stanford Junior University (Stanford, CA); Stichting voor Fundamenteel Onderzoek der Materie (Utrecht, NL)

Patent Classifications (CPCs):: G - PHYSICS G01 - MEASURING G01J - MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT

A - HUMAN NECESSITIES A61 - MEDICAL OR VETERINARY SCIENCE A61B - DIAGNOSIS

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G - PHYSICS G01 - MEASURING G01J - MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT
G01J3/0264 - {Electrical interface
G01J3/0208 - {using focussing or collimating elements, e.g. lenses or mirrors

A - HUMAN NECESSITIES A61 - MEDICAL OR VETERINARY SCIENCE A61B - DIAGNOSIS
A61B5/0073 - {by tomography, i.e. reconstruction of 3D images from 2D projections

G - PHYSICS G01 - MEASURING G01J - MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT
G01J3/443 - Emission spectrometry
G01J3/44 - Raman spectrometry
G01J3/0218 - {using optical fibers}
G01J3/021 - {using plane or convex mirrors, parallel phase plates, or particular reflectors}

A - HUMAN NECESSITIES A61 - MEDICAL OR VETERINARY SCIENCE A61B - DIAGNOSIS
A61B5/00 - Detecting, measuring or recording for diagnostic purposes
A61B5/0075 - {by spectroscopy, i.e. measuring spectra, e.g. Raman spectroscopy, infrared absorption spectroscopy

G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
G01N23/2254 - Measuring cathodoluminescence

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DOE Contract Number:: EE0005331

Resource Type:: Patent

Resource Relation:: Patent File Date: 04/22/2015

Country of Publication:: United States

Language:: English

Subject:: 46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS

Citation Formats


                    Atre, Ashwin C., Dionne, Jennifer A., Brenny, Benjamin, Coenen, Toon, and Polman, Albert. Nanoscale optical tomography with cathodoluminescence spectroscopy.  United States: N. p., 2020. 
        Web.

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                    Atre, Ashwin C., Dionne, Jennifer A., Brenny, Benjamin, Coenen, Toon, & Polman, Albert. Nanoscale optical tomography with cathodoluminescence spectroscopy.  United States.

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                    Atre, Ashwin C., Dionne, Jennifer A., Brenny, Benjamin, Coenen, Toon, and Polman, Albert. Tue .  
        "Nanoscale optical tomography with cathodoluminescence spectroscopy".  United States.  https://www.osti.gov/servlets/purl/1632524.

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@article{osti_1632524,

  title        = {Nanoscale optical tomography with cathodoluminescence spectroscopy},

  author       = {Atre, Ashwin C. and Dionne, Jennifer A. and Brenny, Benjamin and Coenen, Toon and Polman, Albert},

  abstractNote = {In one aspect, a cathodoluminescence (CL) spectroscopic tomography device includes a sample stage to support a sample. An electron beam source scans an electron beam over the sample to yield light emission by the sample. A reflective element directs the light emission by the sample to a light detector. A controller controls operation of the sample stage, the electron beam source, and the light detector. In one aspect, a CL spectroscopic tomography device includes an electron beam source which directs an electron beam at an object to yield an emission by the object. A detector detects the emission. A controller receives information from the detector related to the detected emission. The controller derives a two-dimensional (2D) CL map from the information related to the detected emission, and derives a three-dimensional (3D) CL tomogram from the 2D CL map.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2020},

  month        = {2}

}

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Works referenced in this record:

Systems and methods for imaging dynamic processes
patent, October 2016

Claus, Bernhard Erich Hermann; Eberhard, Jeffrey Wayne; Langan, David Allen
US Patent Document 9,468,409
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=9468409

Multi-color nanoscale imaging based on nanoparticle cathodoluminescence
patent, January 2017

Walsworth, Ronald L.; Lichtman, Jeff; Kasthuri, Narayanan
US Patent Document 9,541,512
URL: http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=9541512

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Title: Nanoscale optical tomography with cathodoluminescence spectroscopy

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