Sensing analytical instrument parameters, specimen characteristics, or both from sparse datasets

Title: Sensing analytical instrument parameters, specimen characteristics, or both from sparse datasets

Abstract

Disclosed are methods for sensing conditions of an electron microscope system and/or a specimen analyzed thereby. Also disclosed are sensor systems and electron microscope systems able to sense system conditions, and/or conditions of the specimen being analyzed by such systems. In one embodiment, a sparse dataset can be acquired from a random sub-sampling of the specimen by an electron beam probe of the electron microscope system. Instrument parameters, specimen characteristics, or both can be estimated from the sparse dataset.

Inventors:: Stanfill, Bryan A.; Reehl, Sarah M.; Johnson, Margaret C.; Bramer, Lisa M.; Browning, Nigel D.; Stevens, Andrew J.; Kovarik, Libor

Issue Date:: 2020-01-21

Research Org.:: Pacific Northwest National Lab. (PNNL), Richland, WA (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1632476

Patent Number(s):: 10541109

Application Number:: 15/660,096

Assignee:: Battelle Memorial Institute (Richland, WA)

Patent Classifications (CPCs):: H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS

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H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J2237/2814 - Measurement of surface topography
H01J2237/226 - Image reconstruction
H01J37/265 - {Controlling the tube
H01J2237/216 - Automatic focusing methods
H01J2237/282 - Determination of microscope properties
H01J37/28 - with scanning beams
H01J37/244 - Detectors
H01J2237/2817 - Pattern inspection
H01J37/06 - Electron sources
H01J2237/2826 - Calibration

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DOE Contract Number:: AC05-76RL01830

Resource Type:: Patent

Resource Relation:: Patent File Date: 07/26/2017

Country of Publication:: United States

Language:: English

Subject:: 46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY

Citation Formats


                    Stanfill, Bryan A., Reehl, Sarah M., Johnson, Margaret C., Bramer, Lisa M., Browning, Nigel D., Stevens, Andrew J., and Kovarik, Libor. Sensing analytical instrument parameters, specimen characteristics, or both from sparse datasets.  United States: N. p., 2020. 
        Web.

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                    Stanfill, Bryan A., Reehl, Sarah M., Johnson, Margaret C., Bramer, Lisa M., Browning, Nigel D., Stevens, Andrew J., & Kovarik, Libor. Sensing analytical instrument parameters, specimen characteristics, or both from sparse datasets.  United States.

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                    Stanfill, Bryan A., Reehl, Sarah M., Johnson, Margaret C., Bramer, Lisa M., Browning, Nigel D., Stevens, Andrew J., and Kovarik, Libor. Tue .  
        "Sensing analytical instrument parameters, specimen characteristics, or both from sparse datasets".  United States.  https://www.osti.gov/servlets/purl/1632476.

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@article{osti_1632476,

  title        = {Sensing analytical instrument parameters, specimen characteristics, or both from sparse datasets},

  author       = {Stanfill, Bryan A. and Reehl, Sarah M. and Johnson, Margaret C. and Bramer, Lisa M. and Browning, Nigel D. and Stevens, Andrew J. and Kovarik, Libor},

  abstractNote = {Disclosed are methods for sensing conditions of an electron microscope system and/or a specimen analyzed thereby. Also disclosed are sensor systems and electron microscope systems able to sense system conditions, and/or conditions of the specimen being analyzed by such systems. In one embodiment, a sparse dataset can be acquired from a random sub-sampling of the specimen by an electron beam probe of the electron microscope system. Instrument parameters, specimen characteristics, or both can be estimated from the sparse dataset.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2020},

  month        = {1}

}

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Works referenced in this record:

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patent-application, March 2015

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Title: Sensing analytical instrument parameters, specimen characteristics, or both from sparse datasets

Abstract

Citation Formats

Sparse Sampling And Reconstruction For Electron And Scanning Probe Microscope Imaging patent-application, March 2015

Ion Sources, Systems And Methods patent-application, July 2009

Methods and systems for determining a presence of defects and a thin film characteristic of a specimen patent, September 2006

Charged Particle Microscope With Special Aperture Plate patent-application, April 2016

Position detecting system patent, May 1986

Mathematical image assembly in a scanning-type microscope patent, April 2017

Probe system with multiple actuation locations patent, January 2018

Sparse Sampling And Reconstruction For Electron And Scanning Probe Microscope Imaging
patent-application, March 2015

Ion Sources, Systems And Methods
patent-application, July 2009

Methods and systems for determining a presence of defects and a thin film characteristic of a specimen
patent, September 2006

Charged Particle Microscope With Special Aperture Plate
patent-application, April 2016

Position detecting system
patent, May 1986

Mathematical image assembly in a scanning-type microscope
patent, April 2017

Probe system with multiple actuation locations
patent, January 2018