Devices and methods for electrochemical liquid phase epitaxy
Abstract
Electrochemical liquid phase epitaxy (ec-LPE) processes and devices are provided that can form precipitated epitaxial crystalline films or layers on a substrate. The precipitated films may comprise a semiconductor, such as germanium, silicon, or carbon. Dissolution into, saturation within, and precipitation of the semiconductor from a liquid metal electrode (e.g., Hg pool) near an interface region with a substrate yields a polycrystalline semiconductor material deposited as an epitaxial film. Reactor cells for use in an electrochemical liquid phase epitaxy (ec-LPE) device are also provided that include porous membranes to facilitate formation of the precipitated epitaxial crystalline films.
- Inventors:
- Issue Date:
- Research Org.:
- Univ. of Michigan, Ann Arbor, MI (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1632466
- Patent Number(s):
- 10538860
- Application Number:
- 15/865,432
- Assignee:
- The Regents of the University of Michigan (Ann Arbor, MI)
- Patent Classifications (CPCs):
-
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE Y02E - REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
C - CHEMISTRY C30 - CRYSTAL GROWTH C30B - SINGLE-CRYSTAL-GROWTH
- DOE Contract Number:
- AR0000523
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 01/09/2018
- Country of Publication:
- United States
- Language:
- English
Citation Formats
Maldonado, Stephen, DeMuth, Joshua, and Fahrenkrug, Eli. Devices and methods for electrochemical liquid phase epitaxy. United States: N. p., 2020.
Web.
Maldonado, Stephen, DeMuth, Joshua, & Fahrenkrug, Eli. Devices and methods for electrochemical liquid phase epitaxy. United States.
Maldonado, Stephen, DeMuth, Joshua, and Fahrenkrug, Eli. Tue .
"Devices and methods for electrochemical liquid phase epitaxy". United States. https://www.osti.gov/servlets/purl/1632466.
@article{osti_1632466,
title = {Devices and methods for electrochemical liquid phase epitaxy},
author = {Maldonado, Stephen and DeMuth, Joshua and Fahrenkrug, Eli},
abstractNote = {Electrochemical liquid phase epitaxy (ec-LPE) processes and devices are provided that can form precipitated epitaxial crystalline films or layers on a substrate. The precipitated films may comprise a semiconductor, such as germanium, silicon, or carbon. Dissolution into, saturation within, and precipitation of the semiconductor from a liquid metal electrode (e.g., Hg pool) near an interface region with a substrate yields a polycrystalline semiconductor material deposited as an epitaxial film. Reactor cells for use in an electrochemical liquid phase epitaxy (ec-LPE) device are also provided that include porous membranes to facilitate formation of the precipitated epitaxial crystalline films.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2020},
month = {1}
}
Save to My Library
You must Sign In or Create an Account in order to save documents to your library.
Works referenced in this record:
Electrochemical liquid-liquid-solid deposition processes for production of group IV semiconductor materials
patent, July 2016
- Maldonado, Stephen; Carim, Azhar
- US Patent Document 9,388,498
Flow Battery And Regeneration System
patent-application, February 2014
- Tolmachev, Yuriy Viacheslavovich
- US Patent Document 13/969597; 20140050999