MEMS capacitive wall shear stress vector measurement system
Abstract
Microelectromechanical systems (MEMS)-based devices capable of measuring wall shear stress vectors in three-dimensional aerodynamic flow fields are provided. A device can include a sensor that senses wall shear stress vectors in two in-plane axes and an interface circuit including a modulation section and a demodulation section. The device can be capable of making direct, real-time wall shear stress measurements without any need for using secondary measurements and/or models for validation.
- Inventors:
- Issue Date:
- Research Org.:
- Univ. of Florida, Gainesville, FL (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1632434
- Patent Number(s):
- 10533905
- Application Number:
- 15/906,748
- Assignee:
- University of Florida Research Foundation, Inc. (Gainesville, FL)
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 02/27/2018
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 47 OTHER INSTRUMENTATION; 42 ENGINEERING
Citation Formats
Sheplak, Mark, and Keane, Casey B. MEMS capacitive wall shear stress vector measurement system. United States: N. p., 2020.
Web.
Sheplak, Mark, & Keane, Casey B. MEMS capacitive wall shear stress vector measurement system. United States.
Sheplak, Mark, and Keane, Casey B. Tue .
"MEMS capacitive wall shear stress vector measurement system". United States. https://www.osti.gov/servlets/purl/1632434.
@article{osti_1632434,
title = {MEMS capacitive wall shear stress vector measurement system},
author = {Sheplak, Mark and Keane, Casey B.},
abstractNote = {Microelectromechanical systems (MEMS)-based devices capable of measuring wall shear stress vectors in three-dimensional aerodynamic flow fields are provided. A device can include a sensor that senses wall shear stress vectors in two in-plane axes and an interface circuit including a modulation section and a demodulation section. The device can be capable of making direct, real-time wall shear stress measurements without any need for using secondary measurements and/or models for validation.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2020},
month = {1}
}
Works referenced in this record:
Structure and fabrication of a microscale flow-rate/skin friction sensor
patent, September 2014
- Chandrasekharan, Vijay; Sells, Jeremy; Sheplak, Mark
- US Patent Document 8,833,175
Floating-element shear-stress sensor
patent, November 2014
- Horowitz, Stephen Brian; Sheplak, Mark; Nishida, Toshikazu
- US Patent Document 8,879,052
Fiber optic wall shear stress sensor
patent, July 2002
- Pulliam, Wade Joseph; Schetz, Joseph A.; Jones, Mark E.
- US Patent Document 6,426,796
Microelectromechanical floating element flow sensor
patent, November 2005
- Sheplak, Mark; Cattafesta, III, Louis N.; Nishida, Toshikazu
- US Patent Document 6,966,231
Tethered, levitated-mass accelerometer
patent, March 2015
- Netzer, Yishay; Aharon, Oren; Girgel, Michael
- US Patent Document 8,984,941