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Title: MEMS capacitive wall shear stress vector measurement system

Abstract

Microelectromechanical systems (MEMS)-based devices capable of measuring wall shear stress vectors in three-dimensional aerodynamic flow fields are provided. A device can include a sensor that senses wall shear stress vectors in two in-plane axes and an interface circuit including a modulation section and a demodulation section. The device can be capable of making direct, real-time wall shear stress measurements without any need for using secondary measurements and/or models for validation.

Inventors:
;
Issue Date:
Research Org.:
Univ. of Florida, Gainesville, FL (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1632434
Patent Number(s):
10533905
Application Number:
15/906,748
Assignee:
University of Florida Research Foundation, Inc. (Gainesville, FL)
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Resource Relation:
Patent File Date: 02/27/2018
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION; 42 ENGINEERING

Citation Formats

Sheplak, Mark, and Keane, Casey B. MEMS capacitive wall shear stress vector measurement system. United States: N. p., 2020. Web.
Sheplak, Mark, & Keane, Casey B. MEMS capacitive wall shear stress vector measurement system. United States.
Sheplak, Mark, and Keane, Casey B. Tue . "MEMS capacitive wall shear stress vector measurement system". United States. https://www.osti.gov/servlets/purl/1632434.
@article{osti_1632434,
title = {MEMS capacitive wall shear stress vector measurement system},
author = {Sheplak, Mark and Keane, Casey B.},
abstractNote = {Microelectromechanical systems (MEMS)-based devices capable of measuring wall shear stress vectors in three-dimensional aerodynamic flow fields are provided. A device can include a sensor that senses wall shear stress vectors in two in-plane axes and an interface circuit including a modulation section and a demodulation section. The device can be capable of making direct, real-time wall shear stress measurements without any need for using secondary measurements and/or models for validation.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2020},
month = {1}
}

Works referenced in this record:

Structure and fabrication of a microscale flow-rate/skin friction sensor
patent, September 2014


Floating-element shear-stress sensor
patent, November 2014


Fiber optic wall shear stress sensor
patent, July 2002


Microelectromechanical floating element flow sensor
patent, November 2005


Tethered, levitated-mass accelerometer
patent, March 2015