DOE Patents title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Miniature device for ultra high sensitivity and stability probing in vacuum

Abstract

The present disclosure relates to in situ transmission electron microscope (TEM) holders with improved stability and electrical sensitivity. The holders feature a front bearing seal and a rear bearing seal which allow the holders to achieve high sensitivity, high stability, large range of motion and high vacuum isolation. The bearings use a PEEK insulating disk as a pivot point for translation and tilting motion, and use O-rings to dampen vibrations, provide electrical and vacuum insulation, and to set a grabbing force between the bearing and the probe.

Inventors:
; ; ; ;
Issue Date:
Research Org.:
Univ. of California, Oakland, CA (United States); Univ. of Michigan, Ann Arbor, MI (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1600448
Patent Number(s):
10520527
Application Number:
16/221,998
Assignee:
The Regents of the University of California (Oakland, CA); The Regents of the University of Michigan (Ann Arbor, MI)
Patent Classifications (CPCs):
G - PHYSICS G01 - MEASURING G01Q - SCANNING-PROBE TECHNIQUES OR APPARATUS
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
DOE Contract Number:  
SC0014430
Resource Type:
Patent
Resource Relation:
Patent File Date: 12/17/2018
Country of Publication:
United States
Language:
English
Subject:
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; 36 MATERIALS SCIENCE

Citation Formats

Pan, Xiaoqing, Blum, Thomas F., Xu, Mingjie, Jokisaari, Jake, and Bigelow, Wilbur. Miniature device for ultra high sensitivity and stability probing in vacuum. United States: N. p., 2019. Web.
Pan, Xiaoqing, Blum, Thomas F., Xu, Mingjie, Jokisaari, Jake, & Bigelow, Wilbur. Miniature device for ultra high sensitivity and stability probing in vacuum. United States.
Pan, Xiaoqing, Blum, Thomas F., Xu, Mingjie, Jokisaari, Jake, and Bigelow, Wilbur. Tue . "Miniature device for ultra high sensitivity and stability probing in vacuum". United States. https://www.osti.gov/servlets/purl/1600448.
@article{osti_1600448,
title = {Miniature device for ultra high sensitivity and stability probing in vacuum},
author = {Pan, Xiaoqing and Blum, Thomas F. and Xu, Mingjie and Jokisaari, Jake and Bigelow, Wilbur},
abstractNote = {The present disclosure relates to in situ transmission electron microscope (TEM) holders with improved stability and electrical sensitivity. The holders feature a front bearing seal and a rear bearing seal which allow the holders to achieve high sensitivity, high stability, large range of motion and high vacuum isolation. The bearings use a PEEK insulating disk as a pivot point for translation and tilting motion, and use O-rings to dampen vibrations, provide electrical and vacuum insulation, and to set a grabbing force between the bearing and the probe.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2019},
month = {12}
}

Works referenced in this record:

Device for Operating Gas in Vacuum or Low-Pressure Environment and for Observation of the Operation
patent-application, November 2006


Manipulator for an Optical of Particle-Optical Apparatus
patent-application, May 2004


Electron Microscope and Sample Movement Device
patent-application, August 2015


Sample Holder with Optical Features for Holding a Sample in an Analytical Device for Research Purposes
patent-application, November 2012


Specimen Holder for Electron Microscope
patent-application, December 2006


Method and Apparatus for In-Situ Probe Tip Replacement Inside a Charged Particle Beam Microscope
patent-application, February 2006