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Title: Magnetoelastically actuated MEMS device and methods for its manufacture

Abstract

A magnetoelastically actuated device includes a microscale cantilever arm supported at a standoff distance from a substrate. The cantilever arm is formed as a laminar magnetic actuator configured to bend when it is subjected to a magnetic field. The cantilever arm includes a film of magnetostrictive material. Also provided is a method for fabricating the magnetoelastically actuated device. The method includes defining an actuator mold in a layer of photoresist on a structural layer of the cantilever arm and electrodepositing a layer of a magnetostrictive alloy containing cobalt and iron onto the structural layer within the actuator mold.

Inventors:
; ; ; ; ;
Issue Date:
Research Org.:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org.:
USDOE National Nuclear Security Administration (NNSA)
OSTI Identifier:
1600415
Patent Number(s):
10510945
Application Number:
15/719,219
Assignee:
National Technology & Engineering Solutions of Sandia, LLC (Albuquerque, NM)
Patent Classifications (CPCs):
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01F - MAGNETS
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
DOE Contract Number:  
AC04-94AL85000; NA0003525
Resource Type:
Patent
Resource Relation:
Patent File Date: 09/28/2017
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY

Citation Formats

Langlois, Eric, Arrington, Christian L., Finnegan, Patrick S., Hollowell, Andrew E., Pillars, Jamin Ryan, and Monson, Todd. Magnetoelastically actuated MEMS device and methods for its manufacture. United States: N. p., 2019. Web.
Langlois, Eric, Arrington, Christian L., Finnegan, Patrick S., Hollowell, Andrew E., Pillars, Jamin Ryan, & Monson, Todd. Magnetoelastically actuated MEMS device and methods for its manufacture. United States.
Langlois, Eric, Arrington, Christian L., Finnegan, Patrick S., Hollowell, Andrew E., Pillars, Jamin Ryan, and Monson, Todd. Tue . "Magnetoelastically actuated MEMS device and methods for its manufacture". United States. https://www.osti.gov/servlets/purl/1600415.
@article{osti_1600415,
title = {Magnetoelastically actuated MEMS device and methods for its manufacture},
author = {Langlois, Eric and Arrington, Christian L. and Finnegan, Patrick S. and Hollowell, Andrew E. and Pillars, Jamin Ryan and Monson, Todd},
abstractNote = {A magnetoelastically actuated device includes a microscale cantilever arm supported at a standoff distance from a substrate. The cantilever arm is formed as a laminar magnetic actuator configured to bend when it is subjected to a magnetic field. The cantilever arm includes a film of magnetostrictive material. Also provided is a method for fabricating the magnetoelastically actuated device. The method includes defining an actuator mold in a layer of photoresist on a structural layer of the cantilever arm and electrodepositing a layer of a magnetostrictive alloy containing cobalt and iron onto the structural layer within the actuator mold.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2019},
month = {12}
}

Patent:

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