Thickness mapping using multispectral imaging

Rupnowski, Przemyslaw; Ulsh, Michael Joseph

Title: Thickness mapping using multispectral imaging

Abstract

An example system includes a material transport system configured to transport a substantially planar material through a monitoring zone, an illumination source configured to illuminate at least a portion of the material that is within the monitoring zone with light, and a sensor configured to obtain a plurality of consecutive datasets. Datasets indicate, for locations of the material and for a specific wavelength of light, a respective intensity of the light that is of the wavelength and that is received from the location. The system also includes a processing system configured to receive the dataset, determine, based on the dataset and for each of at least two locations in the plurality of locations, a respective value of a thickness of the material, and execute, based on the respective value of the thickness of the material for at least one of the at least two locations, an action.

Inventors:: Rupnowski, Przemyslaw; Ulsh, Michael Joseph

Issue Date:: 2019-11-19

Research Org.:: National Renewable Energy Lab. (NREL), Golden, CO (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1600300

Patent Number(s):: 10480935

Application Number:: 15/830,585

Assignee:: Alliance for Sustainable Energy, LLC (Golden, CO)

Patent Classifications (CPCs):: G - PHYSICS G01 - MEASURING G01B - MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS

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G - PHYSICS G01 - MEASURING G01B - MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS
G01B11/0633 - {using one or more discrete wavelengths}
G01B11/06 - for measuring thickness, e.g. of sheet material

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DOE Contract Number:: AC36-08GO28308

Resource Type:: Patent

Resource Relation:: Patent File Date: 12/04/2017

Country of Publication:: United States

Language:: English

Subject:: 47 OTHER INSTRUMENTATION; 42 ENGINEERING

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                    Rupnowski, Przemyslaw, and Ulsh, Michael Joseph. Thickness mapping using multispectral imaging.  United States: N. p., 2019. 
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                    Rupnowski, Przemyslaw, & Ulsh, Michael Joseph. Thickness mapping using multispectral imaging.  United States.

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                    Rupnowski, Przemyslaw, and Ulsh, Michael Joseph. Tue .  
        "Thickness mapping using multispectral imaging".  United States.  https://www.osti.gov/servlets/purl/1600300.

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@article{osti_1600300,

  title        = {Thickness mapping using multispectral imaging},

  author       = {Rupnowski, Przemyslaw and Ulsh, Michael Joseph},

  abstractNote = {An example system includes a material transport system configured to transport a substantially planar material through a monitoring zone, an illumination source configured to illuminate at least a portion of the material that is within the monitoring zone with light, and a sensor configured to obtain a plurality of consecutive datasets. Datasets indicate, for locations of the material and for a specific wavelength of light, a respective intensity of the light that is of the wavelength and that is received from the location. The system also includes a processing system configured to receive the dataset, determine, based on the dataset and for each of at least two locations in the plurality of locations, a respective value of a thickness of the material, and execute, based on the respective value of the thickness of the material for at least one of the at least two locations, an action.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2019},

  month        = {11}

}

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Title: Thickness mapping using multispectral imaging

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Adjustable feature access for a controlled environmental system patent, April 2014

Fluorescent penetrant inspection sensor patent, November 1990

High resolution monitoring of CD variations patent, July 2009

Apparatus and method for inspection of high component density printed circuit board patent, October 1995

Method of media type differentiation in an imaging apparatus patent, February 2006

Computer aided inspection machine patent, May 2000

Surface condition judging apparatus patent, April 1986

Method of inspecting microscopic surface defects patent, May 1984

Method and apparatus for performing highly accurate thin film measurements patent, July 2008

Testing system for solar cells patent, March 2010

Determination of characteristics of material patent, May 2000

Wafer inspection method and apparatus using diffracted light patent, July 1998

Method and apparatus for manufacturing known good semiconductor die patent, June 1997

Apparatus for measuring the color of a brilliant-cut diamond patent, November 1984

Two-phase optical inspection method and apparatus for defect detection patent, December 1997

Optical system for determining physical characteristics of a solar cell patent, August 2001

Optical system for forming an illuminated pattern on a material in motion and which illuminated pattern is synchronized with a detection device patent, December 2009

Traversing thickness measurement apparatus and related method patent, September 1998

Real-time in-line testing of semiconductor wafers patent, June 2005

Surface pit detection system and method patent, December 1988

Automatic inspection apparatus and method for simultaneous detection of anomalies in a 3-dimensional translucent object patent, March 2003

Video inspection system employing multiple spectrum LED illumination patent, November 1994

Peripheral edge exposure method patent, September 1998

Material composition analysis system and method patent, April 2008

Method of making a gas diffusion media and quality controls for same patent, October 2007

Method and system for automated measurement of whole-wafer etch pit density in GaAs patent, April 1991

Arrangement and method for inspection of surface quality patent, December 2001

Self referencing heterodyne reflectometer and method for implementing patent, September 2009

Reflective type media sensing methodology patent, May 2002

Quality control methods for gas diffusion media patent, February 2007

Electro-optical inspection patent, May 1992

System for characterizing semiconductor materials and photovoltaic device patent, December 1996

Method and device for simultaneously measuring multiple properties of multilayer films patent, May 2002

Apparatus for inspecting wafers patent, November 1989

Double sided optical inspection of thin film disks or wafers patent, March 2007

Control system for multiple heating, ventilation and air conditioning units patent, October 2010

Method and apparatus for sensing or determining one or more properties or the identity of a sample patent, December 1989

Wafer characteristics via reflectometry patent, October 2010

Apparatus and method for detecting longitudinally oriented flaws in a moving web patent, December 1997

Automated wafer defect inspection system and a process of performing such inspection patent, June 2010

Method and apparatus for testing photovoltaic solar cells using multiple pulsed light sources patent, November 2000

Copying apparatus patent, September 1986

Apparatus and methods for the analytical determination of sample component concentrations that account for experimental error patent, March 1998

Optical reflectance method for determining the surface roughness of materials in semiconductor processing patent, April 1985

Surface defect inspecting apparatus patent, December 1986

Integrated sphere for diffusal reflectance and transmittance patent, July 1996

Color-correcting exposure system for a photosensitive media patent, May 1990

Method for real-time in-line testing of semiconductor wafers patent, November 2001

Method and its apparatus for inspecting particles or defects of a semiconductor device patent-application, December 2005

System for automatic quality inspection of a printed image, comprising an image sensor, evaluation unit and display patent, February 2010

Coupling arrangement between a multi-mode light source and an optical fiber through an intermediate optical fiber length patent, December 1999

Intelligent light source patent, October 2002

Fuel cell patent, March 2010

Particle detection method and apparatus patent, September 1988

Method and apparatus for the measurement of cell size in a foam structure patent, May 1982

Three-dimensional range camera patent, August 1987

Etch pit density measuring method patent, May 1990

Non-contact optical techniques for measuring surface conditions patent, February 1996

System for dimensioning objects using at least one light beam offset relative to a perpendicular from an object supporting surface patent, August 2004

Three-dimensional optical volume measurement for objects to be categorized patent, April 2002

High efficiency, low cost, thin film silicon solar cell design and method for making patent, March 2001

Measuring apparatus for etching pits patent, June 1989

Biochemical assay device using frustrated total internal reflection modulator with an imaging optical waveguide patent, March 2004

Apparatus and method for providing uniform illumination of a sample plane patent, December 1993

Wafer characteristics via reflectometry and wafer processing apparatus and method patent, July 2007

Device and method for testing a membrane electrode assembly patent, September 2006

Apparatus for determining the effective surface roughness of polished optical samples by measuring the integral scattered radiation patent, November 1990

Determination of thin film topography patent, February 2007

Method and apparatus for detecting and locating perforations in membranes employed in electrochemical cells patent, June 1998

Image processing type of measuring device, lighting system for the same, lighting system control method, lighting system control program, and a recording medium with the lighting system control program recorded therein patent, February 2007

Method for detecting crystal defects in semiconductor silicon and detecting solution therefor patent, January 1981

System for detecting unevenness degree of surface of semiconductor device patent, August 1998

Raman and photoluminescence spectroscopy patent, April 2008

Processing for the optical sorting of bulk material patent, December 1996

Thin-film metrology using spectral reflectance with an intermediate in-line reference patent, March 2009

Display device for cameras patent, June 1988

Method for detecting electrical defects in membrane electrode assemblies
patent, February 2007

Adjustable feature access for a controlled environmental system
patent, April 2014

Fluorescent penetrant inspection sensor
patent, November 1990

High resolution monitoring of CD variations
patent, July 2009

Apparatus and method for inspection of high component density printed circuit board
patent, October 1995

Method of media type differentiation in an imaging apparatus
patent, February 2006

Computer aided inspection machine
patent, May 2000

Surface condition judging apparatus
patent, April 1986

Method of inspecting microscopic surface defects
patent, May 1984

Method and apparatus for performing highly accurate thin film measurements
patent, July 2008

Testing system for solar cells
patent, March 2010

Determination of characteristics of material
patent, May 2000

Wafer inspection method and apparatus using diffracted light
patent, July 1998

Method and apparatus for manufacturing known good semiconductor die
patent, June 1997

Apparatus for measuring the color of a brilliant-cut diamond
patent, November 1984

Two-phase optical inspection method and apparatus for defect detection
patent, December 1997

Optical system for determining physical characteristics of a solar cell
patent, August 2001

Optical system for forming an illuminated pattern on a material in motion and which illuminated pattern is synchronized with a detection device
patent, December 2009

Traversing thickness measurement apparatus and related method
patent, September 1998

Real-time in-line testing of semiconductor wafers
patent, June 2005

Surface pit detection system and method
patent, December 1988

Automatic inspection apparatus and method for simultaneous detection of anomalies in a 3-dimensional translucent object
patent, March 2003

Video inspection system employing multiple spectrum LED illumination
patent, November 1994

Peripheral edge exposure method
patent, September 1998

Material composition analysis system and method
patent, April 2008

Method of making a gas diffusion media and quality controls for same
patent, October 2007

Method and system for automated measurement of whole-wafer etch pit density in GaAs
patent, April 1991

Arrangement and method for inspection of surface quality
patent, December 2001

Self referencing heterodyne reflectometer and method for implementing
patent, September 2009

Reflective type media sensing methodology
patent, May 2002

Quality control methods for gas diffusion media
patent, February 2007

Electro-optical inspection
patent, May 1992

System for characterizing semiconductor materials and photovoltaic device
patent, December 1996

Method and device for simultaneously measuring multiple properties of multilayer films
patent, May 2002

Apparatus for inspecting wafers
patent, November 1989

Double sided optical inspection of thin film disks or wafers
patent, March 2007

Control system for multiple heating, ventilation and air conditioning units
patent, October 2010

Method and apparatus for sensing or determining one or more properties or the identity of a sample
patent, December 1989

Wafer characteristics via reflectometry
patent, October 2010

Apparatus and method for detecting longitudinally oriented flaws in a moving web
patent, December 1997

Automated wafer defect inspection system and a process of performing such inspection
patent, June 2010

Method and apparatus for testing photovoltaic solar cells using multiple pulsed light sources
patent, November 2000

Copying apparatus
patent, September 1986

Apparatus and methods for the analytical determination of sample component concentrations that account for experimental error
patent, March 1998

Optical reflectance method for determining the surface roughness of materials in semiconductor processing
patent, April 1985

Surface defect inspecting apparatus
patent, December 1986

Integrated sphere for diffusal reflectance and transmittance
patent, July 1996

Color-correcting exposure system for a photosensitive media
patent, May 1990

Method for real-time in-line testing of semiconductor wafers
patent, November 2001

Method and its apparatus for inspecting particles or defects of a semiconductor device
patent-application, December 2005

System for automatic quality inspection of a printed image, comprising an image sensor, evaluation unit and display
patent, February 2010

Coupling arrangement between a multi-mode light source and an optical fiber through an intermediate optical fiber length
patent, December 1999

Intelligent light source
patent, October 2002

Fuel cell
patent, March 2010

Particle detection method and apparatus
patent, September 1988

Method and apparatus for the measurement of cell size in a foam structure
patent, May 1982

Three-dimensional range camera
patent, August 1987

Etch pit density measuring method
patent, May 1990

Non-contact optical techniques for measuring surface conditions
patent, February 1996

System for dimensioning objects using at least one light beam offset relative to a perpendicular from an object supporting surface
patent, August 2004

Three-dimensional optical volume measurement for objects to be categorized
patent, April 2002

High efficiency, low cost, thin film silicon solar cell design and method for making
patent, March 2001

Measuring apparatus for etching pits
patent, June 1989

Biochemical assay device using frustrated total internal reflection modulator with an imaging optical waveguide
patent, March 2004

Apparatus and method for providing uniform illumination of a sample plane
patent, December 1993

Wafer characteristics via reflectometry and wafer processing apparatus and method
patent, July 2007

Device and method for testing a membrane electrode assembly
patent, September 2006

Apparatus for determining the effective surface roughness of polished optical samples by measuring the integral scattered radiation
patent, November 1990

Determination of thin film topography
patent, February 2007

Method and apparatus for detecting and locating perforations in membranes employed in electrochemical cells
patent, June 1998

Image processing type of measuring device, lighting system for the same, lighting system control method, lighting system control program, and a recording medium with the lighting system control program recorded therein
patent, February 2007

Method for detecting crystal defects in semiconductor silicon and detecting solution therefor
patent, January 1981

System for detecting unevenness degree of surface of semiconductor device
patent, August 1998

Raman and photoluminescence spectroscopy
patent, April 2008

Processing for the optical sorting of bulk material
patent, December 1996

Thin-film metrology using spectral reflectance with an intermediate in-line reference
patent, March 2009

Display device for cameras
patent, June 1988

Defect detecting device for two-layer parts, in particular for solar cells
patent, November 1994

Defect mapping system
patent, April 1995

Optical illumination and inspection system for wafer and solar cell defects
patent, August 1994