skip to main content
DOE Patents title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Thickness mapping using multispectral imaging

Abstract

An example system includes a material transport system configured to transport a substantially planar material through a monitoring zone, an illumination source configured to illuminate at least a portion of the material that is within the monitoring zone with light, and a sensor configured to obtain a plurality of consecutive datasets. Datasets indicate, for locations of the material and for a specific wavelength of light, a respective intensity of the light that is of the wavelength and that is received from the location. The system also includes a processing system configured to receive the dataset, determine, based on the dataset and for each of at least two locations in the plurality of locations, a respective value of a thickness of the material, and execute, based on the respective value of the thickness of the material for at least one of the at least two locations, an action.

Inventors:
;
Issue Date:
Research Org.:
National Renewable Energy Lab. (NREL), Golden, CO (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1600300
Patent Number(s):
10,480,935
Application Number:
15/830,585
Assignee:
Alliance for Sustainable Energy, LLC (Golden, CO)
DOE Contract Number:  
AC36-08GO28308
Resource Type:
Patent
Resource Relation:
Patent File Date: 12/04/2017
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION; 42 ENGINEERING

Citation Formats

Rupnowski, Przemyslaw, and Ulsh, Michael Joseph. Thickness mapping using multispectral imaging. United States: N. p., 2019. Web.
Rupnowski, Przemyslaw, & Ulsh, Michael Joseph. Thickness mapping using multispectral imaging. United States.
Rupnowski, Przemyslaw, and Ulsh, Michael Joseph. Tue . "Thickness mapping using multispectral imaging". United States. https://www.osti.gov/servlets/purl/1600300.
@article{osti_1600300,
title = {Thickness mapping using multispectral imaging},
author = {Rupnowski, Przemyslaw and Ulsh, Michael Joseph},
abstractNote = {An example system includes a material transport system configured to transport a substantially planar material through a monitoring zone, an illumination source configured to illuminate at least a portion of the material that is within the monitoring zone with light, and a sensor configured to obtain a plurality of consecutive datasets. Datasets indicate, for locations of the material and for a specific wavelength of light, a respective intensity of the light that is of the wavelength and that is received from the location. The system also includes a processing system configured to receive the dataset, determine, based on the dataset and for each of at least two locations in the plurality of locations, a respective value of a thickness of the material, and execute, based on the respective value of the thickness of the material for at least one of the at least two locations, an action.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2019},
month = {11}
}

Patent:

Save / Share:

Works referenced in this record:

Method for detecting electrical defects in membrane electrode assemblies
patent, February 2007


Adjustable feature access for a controlled environmental system
patent, April 2014


Fluorescent penetrant inspection sensor
patent, November 1990


High resolution monitoring of CD variations
patent, July 2009


Apparatus and method for inspection of high component density printed circuit board
patent, October 1995


Computer aided inspection machine
patent, May 2000


Surface condition judging apparatus
patent, April 1986


Method of inspecting microscopic surface defects
patent, May 1984


Testing system for solar cells
patent, March 2010


Determination of characteristics of material
patent, May 2000


Wafer inspection method and apparatus using diffracted light
patent, July 1998


Method and apparatus for manufacturing known good semiconductor die
patent, June 1997


Apparatus for measuring the color of a brilliant-cut diamond
patent, November 1984


Two-phase optical inspection method and apparatus for defect detection
patent, December 1997


Traversing thickness measurement apparatus and related method
patent, September 1998


Real-time in-line testing of semiconductor wafers
patent, June 2005


Surface pit detection system and method
patent, December 1988


Video inspection system employing multiple spectrum LED illumination
patent, November 1994


Peripheral edge exposure method
patent, September 1998


Material composition analysis system and method
patent, April 2008


Method and system for automated measurement of whole-wafer etch pit density in GaAs
patent, April 1991


Arrangement and method for inspection of surface quality
patent, December 2001


Self referencing heterodyne reflectometer and method for implementing
patent, September 2009


Reflective type media sensing methodology
patent, May 2002


Electro-optical inspection
patent, May 1992


Apparatus for inspecting wafers
patent, November 1989


Control system for multiple heating, ventilation and air conditioning units
patent, October 2010


Wafer characteristics via reflectometry
patent, October 2010


Apparatus and method for detecting longitudinally oriented flaws in a moving web
patent, December 1997


Automated wafer defect inspection system and a process of performing such inspection
patent, June 2010


Copying apparatus
patent, September 1986


Surface defect inspecting apparatus
patent, December 1986


Method for real-time in-line testing of semiconductor wafers
patent, November 2001


Intelligent light source
patent, October 2002


Fuel cell
patent, March 2010


Particle detection method and apparatus
patent, September 1988


Method and apparatus for the measurement of cell size in a foam structure
patent, May 1982


Three-dimensional range camera
patent, August 1987


Etch pit density measuring method
patent, May 1990


Non-contact optical techniques for measuring surface conditions
patent, February 1996


Measuring apparatus for etching pits
patent, June 1989


Apparatus and method for providing uniform illumination of a sample plane
patent, December 1993


Device and method for testing a membrane electrode assembly
patent, September 2006


Determination of thin film topography
patent, February 2007


Raman and photoluminescence spectroscopy
patent, April 2008


Processing for the optical sorting of bulk material
patent, December 1996


Display device for cameras
patent, June 1988


Defect detecting device for two-layer parts, in particular for solar cells
patent, November 1994


Defect mapping system
patent, April 1995


Optical illumination and inspection system for wafer and solar cell defects
patent, August 1994


Membrane electrode assemblies for use in fuel cells
patent, May 2007