Title: Method of characterizing the anisotropic, complex dielectric constant for materials with small dimensions

Abstract

A dielectric-coating based technique determines the refractive index of small dimension materials. The technique utilizes a sample of the small dimension material coated with the dielectric and an uncoated sample, where reflectivity is determined for each. The real and imaginary components of the refractive index can be determined for the small-dimension material itself.

Inventors:

Guo, Peijun; Schaller, Richard D.

Issue Date:

Tue Nov 12 00:00:00 EST 2019

Research Org.:

Argonne National Laboratory (ANL), Argonne, IL (United States)

Sponsoring Org.:

USDOE

OSTI Identifier:

1600280

Patent Number(s):

10475710

Application Number:

16/035,330

Assignee:

UChicago Argonne, LLC (Chicago, IL)

Patent Classifications (CPCs):

G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES

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G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES

G01N2021/4126 - {Index of thin films}
G01N2021/8477 - {Investigating crystals, e.g. liquid crystals}
G01N21/41 - Refractivity

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES

H01L21/02636 - {Selective deposition, e.g. simultaneous growth of mono- and non-monocrystalline semiconductor materials}
H01L21/324 - Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering
H01L22/12 - {for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions

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DOE Contract Number:  

AC02-06CH11357

Resource Type:

Patent

Resource Relation:

Patent File Date: 07/13/2018

Country of Publication:

United States

Language:

English

Subject:

36 MATERIALS SCIENCE; 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY