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Title: High sensitivity single-axis MEMS accelerometer with bilateral flexures

Abstract

A microelectromechanical systems (MEMS) accelerometer that has high sensitivity to motion along the z axis is discussed. The device includes two symmetrical sets of bilateral, diametrically opposed high aspect ratio flexures that tether a movable proof mass to the frame of the device. The flexures are designed in such a way as to restrict movement of the proof mass along the x and y axes but readily allow motion along the z axis. More specifically, when the device experiences an acceleration along the x or y axes, the proof mass is restricted from moving because some of the bilateral, diametrically opposed flexures are in compression and others are in tension.

Inventors:
; ; ;
Issue Date:
Research Org.:
National Technology & Engineering Solutions of Sandia, LLC, Albuquerque, NM (United States)
Sponsoring Org.:
USDOE National Nuclear Security Administration (NNSA)
OSTI Identifier:
1600276
Patent Number(s):
10,473,687
Application Number:
15/594,133
Assignee:
National Technology & Engineering Solutions of Sandia, LLC (Albuquerque, NM)
DOE Contract Number:  
NA0003525
Resource Type:
Patent
Resource Relation:
Patent File Date: 05/12/2017
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS

Citation Formats

Resnick, Paul J., Homeijer, Brian D., Friedmann, Thomas A., and Wiwi, Michael. High sensitivity single-axis MEMS accelerometer with bilateral flexures. United States: N. p., 2019. Web.
Resnick, Paul J., Homeijer, Brian D., Friedmann, Thomas A., & Wiwi, Michael. High sensitivity single-axis MEMS accelerometer with bilateral flexures. United States.
Resnick, Paul J., Homeijer, Brian D., Friedmann, Thomas A., and Wiwi, Michael. Tue . "High sensitivity single-axis MEMS accelerometer with bilateral flexures". United States. https://www.osti.gov/servlets/purl/1600276.
@article{osti_1600276,
title = {High sensitivity single-axis MEMS accelerometer with bilateral flexures},
author = {Resnick, Paul J. and Homeijer, Brian D. and Friedmann, Thomas A. and Wiwi, Michael},
abstractNote = {A microelectromechanical systems (MEMS) accelerometer that has high sensitivity to motion along the z axis is discussed. The device includes two symmetrical sets of bilateral, diametrically opposed high aspect ratio flexures that tether a movable proof mass to the frame of the device. The flexures are designed in such a way as to restrict movement of the proof mass along the x and y axes but readily allow motion along the z axis. More specifically, when the device experiences an acceleration along the x or y axes, the proof mass is restricted from moving because some of the bilateral, diametrically opposed flexures are in compression and others are in tension.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2019},
month = {11}
}

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Works referenced in this record:

Triple-axis MEMS accelerometer
patent, January 2016


Micromachined measuring cell with arm supported sensor
patent, September 1996


High-sensitivity, z-axis micro-electro-mechanical detection structure, in particular for an MEMS accelerometer
patent, December 2016


Sensor structure with L-shaped spring legs
patent, July 1997